Sistemụ Nhazi Wafer maka Nhazi Nhazi Crystal
Okwu Mmalite nke Ngwaọrụ
Ngwa nhazi Wafer bụ ngwaọrụ nkenke dabere na ụkpụrụ X-ray diffraction (XRD), nke a na-ejikarị eme ihe na mmepụta semiconductor, ihe anya, seramiiki, na ụlọ ọrụ ihe kristal ndị ọzọ.
Ngwaọrụ ndị a na-ekpebi nhazi kristal lattice ma na-eduzi usoro ịkpụ ma ọ bụ polishing ziri ezi. Isi ihe ndị dị mkpa gụnyere:
- Nha nha dị oke nkenke:Nwere ike idozi ụgbọ elu kristal nwere mkpebi akụkụ ruo 0.001°.
- Ndakọrịta ihe atụ buru ibu:Ọ na-akwado wafers ruru dayameta ruru 450 mm na ịdị arọ nke kilogram 30, dabara adaba maka ihe dịka silicon carbide (SiC), sapphire, na silicon (Si).
- Nhazi modular:Ọrụ ndị a na-agbasawanye gụnyere nyocha nke usoro rocking curve, nhazi ntụpọ elu 3D, na ngwaọrụ stacking maka nhazi ọtụtụ ihe nlele.
Isi Teknụzụ Paramita
| Nkeji paramita | Ụkpụrụ/Nhazi A Na-ahụkarị |
| Isi Iyi X-ray | Cu-Kα (ebe nchekwa 0.4×1 mm), voltaji ngwa ngwa 30 kV, ọkụ eletrik tube a na-agbanwe agbanwe 0–5 mA |
| Oghere Angular | θ: -10° ruo +50°; 2θ: -10° ruo +100° |
| Izi ezi | Mkpebi akụkụ ntụgharị: 0.001°, nchọpụta ntụpọ elu: ± 30 arcseconds (usoro ịma jijiji) |
| Ọsọ nyocha | Nnyocha Omega na-emecha nhazi zuru oke nke lattice n'ime sekọnd 5; Nyocha Theta na-ewe ihe dị ka nkeji 1 |
| Ọkwa ihe atụ | V-groove, mmịpụta ikuku, ntụgharị akụkụ dị iche iche, dakọtara na wafers 2-8-inch |
| Ọrụ Ndị A Na-agbasawanye | Nyocha nke usoro mgbagharị, maapụ 3D, ngwaọrụ nchịkọta, nchọpụta ntụpọ anya (ọkọ, GBs) |
Ụkpụrụ Ọrụ
1. Ntọala Diffraction X-ray
- X-ray na-emekọrịta ihe na nuclei atọm na elektrọn dị na lattice kristal, na-emepụta ụkpụrụ diffraction. Iwu Bragg (nλ = sinθ 2d) na-achịkwa mmekọrịta dị n'etiti akụkụ diffraction (θ) na oghere lattice (d).
Ihe nchọpụta na-ejide ụkpụrụ ndị a, nke a na-enyocha iji wughachi nhazi kristal ahụ.
2. Teknụzụ Nnyocha Omega
- Kristal ahụ na-agbagharị gburugburu axis a kapịrị ọnụ mgbe niile ebe X-ray na-enye ya ìhè.
- Ihe nchọpụta na-anakọta akara diffraction n'ofe ọtụtụ mbara igwe kristal, na-eme ka mkpebi nhazi lattice zuru oke na sekọnd 5.
3. Nyocha nke Usoro Mkpọgharị
- Akuku kristal edobere nke nwere akụkụ X-ray dị iche iche iji tụọ obosara elu (FWHM), na-enyocha ntụpọ lattice na nrụgide.
4. Njikwa akpaghị aka
- Njikọ PLC na ihuenyo mmetụ aka na-eme ka akụkụ ịkpụzi ihe dị mkpa, nzaghachi oge, na ijikọ ya na igwe ịkpụ ihe maka njikwa mkpọchi mechiri emechi.
Uru na Atụmatụ
1. Ịdị nkenke na arụmọrụ
- Izi ezi nke akụkụ ±0.001°, mkpebi nchọpụta ntụpọ <30 arcsekọnd.
- Ọsọ nyocha Omega dị ngwa ngwa karịa nyocha Theta ọdịnala.
2. Nhazi na Nhazi
- A na-agbasawanye maka ngwa pụrụ iche (dịka ọmụmaatụ, wafers SiC, agụba turbine).
- Na-ejikọta ya na sistemụ MES maka nlekota mmepụta n'oge.
3. Ndakọrịta na Ịkwụsi Ike
- Na-anabata ihe atụ ndị na-adịghị mma (dịka ọmụmaatụ, ihe mkpuchi sapphire gbawara agbawa).
- Nhazi nke ikuku oyi na-ebelata mkpa mmezi.
4. Ọrụ ọgụgụ isi
- Nhazi otu pịa na nhazi ọtụtụ ọrụ.
- Nhazi akpaaka site na iji kristal ntụaka iji belata mmejọ mmadụ.
Ngwa
1. Mmepụta Semiconductor
- Nhazi ịkpụ Wafer: Na-ekpebi nhazi wafer Si, SiC, GaN maka arụmọrụ ịkpụ kachasị mma.
- Nhazi ntụpọ: Na-achọpụta ihe ndị e ji akpụcha elu ma ọ bụ ihe ndị e mebiri emebi iji melite mmepụta chip.
2. Ihe eji achọ anya
- Kristal ndị na-abụghị nke ahịrị (dịka ọmụmaatụ, LBO, BBO) maka ngwaọrụ laser.
- Akara elu nke sapphire wafer maka ihe ndị e ji LED mee.
3. Seramiki na Ngwakọta
- Na-enyocha ntụzi ọka na Si3N4 na ZrO2 maka ojiji okpomọkụ dị elu.
4. Nnyocha na Njikwa Ogo
- Mahadum/ụlọ nyocha maka mmepe ihe ọhụrụ (dịka ọmụmaatụ, alloys entropy dị elu).
- QC ụlọ ọrụ mmepụta ihe iji hụ na nhazi ogbe ahụ dị.
Ọrụ XKH
XKH na-enye nkwado teknụzụ zuru oke maka ngwa nhazi wafer, gụnyere ntinye, nhazi paramita usoro, nyocha usoro rocking, na mapping ntụpọ elu 3D. A na-enye ngwọta ahaziri ahazi (dịka ọmụmaatụ, teknụzụ ingot stacking) iji melite arụmọrụ mmepụta semiconductor na ihe anya site na ihe karịrị 30%. Ndị otu raara onwe ha nye na-eduzi ọzụzụ n'ebe ahụ, ebe nkwado dịpụrụ adịpụ awa 24 n'ụbọchị asaa na mgbanwe ngwa ngwa nke akụkụ nchekwa na-eme ka akụrụngwa bụrụ ihe a pụrụ ịtụkwasị obi.
