4H-N/6H-N SiC Wafer Reasearch mmepụta Dummy grade Dia150mm Silicon carbide substrate

Nkọwa dị mkpirikpi:

Anyị nwere ike inye elu okpomọkụ superconducting mkpa film mkpụrụ, magnetik mkpa fim na ferroelectric mkpa film mkpụrụ, semiconductor crystal, ngwa anya crystal, laser kristal ihe, n'otu oge ahụ na-enye nghazi, kristal ọnwụ, egweri, polishing na ndị ọzọ nhazi ọrụ. Ngwa SiC anyị si na Tankeblue Factory na China.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

6 inch dayameta silicon carbide (SiC) nkọwa mkpụrụ

Ọkwa	MPD efu	Mmepụta	Ọkwa nyocha	Ngụsị akwụkwọ
Dayameta	150.0mm ± 0.25mm
Ọkpụrụkpụ	4H-N	350um±25um
	4H-SI	500um±25um
Usoro Wafer	Na axis: <0001>±0.5°maka 4H-SI Gbanyụọ axis: 4.0° chere ihu <1120>±0.5°maka 4H-N
Flat nke izizi	{10-10}±5.0°
Ogologo Flat nke izizi	47.5mm ± 2.5mm
Mwepu ihu	3mm
TTV/Ụta/Warp	≤15um/≤40um/≤60um
Njupụta Micropipe	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Resistivity 4H-N 4H-SI	0.015 ~ 0.028Ω! cm
	≥1E5Ω!cm
Isi ike	Polish Ra ≤1nm CMP Ra≤0.5nm
# Mgbawa site na nnukwu ọkụ ọkụ	Ọ dịghị		1 kwere, ≤2mm	Ngụkọta ogologo ≤10mm, otu ogologo≤2mm
* Efere Hex site na ọkụ dị elu	Mpaghara mkpokọta ≤1%		Mpaghara mkpokọta ≤ 2%	Mpaghara mkpokọta ≤ 5%
* Mpaghara polytype site na nnukwu ọkụ ọkụ	Ọ dịghị		Mpaghara mkpokọta ≤ 2%	Mpaghara mkpokọta ≤ 5%
*&Akụkụ site n'ìhè siri ike dị elu	Ogologo 3 nchikota ruo dayameta wafer 1		5 kpụchara ruo 1 x dayameta wafer ngụkọta ogologo	Ogologo 5scratches ruo dayameta wafer 1
Agba mgbawa	Ọ dịghị		3 kwere, ≤0.5mm nke ọ bụla	5 kwere, ≤1mm nke ọ bụla
Mmetọ site na nnukwu ọkụ ọkụ	Ọ dịghị

Ahịa & Ọrụ Ndị Ahịa

Ịzụ ihe

Ngalaba na-azụta ihe bụ ọrụ ịchịkọta akụrụngwa niile achọrọ iji mepụta ngwaahịa gị. Nchọpụta ngwaahịa na akụrụngwa niile, gụnyere nyocha kemịkalụ na anụ ahụ na-adị mgbe niile.

Ogo

N'oge na mgbe nrụpụta ma ọ bụ na-arụ ọrụ nke ngwaahịa gị, ngalaba njikwa mma na-etinye aka n'ịhụ na ihe niile na ndidi na-ezute ma ọ bụ gafere nkọwapụta gị.

Ọrụ

Anyị ji onwe anyị nganga inwe ndị ọrụ injinia ahịa nwere ahụmịhe karịa afọ 5 na ụlọ ọrụ semiconductor. A zụrụ ha ka ha zaa ajụjụ teknuzu yana ịnye ngụ oge maka mkpa gị.

anyị nọ n'akụkụ gị n'oge ọ bụla ị nwere nsogbu ma dozie ya n'ime awa 10.