LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° ọkpụrụkpụ 250-500um
Usoro nka
Aha | Ngwa anya-ọkwa LiTaO3 | Ụda okpokoro larịị LiTaO3 |
Axial | Z ịkpụ +/- 0.2 Celsius | 36 ° Y ịkpụ / 42 ° Y ịkpụ / X ịkpụ(+/- 0.2 Celsius) |
Dayameta | 76.2mm + / - 0.3mm/100± 0.2mm | 76.2mm + /-0.3mm100mm +/-0.3mm 0r 150±0.5mm |
Ụgbọ elu Datum | 22mm +/-2mm | 22mm +/-2mm32mm +/-2mm |
Ọkpụrụkpụ | 500um +/-5mm1000um +/-5mm | 500um +/-20mm350um +/-20mm |
TTV | ≤ 10um | ≤ 10um |
Curie okpomọkụ | 605 Celsius C +/- 0.7 Celsius (Ụzọ DTA) | 605 Celsius C + / -3 Celsius (Usoro DTA |
Ogo elu | Nchacha akụkụ abụọ | Nchacha akụkụ abụọ |
Akụkụ chamfered | ihu okirikiri | ihu okirikiri |
Njirimara isi
1.Crystal Structure na Electric Performance
· Crystallographic Stability: 100% 4H-SiC polytype dominance, zero multicrystalline inclusions (eg, 6H/15R), na XRD mkpatụ curve zuru-obosara na ọkara-kacha (FWHM) ≤32.7 arcsec.
· Mbugharị ụgbọ elu dị elu: Mbugharị eletrọn nke 5,400 cm²/V·s (4H-SiC) na oghere oghere nke 380 cm²/V·s, na-eme ka eserese ngwaọrụ dị elu.
Ike ike radieshon: Na-eguzogide 1 MeV neutron irradiation nwere oke mmebi nke 1 × 10¹⁵ n/cm², dị mma maka ikuku ikuku na ngwa nuklia.
2.Thermal na Mechanical Properties
· Omume okpomọkụ pụrụ iche: 4.9 W / cm · K (4H-SiC), okpukpu atọ nke silicon, na-akwado ọrụ n'elu 200 ° C.
Obere Mgbasa Mgbasa Ọkụ dị ala: CTE nke 4.0 × 10⁻⁶/K (25-1000°C), na-eme ka ndakọrịta na nkwakọ ngwaahịa silicon na ibelata nrụgide okpomọkụ.
3.Defect Control and Processing Precision
nke
Njupụta Micropipe: <0.3 cm⁻² (wafers 8-inch), njupụta njupụta <1,000 cm⁻² (kwetara site na KOH etching).
Ọdịmma dị elu: CMP na-egbu maramara ka ọ bụrụ Ra <0.2 nm, na-ezute EUV lithography-grade flatness chọrọ.
Ngwa igodo
ngalaba | Ihe ngosi ngwa | Uru nka |
Communications Optical | 100G/400G lasers, silicon photonics ngwakọ modul | Mkpụrụ mkpụrụ InP na-eme ka bandgap kpọmkwem (1.34 eV) na heteroepitax nke dabeere na Si, na-ebelata mfu njikọ anya. |
Ụgbọ ala ume ọhụrụ | 800V elu voltaji inverters, n'elu chaja (OBC) | Ihe ntinye 4H-SiC na-eguzogide> 1,200 V, na-ebelata mfu conduction site na 50% yana olu sistemụ site na 40%. |
Mmekọrịta 5G | Ngwaọrụ RF Millimeter-wave (PA/LNA), ihe mgba ọkụ ọdụ ọdụ | Mgbochi SiC na-ekpuchi ọkara (resistivity> 10⁵ Ω·cm) na-eme ka mbanye na-agafe agafe ugboro dị elu (60 GHz+). |
Akụrụngwa ụlọ ọrụ | Ihe mmetụta okpomọkụ dị elu, ihe ngbanwe dị ugbu a, ihe nleba anya ngwa ngwa nuklia | Mkpụrụ mkpụrụ inSb (0.17 eV bandgap) na-enye ikike ndọta ruo 300% @ 10 T. |
LiTaO₃ Wafers - Njirimara isi
1. Arụmọrụ Piezoelectric dị elu
Ọnụọgụ piezoelectric dị elu (d₃₃ ~ 8-10 pC/N, K² ~ 0.5%) na-eme ka ngwaọrụ SAW/BAW dị elu na ntinye ntinye <1.5dB maka nzacha 5G RF
Njikọ elektrọnik dị mma na-akwado atụmatụ nzacha obosara (≥5%) maka ngwa sub-6GHz na mmWave
2. Ngwa anya
Nkọwapụta mgbasa ozi mgbasa ozi (> 70% sitere na 400-5000nm) maka ndị na-ahụ maka elektrọn optic na-enweta> bandwidth 40GHz
Ihe nleba anya anya siri ike (χ⁽²⁾ ~ 30pm/V) na-eme ka ọgbọ nke abụọ na-arụkọ ọrụ ọnụ (SHG) rụọ ọrụ nke ọma na sistemụ laser.
3. Environmental kwụsie ike
Okpomọkụ Curie dị elu (600°C) na-edobe nzaghachi piezoelectric na mpaghara ụgbọ ala (-40°C ruo 150°C)
· Inertness kemịkalụ megide acid / alkalies (pH1-13) na-eme ka ntụkwasị obi na ngwa ihe mmetụta mmepụta ihe.
4. Ikike nhazi
· Nhazi nhazi: X-cut (51°), Y-cut (0°), Z-cut (36°) maka nzaghachi piezoelectric ahaziri
Nhọrọ doping: Mg-doped (nkwụsị mmebi anya), Zn-doped (emelitere d₃₃)
Nwecha elu: Epitaxial dị njikere polishing (Ra<0.5nm), ITO/Au metallization
LiTaO₃ Wafers - Ngwa mbụ
1. RF N'ihu-Ọgwụgwụ Modul
· 5G NR SAW nzacha (Band n77/n79) na okpomọkụ ọnụọgụ nke ugboro (TCF) <|-15ppm/°C|
BAW resonators Ultra wideband maka WiFi 6E/7 (5.925-7.125GHz)
2. Photonics jikọtara ọnụ
Ndị modulators Mach-Zehnder dị elu (> 100Gbps) maka nkwukọrịta ngwa anya dị n'otu.
Ihe nchọpụta infrared QWIP nwere ogologo wavelengths nke nwere ike ịgbanwe site na 3-14μm
3. Igwe ọkụ eletrik
· Ultrasonic-adọba ụgbọala sensọ na> 200kHz arụmọrụ ugboro
Ndị ntụgharị piezoelectric TPMS na-adị ndụ -40°C ruo 125°C ịgba ígwè ọkụ.
4. Usoro nchekwa
Ihe nzacha ndị nnata EW nwere> 60dB jụrụ na-apụ apụ
Window IR onye na-achọ ogbunigwe na-ebufe 3-5μm MWIR radieshon
5. Teknụzụ na-apụta
Ndị ntụgharị ngbanwe nke optomechanical maka ngwa ngwa-na-optical ntụgharị
Ngwa PMUT maka onyonyo ultrasound ahụike (> mkpebi 20MHz)
LiTaO₃ Wafers - Ọrụ XKH
1. Njikwa Chain Supply
· Nhazi Boule-to-wafer nwere oge ụzọ izu anọ maka nkọwa ọkọlọtọ
· Mmepụta kachasị ọnụ ahịa na-ebuga uru ọnụahịa 10-15% megide ndị asọmpi
2. Ngwọta omenala
· Wafering akọwapụtara nke ọma: 36°±0.5° Y-ebipụ maka ịrụ ọrụ SAW kacha mma.
Ihe mejupụtara: MgO (5mol%) doping maka ngwa anya
Ọrụ nrụpụta igwe: Cr/Au (100/1000Å) ụkpụrụ electrode
3. Nkwado nka na ụzụ
· Ngosipụta ihe: XRD na-ama jijiji akụkụ (FWHM <0.01°), nyocha elu AFM
Simulation ngwaọrụ: Mwepụta FEM maka njikarịcha nzacha SAW
Mmechi
LiTaO₃ wafers na-aga n'ihu na-eme ka ọganihu teknụzụ dị n'ofe nkwukọrịta RF, fotonic agbakwunyere, na ihe mmetụta gburugburu gburugburu. Ọkachamara ihe XKH, nrụpụta nkenke, na nkwado injinịa ngwa na-enyere ndị ahịa aka imeri ihe ịma aka imewe na sistemụ elektrọnik ọgbọ na-abịa.


