Wafer Lithium Niobate nke Inch 8 LiNbO3 LN
Ozi zuru ezu
| Dayameta | 200±0.2mm |
| nnukwu larịị | 57.5mm, Ọkwa |
| Nhazi | 128Y-Cut, X-Cut, Z-Cut |
| Ọkpụrụkpụ | 0.5±0.025mm, 1.0±0.025mm |
| Elu | DSP na SSP |
| TV | < 5µm |
| ỤTA | ± (20µm ~ 40um) |
| Warp | <= 20µm ~ 50µm |
| LTV (5mmx5mm) | <1.5 um |
| PLTV(<0.5um) | ≥98% (5mm*5mm) nke e wepụrụ n'ọnụ 2mm |
| Ra | Ra<=5A |
| Kpụcha na Igwu (S/D) | 20/10, 40/20, 60/40 |
| Akụkụ | Zute SEMI M1.2@na GC800#. mgbe niile na ụdị C |
Nkọwapụta kpọmkwem
Dayameta: sentimita asatọ (ihe dị ka 200mm)
Ọkpụrụkpụ: Ọkpụrụkpụ ọkọlọtọ a na-ahụkarị sitere na 0.5mm ruo 1mm. Enwere ike ịhazi ọkpụrụkpụ ndị ọzọ dịka ihe achọrọ si dị.
Nhazi kristal: Nhazi kristal bụ isi bụ nhazi kristal 128Y-cut, Z-cut na X-cut, enwere ike inye nhazi kristal ndị ọzọ dabere na ngwa akọwapụtara.
Uru nha: Wafe carp serrata nke dị sentimita asatọ nwere ọtụtụ uru nha karịa wafe obere:
Ebe buru ibu: Ma e jiri ya tụnyere wafer nke dị sentimita isii ma ọ bụ sentimita anọ, wafer nke dị sentimita asatọ na-enye nnukwu elu ma nwee ike ịnabata ọtụtụ ngwaọrụ na sekit agbakwunyere, na-eme ka mmepụta na mmepụta dịkwuo mma.
Njupụta dị elu: Site na iji wafers nke dị sentimita asatọ, enwere ike nweta ọtụtụ ngwaọrụ na ihe ndị ọzọ n'otu mpaghara ahụ, na-eme ka njikọta na njupụta ngwaọrụ dịkwuo elu, nke na-eme ka arụmọrụ ngwaọrụ dịkwuo mma.
Nkwụsi ike Ka Mma: Wafer ndị buru ibu na-enwe nguzozi ka mma n'usoro mmepụta, na-enyere aka ibelata mgbanwe na usoro mmepụta ma melite ntụkwasị obi na nguzozi ngwaahịa.
Wafer L na LN nke dị sentimita asatọ nwere otu dayameta dị ka wafer silicon nkịtị ma dịkwa mfe ijikọ. Dịka ihe nzacha SAW jikọtara ọnụ nke nwere ike ijikwa eriri ugboro ugboro dị elu.
Ihe osise zuru ezu





