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Sistemụ Ntuzi Wafer maka Ntụgharị kristal

Sistemụ Ntuzi Wafer maka Ntụnye Orientation Crystal Foto egosipụtara
  • Sistemụ Ntuzi Wafer maka Ntụgharị kristal
  • Sistemụ Ntuzi Wafer maka Ntụgharị kristal
  • Sistemụ Ntuzi Wafer maka Ntụgharị kristal
  • Sistemụ Ntuzi Wafer maka Ntụgharị kristal

Nkọwa dị mkpirikpi:

Ngwa mgbakwasa wafer bụ ngwaọrụ dị elu nke na-eji ụkpụrụ mgbasa X-ray na-ebuli nrụpụta semiconductor na usoro sayensị ihe site na ịchọpụta nhazi kristal. Ihe ndị bụ isi ya gụnyere isi iyi X-ray (dịka ọmụmaatụ, Cu-KA, 0.154 nm wavelength), goniometer ziri ezi (mkpebi angular ≤0.001°), na nchọpụta (CCD ma ọ bụ scintillation counters). Site n'ịtụgharị n'omume na nyochaa ụkpụrụ nhụsianya, ọ na-agbakọ indices crystallographic (dịka, 100, 111) na oghere lattice na ± 30 arcsecond ziri ezi. Sistemu ahụ na-akwado ọrụ akpaaka, ndozi oghere, na ntụgharị ọtụtụ axis, dakọtara na wafers 2-8-inch maka nha ngwa ngwa nke akụkụ wafer, ụgbọ elu ntụaka, na nhazi akwa epitaxial. Ngwa ndị dị mkpa gụnyere silicon carbide na-egbutu, sapphire wafers, na turbine agụba nkwado dị elu na-arụ ọrụ ọkụ, na-akwalite akụrụngwa eletriki mgbawa ozugbo na mkpụrụ.


Atụmatụ

Okwu mmalite

Ngwa nghazi Wafer bụ ngwaọrụ ziri ezi dabere na ụkpụrụ X-ray diffraction (XRD), nke a na-ejikarị eme ihe n'ichepụta semiconductor, ngwa anya, ceramik, na ụlọ ọrụ ihe ndị ọzọ kristal.

Ngwa ndị a na-ekpebi nghazi lattice kristal ma na-eduzi usoro ịkpụ ma ọ bụ nchacha nke ọma. Atụmatụ gụnyere:

  • Ọnụ ọgụgụ dị oke mma:Nwere ike idozi ụgbọ elu crystallographic na mkpebi angular ruo 0.001°​.
  • Dakọtara nnukwu sample:Na-akwado wafers ruo 450 mm na dayameta na ịdị arọ nke kilogram 30, dabara maka ihe ndị dị ka silicon carbide (SiC), sapphire, na silicon (Si).
  • Ihuenyo Modular:Arụmọrụ nwere ike ịgbasa gụnyere nyocha curve na-ama jijiji, nkewa ntụpọ elu 3D, na ngwaọrụ stacking maka nhazi ọtụtụ ihe nlele.

Isi Nka na ụzụ Parameters

Otu parameter

Ụdị ụkpụrụ/Nhazi

Isi mmalite X-ray

Cu-Kα (0.4 × 1 mm focal spot), 30kV accelerating voltaji, 0-5 mA mgbanwe tube ugbu a

Mpaghara Angular

θ: -10° ruo +50°; 2θ: -10° ruo +100°

Izi ezi

Mkpebi tilt angle: 0.001°, nchọpụta ntụpọ elu: ± 30 arcseconds (mgbagwoju anya)

Ọsọ nyocha

Omega scan emechala nghazi lattice zuru oke na sekọnd ise; Nyocha Theta na-ewe ~ 1 nkeji

Sample Stage

V-groove, mmịpụta pneumatic, ntụgharị akụkụ ọtụtụ, dakọtara na wafers 2–8-inch

Ọrụ enwere ike ịgbasa

Nlebanya nhịahụ, maapụ 3D, ngwaọrụ stacking, nchọpụta ntụpọ anya (nyocha, GBs)

Ụkpụrụ ọrụ

1. Ụlọ ọrụ X-ray Diffraction Foundation

  • X-ray na-emekọrịta ihe na nuclei atomic na eletrọn na lattice kristal, na-emepụta ụkpụrụ dị iche iche. Iwu Bragg (nλ = 2d sinθ​) na-achịkwa mmekọrịta dị n'etiti akụkụ dị iche iche (θ) na oghere lattice (d).
    Ndị na-achọpụta ihe na-ejide ụkpụrụ ndị a, bụ ndị a na-enyocha iji wughachi ihe owuwu crystallographic.

2. Teknụzụ nyocha Omega

  • Igwe kristal na-aga n'ihu na-atụgharị gburugburu axis a kapịrị ọnụ ka ụzarị X na-enye ya ìhè.
  • Ndị na-achọpụta ihe na-anakọta akara diffraction n'ofe ọtụtụ ụgbọ elu crystallographic, na-eme ka mkpebi ntụgharị uche zuru oke na 5 sekọnd.

3. Rocking Curve Analysis

  • Nkuku kristal edobere nwere akụkụ ihe omume X-ray dị iche iche iji tụọ obosara kacha elu (FWHM), na-enyocha ntụpọ lattice na nsogbu.

4. Njikwa akpaaka

  • PLC na ihuenyo mmetụ aka na-eme ka akụkụ ndị e debere ahazi, nzaghachi ozugbo, na ijikọ na igwe ịcha ihe maka njikwa aka-emechi.

Ngwa Wafer Orientation 7

Uru na atụmatụ

1. Nkenke na arụmọrụ

  • Izi ezi akụkụ ± 0.001°, mkpebi nchọpụta ntụpọ <30 sekọnd.
  • Ọsọ omega nyocha dị 200 × ọsọ ọsọ karịa nyocha Theta ọdịnala.

2. Modularity na Scalability

  • Enwere ike ịgbasawanye maka ngwa pụrụ iche (dịka ọmụmaatụ, SiC wafers, agụba turbine).
  • Na-ejikọta ya na sistemụ MES maka nleba anya mmepụta oge.

3. Ndakọrịta na nkwụsi ike

  • Na-anabata ihe nlere anya n'ụdị oge niile (dịka ọmụmaatụ, ingots sapphire gbawara agbawa).
  • Nhazi nke ikuku jụrụ oyi na-ebelata mkpa nlekọta.

4. Ọrụ ọgụgụ isi

  • Otu-pịa calibration na nhazi ọtụtụ ọrụ.
  • Ndozi onwe ya na kristal ntụaka iji wedata njehie mmadụ.

Ngwa nhazi Wafer 5-5

Ngwa

1. Semiconductor Manufacturing

  • Ntuzi aka wafer dicing: na-ekpebi Si, SiC, ntụzịaka wafer GaN maka ịrụ ọrụ kacha mma.
  • Nkewa adịghị mma: Na-achọpụta ọnyà dị n'elu ma ọ bụ mwepu iji kwalite mkpụrụ mgbawa.

2. Ngwa ngwa anya

  • Kristal na-adịghị adị (dịka, LBO, BBO) maka ngwaọrụ laser.
  • Ihe nrịbama n'elu sapphire wafer maka ihe ọkụ ọkụ.

3. Ceramics na Composites

  • Nyochaa ntụzịaka ọka na Si3N4 na ZrO2 maka ngwa okpomọkụ dị elu.

4. Nyocha na njikwa mma

  • Ụlọ akwụkwọ mahadum/ụlọ nyocha maka mmepe ihe ọhụrụ (dịka ọmụmaatụ, alloys entropy dị elu).
  • Industrial QC iji hụ na ogbe agbanwe agbanwe.

Ọrụ XKH

XKH na-enye nkwado teknụzụ ndụ okirikiri zuru oke maka ngwa nghazi wafer, gụnyere nrụnye, njikarịcha oke usoro, nyocha usoro mkpagharị na maapụ ntụpọ elu 3D. A na-enye azịza ahaziri ahazi (dịka, teknụzụ ingot stacking technology) iji kwalite arụmọrụ semiconductor na ngwa anya ihe karịrị 30%. Ndị otu raara onwe ha nye na-eduzi ọzụzụ na saịtị, ebe 24/7 nkwado dịpụrụ adịpụ na ngwa ngwa ngbanwe akụkụ mapụtara na-ahụ na a pụrụ ịdabere na akụrụngwa.

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