8 inch Lithium Niobate Wafer LiNbO3 LN wafer
Ozi zuru ezu
Dayameta | 200± 0.2mm |
isi flatness | 57.5mm, obosara |
Nhazi | 128Y-Cut, X-Cut, Z-Cut |
Ọkpụrụkpụ | 0.5± 0.025mm, 1.0±0.025mm |
Elu | DSP na SSP |
TTV | <5µm |
ỤTA | ± (20µm ~ 40um) |
Warp | <= 20µm ~ 50µm |
LTV (5mmx5mm) | <1.5 nke m |
PLTV (<0.5um) | ≥98% (5mm*5mm) na 2mm onu ewepu |
Ra | Ra <=5A |
Scratch & Gwuo (S/D) | 20/10, 40/20, 60/40 |
Ọnụ | Zute SEMI M1.2@ya na GC800#. mgbe niile na ụdị C |
Nkọwa akọwapụtara
Dayameta: 8 sentimita (ihe dị ka 200mm)
Ọkpụrụkpụ: ọkpụrụkpụ ọkọlọtọ a na-ahụkarị sitere na 0.5mm ruo 1mm. Enwere ike ịhazi ọkpụrụkpụ ndị ọzọ dịka ihe achọrọ
Ntuzi kristal: nghazi kristal a na-ahụkarị bụ 128Y-cut, Z-cut na X-cut crystal nghazi, enwere ike ịnye nghazi kristal ndị ọzọ dabere na ngwa a kapịrị ọnụ.
Uru nha: 8-inch serrata carp wafers nwere ọtụtụ uru nha karịa obere wafers:
Mpaghara buru ibu: E jiri ya tụnyere 6-inch ma ọ bụ 4-inch wafers, 8-inch wafers na-enye ebe dị elu karịa ma nwee ike ịnweta ọtụtụ ngwaọrụ na sekit jikọtara ọnụ, na-ebute mmụba mmepụta mmepụta na mmepụta.
Njupụta dị elu: Site na iji 8-inch wafers, ọtụtụ ngwaọrụ na ihe ndị ọzọ nwere ike ime n'otu mpaghara ahụ, na-abawanye ntinye na njupụta ngwaọrụ, nke na-eme ka arụmọrụ ngwaọrụ dịkwuo elu.
Nkwekọrịta ka mma: nnukwu wafers nwere nhazi dị mma na usoro mmepụta ihe, na-enyere aka belata mgbanwe dị iche iche na usoro mmepụta ihe ma melite ntụkwasị obi ngwaahịa na nkwụsi ike.
Ndị 8-inch L na LN wafers nwere otu dayameta dị ka silicon wafers ma dị mfe ijikọ. Dị ka ihe dị elu "njikọ SAW filter" ihe nwere ike ijikwa eriri ugboro dị elu.