LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Ọkpụrụkpụ 250-500um

LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6寸inch Orientaiton Y-42°/36°/108° Ọkpụrụkpụ 250-500um Foto a na-egosi

Nkọwa Dị Mkpirikpi:

Wafers LiTaO₃ na-anọchite anya sistemụ piezoelectric na ferroelectric dị oke mkpa, na-egosipụta ihe dị iche iche nke piezoelectric, nkwụsi ike okpomọkụ, na ihe ndị dị na anya, na-eme ka ha dị mkpa maka nzacha mmiri acoustic (SAW), resonators nnukwu acoustic wave (BAW), modulators optical, na ihe nchọpụta infrared. XKH bụ ọkachamara na nyocha na mmepụta wafer LiTaO₃ dị elu, na-eji usoro Czochralski (CZ) dị elu na usoro epitaxy mmiri mmiri (LPE) iji hụ na ha dị mma na kristal na njupụta ntụpọ <100/cm².

XKH na-enye wafers LiTaO₃ nke dị sentimita 3, sentimita 4, na sentimita 6 nke nwere ọtụtụ nhazi kristal (X-cut, Y-cut, Z-cut), na-akwado ọgwụgwọ doping ahaziri ahazi (Mg, Zn) na poling iji mezuo ihe achọrọ maka ngwa. Dielectric constant nke ihe ahụ (ε~40-50), piezoelectric coefficient (d₃₃~8-10 pC/N), na okpomọkụ Curie (~600°C) na-eme ka LiTaO₃ bụrụ ihe ndabere kachasị mma maka nzacha ugboro ugboro na sensọ ziri ezi.

Mmepụta anyị jikọtara ọnụ na-ekpuchi uto kristal, wafering, polishing, na skim-film, yana ikike mmepụta kwa ọnwa karịrị wafers 3,000 iji jee ozi na nkwukọrịta 5G, ngwa eletrọniki ndị ahịa, photonics, na ụlọ ọrụ nchekwa. Anyị na-enye ndụmọdụ teknụzụ zuru oke, njirimara ihe atụ, na ọrụ prototyping dị ala iji nye ngwọta LiTaO₃ kachasị mma.

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atụmatụ

Teknụzụ paramita

Aha	LiTaO3 nke ọkwa anya	Ọkwa tebụl ụda LiTaO3
Axial	Mbelata Z + / - 0.2 Celsius	Mkpụcha 36° Y / Mkpụcha 42° Y / Mkpụcha X(+ / - 0.2 Celsius)
Dayameta	76.2mm + / - 0.3mm/100±0.2mm	76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm
Datum plane	22mm + / - 2mm	22mm +/-2mm32mm +/-2mm
Ọkpụrụkpụ	500um + /-5mm1000um + /-5mm	500um + /-20mm350um + /-20mm
TV	≤ 10um	≤ 10um
Okpomọkụ Curie	605 °C + / - 0.7 °C (Ụzọ DTA)	605 °C + / -3 °C (Ụzọ DTA
Ogo elu	Ịchacha akụkụ abụọ	Ịchacha akụkụ abụọ
Akụkụ Chamfered	gburugburu nsọtụ	gburugburu nsọtụ

Njirimara Ndị Dị Mkpa

1. Nhazi kristal na arụmọrụ eletriki

· Nkwụsi ike nke kristal: 100% 4H-SiC polytype dominance, enweghị multicrystalline inclusions (dịka ọmụmaatụ, 6H/15R), yana XRD rocking rocking curve zuru oke na ọkara-maximum (FWHM) ≤32.7 arcsec.
· Njem Elu nke Ndị Na-ebu Ihe: Njem elektrọn nke 5,400 cm²/V·s (4H-SiC) na ngagharị oghere nke 380 cm²/V·s, na-eme ka atụmatụ ngwaọrụ dị elu.
·Isi Ike nke Radiation: Na-eguzogide radiation neutron 1 MeV yana oke mmebi nke 1 × 10¹⁵ n/cm², nke zuru oke maka ngwa ikuku na nuklia.

2. Njirimara okpomọkụ na nke mekaniki

· Oke Ọkụ Pụrụ Iche: 4.9 W/cm·K (4H-SiC), okpukpu atọ nke silicon, na-akwado ọrụ karịrị 200°C.
· Ọnụọgụ Mgbasawanye Okpomọkụ Dị Ala: CTE nke 4.0×10⁻⁶/K (25–1000°C), na-ahụ na e nwere ike ijikọta ya na nkwakọ ngwaahịa dabere na silicon ma belata nrụgide okpomọkụ.

3. Njikwa na Nhazi Mmezi Njọ
nke
· Njupụta nke paịpụ micropipe: <0.3 cm⁻² (wafers nke sentimita asatọ), njupụta nke mgbanwe <1,000 cm⁻² (akwadoro site na KOH etching).
· Ogo Elu: Ejiri CMP mee ka ọ dị mma ruo Ra <0.2 nm, na-emezu ihe achọrọ maka ọkwa larịị nke EUV lithography.

Ngwa Ndị Dị Mkpa

Ngalaba	Ọnọdụ Ngwa	Uru Teknụzụ
Nkwukọrịta Anya	100G/400G lasers, silicon photonics ngwakọ modulu	Mkpụrụ InP na-eme ka bandgap kpọmkwem (1.34 eV) na heteroepitaxy dabere na Si na-eme ka ọ dị mfe, na-ebelata mfu njikọ anya.
Ụgbọala Ike Ọhụrụ	Ndị na-agbanwe voltaji dị elu nke 800V, chaja dị n'ime (OBC)	Ihe ndị mejupụtara 4H-SiC na-eguzogide ihe karịrị 1,200 V, na-ebelata mfu conduction site na 50% na olu sistemụ site na 40%.
Mmekọrịta 5G	Ngwaọrụ RF nke milimita-ebili mmiri (PA/LNA), ihe ndị na-eme ka ike dị n'ọdụ ala dị elu	Ihe ndị e ji SiC nke na-egbochi ihe mgbochi ọkara (resistvion >10⁵ Ω·cm) na-eme ka njikọta ugboro ugboro dị elu (60 GHz+) na-arụ ọrụ nke ọma.
Ngwaọrụ ụlọ ọrụ	Ihe mmetụta okpomọkụ dị elu, transformers ugbu a, ihe nlekota reactor nuklia	Mkpụrụ InSb (0.17 eV bandgap) na-enye mmetụta magnetik ruo 300% @ 10 T.

Wafers LiTaO₃ - Njirimara Ndị Dị Mkpa

1. Arụmọrụ Piezoelectric Kachasị Elu

· Oke ọnụọgụ piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) na-eme ka ngwaọrụ SAW/BAW dị elu na-enweta mbelata ntinye <1.5dB maka nzacha RF 5G

· Njikọ elektrọnik dị mma na-akwado nhazi nzacha obosara (≥5%) maka ngwa sub-6GHz na mmWave

2. Njirimara Anya

· Nghọta nke broadband (>70% nnyefe site na 400-5000nm) maka ndị na-eme ihe na-eme ka electro-optic na-enweta bandwidth >40GHz

· Ike siri ike nke na-abụghị ahịrị (χ⁽²⁾~30pm/V) na-eme ka mmepụta harmonic nke abụọ (SHG) dị irè na sistemụ laser

3. Ịkwụsi Ike na Gburugburu Ebe Obibi

· Oke okpomọkụ Curie (600°C) na-ejigide nzaghachi piezoelectric na gburugburu ụgbọala (-40°C ruo 150°C)

· Enweghị ike kemịkalụ megide asịd/alkalie (pH1-13) na-eme ka a pụrụ ịtụkwasị obi na ngwa sensọ ụlọ ọrụ mmepụta ihe

4. Ike Nhazi

· Injinịa nhazi: X-cut (51°), Y-cut (0°), Z-cut (36°) maka nzaghachi piezoelectric ahaziri ahazi

· Nhọrọ ọgwụ mgbochi: Mg-doped (nguzogide mmebi anya), Zn-doped (emelitere d₃₃)

· Mmecha elu: Mmecha Epitaxial-ready polishing (Ra<0.5nm), ITO/Au metallization

Wafers LiTaO₃ - Ngwa Ndị Isi

1. Modulu RF nke dị n'ihu

· Ihe nzacha 5G NR SAW (Band n77/n79) nwere ọnụọgụ okpomọkụ nke ugboro ole (TCF) <|-15ppm/°C|

· Igwe resonators BAW nke sara mbara nke ukwuu maka WiFi 6E/7 (5.925-7.125GHz)

2. Ngwakọta Photonics

· Ngwa modulator Mach-Zehnder dị elu (>100Gbps) maka nkwukọrịta anya dị n'otu

· Ihe nchọpụta infrared QWIP nwere ogologo ebili mmiri nke a na-agbanwe agbanwe site na 3-14μm

3. Elektrọniki Ụgbọala

· Ihe mmetụta ebe a na-adọba ụgbọala Ultrasonic nwere ugboro ọrụ karịrị 200kHz

· TPMS piezoelectric transducers na-adị ndụ site na -40°C ruo 125°C

4. Sistemụ Nchebe

· Ihe nzacha nnata EW nwere >60dB nke jụrụ enweghị band

· Windo IR nke na-achọ ngwa agha na-ekesa radieshon 3-5μm MWIR

5. Teknụzụ Ndị Na-apụta Apụta

· Igwe mgbanwe kwantum anya maka ntụgharị microwave-to-optical

· Usoro PMUT maka onyonyo ultrasound ahụike (> mkpebi 20MHz)

LiTaO₃ Wafers - Ọrụ XKH

1. Njikwa Ngwunye Ngwa

· Nhazi Boule-to-wafer yana oge ndu izu anọ maka nkọwapụta ọkọlọtọ

· Mmepụta nke e mere ka ọ dị ọnụ ala na-enye uru ọnụahịa 10-15% ma e jiri ya tụnyere ndị asọmpi

2. Ngwọta Pụrụ Iche

· Mbelata nke a na-eme n'usoro: 36°±0.5° Y-mbepụ maka arụmọrụ SAW kacha mma

· Ngwakọta e tinyere ọgwụ: MgO (5mol%) maka ojiji anya

Ọrụ nhazi ígwè: Nhazi elektrọd Cr/Au (100/1000Å)

3. Nkwado teknụzụ

· Njirimara ihe: Usoro mkpọtụ XRD (FWHM<0.01°), nyocha elu AFM

· Nlele ngwaọrụ: Nhazi FEM maka nhazi nhazi nzacha SAW

Mmechi

Wafers LiTaO₃ na-aga n'ihu na-eme ka ọganihu teknụzụ dị na nkwukọrịta RF, fotonik agbakwunyere, na ihe mmetụta gburugburu ebe obibi sie ike. Ọkachamara ihe onwunwe nke XKH, nkenke nrụpụta, na nkwado injinia ngwa na-enyere ndị ahịa aka imeri ihe ịma aka imewe na sistemụ eletrọniki ọgbọ na-abịa.