Usoro ọkụ kristal ogologo nke na-eguzogide silikọn carbide na-eto eto 6/8/12inch inch SiC ingot kristal PVT

Igwe ọkụ kristal ogologo nke na-eguzogide ígwè silikọn carbide na-eto eto 6/8/12inch inch SiC ingot kristal PVT Usoro egosipụtara Foto a na-egosi

Nkọwa Dị Mkpirikpi:

Ọkụ ibu nke silicon carbide (usoro PVT, usoro mbufe vapor anụ ahụ) bụ ihe dị mkpa maka uto nke kristal silicon carbide (SiC) otu kristal site na ụkpụrụ sublimation-recrystallization okpomọkụ dị elu. Teknụzụ a na-eji ikpo ọkụ iguzogide (ahụ ọkụ graphite) iji tinye ihe ndị e ji SiC mee n'ime mmiri na okpomọkụ dị elu nke 2000 ~ 2500℃, wee gbanwee ya na mpaghara okpomọkụ dị ala (kristal mkpụrụ) iji mepụta kristal SiC dị elu (4H/6H-SiC). Usoro PVT bụ usoro bụ isi maka mmepụta oke nke ihe ndị e ji SiC mee nke dị sentimita 6 na n'okpuru, nke a na-ejikarị eme ihe na nkwadebe ihe ndị na-emepụta ike (dịka MOSFETs, SBD) na ngwaọrụ redio ugboro ugboro (GaN-on-SiC).

Zitere anyị ozi-e

atụmatụ

Ụkpụrụ ọrụ:

1. Ibu ihe eji arụ ọrụ: ntụ ntụ SiC dị ọcha (ma ọ bụ ngọngọ) nke dị n'ala nke griitị graphite (mpaghara okpomọkụ dị elu).

2. Gburugburu ikuku/ọkụ: kpoo oghere ọkụ (<10⁻³ mbar) ma ọ bụ gafere gas ikuku (Ar).

3. Ntinye okpomọkụ dị elu: ikpo ọkụ na-eguzogide ruo 2000 ~ 2500℃, mmebi SiC n'ime Si, Si₂C, SiC₂ na akụkụ gas ndị ọzọ.

4. Nnyefe nke usoro gas: mgbanwe okpomọkụ na-akpali mgbasa nke ihe usoro gas gaa na mpaghara okpomọkụ dị ala (njedebe mkpụrụ).

5. Mmụba kristal: Usoro gas ahụ na-agbanwegharị n'elu kristal mkpụrụ osisi ahụ ma na-eto n'akụkụ ụzọ n'akụkụ C-axis ma ọ bụ A-axis.

Isi paramita:

1. Oke okpomọkụ: 20~50℃/cm (ọkwa uto na njupụta ntụpọ).

2. Nrụgide: 1~100mbar (nrụgide dị ala iji belata ihe ndị na-adịghị ọcha).

3. Ọkwa uto: 0.1~1mm/h (na-emetụta ịdị mma kristal na arụmọrụ mmepụta).

Isi atụmatụ:

(1) Ogo kristal
Njupụta ntụpọ dị ala: njupụta microtubule <1 cm⁻², njupụta dislocation 10³~10⁴ cm⁻² (site na nhazi mkpụrụ na njikwa usoro).

Njikwa ụdị Polycrystalline: nwere ike itolite 4H-SiC (isi iyi), 6H-SiC, 4H-SiC nkezi >90% (mkpa iji chịkwaa oke okpomọkụ na oke stoichiometric nke gas nke ọma).

(2) Arụmọrụ akụrụngwa
Okpomọkụ dị elu: graphite na-ekpo ọkụ okpomọkụ ahụ> 2500℃, ahụ ọkụ na-anabata imewe mkpuchi ọtụtụ oyi akwa (dịka graphite felt + jaket mmiri oyi).

Njikwa otu: Mgbanwe okpomọkụ axial/radial nke ±5 ° C na-eme ka dayameta kristal dị n'otu (nhazi ọkpụrụkpụ substrate nke inch 6 <5%).

Ọkwa nke akpaaka: Sistemụ njikwa PLC agbakwunyere, nlekota oge okpomọkụ, nrụgide na ọnụego uto.

(3) Uru teknụzụ
Ojiji dị elu nke ihe onwunwe: ọnụego mgbanwe ihe onwunwe > 70% (ka mma karịa usoro CVD).

Ndakọrịta nha buru ibu: Emeela mmepụta oke nke sentimita isii, sentimita asatọ nọ n'ọkwa mmepe.

(4) Oriri ike na ọnụ ahịa
Oriri ike nke otu ọkụ bụ 300 ~ 800kW·h, nke na-aza 40% ~ 60% nke ọnụ ahịa mmepụta nke ihe SiC substrate.

Ntinye ego akụrụngwa dị elu (1.5M 3M kwa nkeji), mana ọnụ ahịa ihe eji eme ihe dị ala karịa usoro CVD.

Ngwa ndị bụ isi:

1. Igwe eletriki ike: SiC MOSFET substrate maka inverter ụgbọ ala eletrik na inverter fotovoltaic.

2. Ngwaọrụ Rf: ọdụ ntọala 5G GaN-on-SiC epitaxial substrate (karịsịa 4H-SiC).

3. Ngwaọrụ gburugburu ebe obibi dị oke njọ: ihe mmetụta okpomọkụ dị elu na nrụgide dị elu maka ngwa ike ikuku na nuklia.

Teknụzụ paramita:

Nkọwapụta	Nkọwa
Nha (L × W × H)	2500 × 2400 × 3456 mm ma ọ bụ hazie ya
Dayameta Crucible	900 mm
Nrụgide Ume Kasị Elu	6 × 10⁻⁴ Pa (mgbe awa 1.5 nke ikuku batara)
Ọnụego ntapu mmiri	≤5 Pa/awa 12 (a na-eme achịcha n'èzí)
Dayameta nke Ogwe Ntugharị	50 mm
Ọsọ ntụgharị	0.5–5 rpm
Usoro Ịkpo Ọkụ	Kpoo ọkụ eletriki na-eguzogide ọkụ
Okpomọkụ Kachasị Elu	2500°C
Ike Ịkpo Ọkụ	40 kW × 2 × 20 kW
Ntụle Okpomọkụ	Pyrometer infrared agba abụọ
Oke okpomọkụ	900–3000°C
Izi ezi nke Okpomọkụ	±1°C
Oke Nrụgide	1–700 mbar
Izi ezi nke njikwa nrụgide	1–10 mbar: ±0.5% FS; 10–100 mbar: ±0.5% FS; 100–700 mbar: ±0.5% FS
Ụdị Ọrụ	Ibu ibu ala, nhọrọ nchekwa aka/akpaka
Atụmatụ Nhọrọ	Nha okpomọkụ abụọ, ọtụtụ mpaghara ọkụ

Ọrụ XKH:

XKH na-enye ọrụ usoro niile nke ọkụ SiC PVT, gụnyere nhazi akụrụngwa (nhazi ubi okpomọkụ, njikwa akpaka), mmepe usoro (njikwa ọdịdị kristal, njikarịcha ntụpọ), ọzụzụ teknụzụ (ọrụ na mmezi) na nkwado mgbe erechara ahịa (ndochi akụkụ graphite, nhazi ubi okpomọkụ) iji nyere ndị ahịa aka inweta mmepụta kristal sic dị elu. Anyị na-enyekwa ọrụ nkwalite usoro iji melite mmepụta kristal na arụmọrụ uto mgbe niile, yana oge ndu nke ọnwa 3-6.