50.8mm 2inch GaN na sapphire Epi-layer wafer

Nkọwa dị mkpirikpi:

Dị ka ọgbọ nke atọ semiconductor ihe onwunwe, gallium nitride nwere uru nke elu okpomọkụ nguzogide, elu ndakọrịta, elu thermal conductivity na wide band ọdịiche. Dị ka ihe dị iche iche mkpụrụ si dị, gallium nitride epitaxial sheets nwere ike kewaa ụzọ anọ: gallium nitride dabere na gallium nitride, silicon carbide based gallium nitride, sapphire based gallium nitride na silicon based gallium nitride. Akwụkwọ epitaxial gallium nitride dabeere na silicon bụ ngwaahịa a na-ejikarị eme ihe na ọnụ ahịa mmepụta dị ala yana teknụzụ mmepụta tozuru oke.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Ngwa nke gallium nitride GaN epitaxial mpempe akwụkwọ

Dabere na arụmọrụ nke gallium nitride, gallium nitride epitaxial chips bụ nke dabara adaba maka ike dị elu, ugboro dị elu na ngwa voltaji dị ala.

A na-egosipụta ya na:

1) High bandgap: High bandgap na-eme ka ọkwa voltaji nke ngwaọrụ gallium nitride dị elu ma nwee ike ịmepụta ike dị elu karịa ngwaọrụ gallium arsenide, nke dabara adaba maka ọdụ nkwurịta okwu 5G, radar ndị agha na mpaghara ndị ọzọ;

2) Ntugharị dị elu: na-eguzogide gallium nitride na-agbanwe ike ngwaọrụ eletrọnịkị bụ iwu 3 dị ala karịa nke ngwaọrụ silicon, nke nwere ike belata ọnwụ na-agbanwe agbanwe;

3) Igwe ọkụ na-ekpo ọkụ dị elu: ihe ọkụkụ dị elu nke gallium nitride na-eme ka ọ rụọ ọrụ nke ọma na-ekpo ọkụ ọkụ, nke kwesịrị ekwesị maka mmepụta nke ike dị elu, okpomọkụ na mpaghara ndị ọzọ nke ngwaọrụ;

4) Ike mgbawa eletriki: Ọ bụ ezie na ike mgbaka eletrik nke gallium nitride dị nso na nke silicon nitride, n'ihi usoro semiconductor, ihe na-adịghị mma na ihe ndị ọzọ, nkwụsị voltaji nke ngwaọrụ gallium nitride na-abụkarị ihe dịka 1000V, na voltaji ojiji nchekwa na-adịkarị n'okpuru 650V.

Ihe

GaN-TCU-C50

GaN-TCN-C50

GaN-TCP-C50

Akụkụ

e 50.8mm ± 0.1mm

Ọkpụrụkpụ

4.5 ± 0.5 um

4.5 ± 0.5um

Nhazi

C-ụgbọ elu(0001) ±0.5°

Ụdị omume

Ụdị N (Edochiri)

Ụdị N (Si-doped)

Ụdị P (Mg-doped)

Nguzogide (3O0K)

<0.5Q・cm

<0.05 Q・cm

~ 10 Q.cm

Ntinye uche nke ebu

<5x1017cm-3

> 1 x1018cm-3

> 6x1016 cm-3

Mbugharị

~ 300 cm2/Vs

~ 200 cm2/Vs

~ 10 cm2/Vs

Njupụta nke Dislocation

Ihe na-erughị 5x108cm-2(nke FWHM nke XRD gbakọrọ)

Ọdịdị mkpụrụ

GaN na Sapphire (Ọkọlọtọ: Nhọrọ SSP: DSP)

Mpaghara elu enwere ike iji

> 90%

ngwugwu

Ejiri ya na klaasị 100 dị ọcha gburugburu ụlọ, na cassettes nke 25pcs ma ọ bụ otu akpa wafer, n'okpuru ikuku nitrogen.

* Enwere ike ịhazi oke ọkpụrụkpụ ọzọ

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