Efere seramiiki/traị SiC maka ihe njide wafer nke 4inch nke 6inch maka ICP

Efere seramiiki/traị SiC maka ihe njide wafer nke dị sentimita 4 nke dị sentimita 6 nke ICP Foto a na-egosipụta

Nkọwa Dị Mkpirikpi:

Efere seramiiki SiC bụ ihe eji arụ ọrụ nke ọma nke e ji Silicon Carbide dị ọcha mepụta, nke e mere maka ojiji ya n'ebe okpomọkụ, kemịkalụ, na igwe dị oke njọ. A maara ya maka ike ya pụrụ iche, ike okpomọkụ, na iguzogide nchara, a na-ejikarị efere SiC eme ihe dị ka ihe na-ebu wafer, ihe na-egbochi ya, ma ọ bụ ihe owuwu na ụlọ ọrụ semiconductor, LED, photovoltaic, na aerospace.

Zitere anyị ozi-e

atụmatụ

Mpekere seramiiki SiC

Site na nkwụsi ike dị egwu nke okpomọkụ ruo 1600°C na iguzogide gas na gburugburu plasma dị mma, efere SiC na-eme ka arụmọrụ na-aga n'ihu n'oge usoro ịchacha, itinye ihe, na mgbasa nke okpomọkụ dị elu. Akụkụ obere ya dị oke njọ, nke na-anaghị amị amị na-ebelata mmepụta ihe ndị na-adịghị mkpa, na-eme ka ọ dị mma maka ojiji dị ọcha nke ukwuu na ntọala ikuku ma ọ bụ ụlọ nhicha.

Ngwa efere seramiiki SiC

1. Mmepụta Semiconductor

A na-ejikarị efere seramiiki SiC eme ihe dị ka ihe na-ebu wafer, ihe na-egbochi ihe, na efere pedestal na ngwa mmepụta semiconductor dịka CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), na sistemụ etching. Ọdịdị okpomọkụ ha dị mma na obere mmụba okpomọkụ na-enye ha ohere ịnọgide na-enwe nkesa okpomọkụ otu, nke dị oke mkpa maka nhazi wafer dị oke mma. Mgbochi SiC megide gas na plasma na-emebi emebi na-eme ka ọ sie ike na gburugburu ebe siri ike, na-enyere aka belata mmetọ ihe na mmezi akụrụngwa.

2. Ụlọ ọrụ LED - Ịkpụcha ihe na ICP

N'ime ngalaba mmepụta LED, efere SiC bụ ihe dị mkpa na sistemụ etching ICP (Inductively Coupled Plasma). Dịka ndị na-ejide wafer, ha na-enye ikpo okwu kwụsiri ike ma sie ike nke ukwuu iji kwado wafer sapphire ma ọ bụ GaN n'oge nhazi plasma. Nguzogide plasma ha dị mma, ịdị larịị n'elu, na nkwụsi ike nha na-enyere aka hụ na e ji ezigbo nhazi na nha nhata mee ihe, na-eduga n'ịbawanye mmepụta na arụmọrụ ngwaọrụ na chips LED.

3. Ike anyanwụ (PV) na ike anyanwụ

A na-ejikwa efere seramiiki SiC eme ihe n'ịmepụta mkpụrụ ndụ anyanwụ, ọkachasị n'oge a na-eme ka sinterị na annealing dị elu. Enweghị ike ha n'oge okpomọkụ dị elu na ikike iguzogide mgbagharị na-eme ka a na-ahazi wafer silicon mgbe niile. Na mgbakwunye, obere ihe egwu mmetọ ha dị oke mkpa maka ịnọgide na-arụ ọrụ nke mkpụrụ ndụ fotovoltaic.

Njirimara efere seramiiki SiC

1. Ike na Ike Mechanical Pụrụ Iche

Efere seramiiki SiC na-egosipụta ike igwe dị elu, yana ike flexural nkịtị karịrị 400 MPa na ike Vickers ruru ihe karịrị 2000 HV. Nke a na-eme ka ha sie ike nke ukwuu megide iyi igwe, nchacha, na mgbanwe, na-eme ka ha nwee ike ịrụ ọrụ ogologo oge ọbụlagodi n'okpuru ibu dị elu ma ọ bụ usoro okpomọkụ ugboro ugboro.

2. Oke Ọkụ Na-eme Ka Ọ Dọpụta

SiC nwere ezigbo ike okpomọkụ (nke na-abụkarị 120–200 W/m·K), na-enye ya ohere ikesa okpomọkụ n'elu ya n'otu aka ahụ. Ihe onwunwe a dị oke mkpa n'usoro dịka ịcha akwa wafer, itinye ihe n'ime ya, ma ọ bụ sintering, ebe nha nha okpomọkụ na-emetụta mmepụta na ịdị mma nke ngwaahịa ozugbo.

3. Ike zuru oke nke okpomọkụ

Site na ebe agbaze dị elu (2700°C) na obere ọnụọgụ nke mgbasawanye okpomọkụ (4.0 × 10⁻⁶/K), efere seramiiki SiC na-ejigide izi ezi na iguzosi ike n'ezi ihe nhazi n'okpuru usoro ọkụ na oyi ngwa ngwa. Nke a na-eme ka ha dị mma maka itinye n'ọrụ na ọkụ dị elu, ụlọ ikuku, na gburugburu plasma.

Njirimara Teknụzụ
Ndepụta Ndekọ	Ngalaba	Uru
Aha Ihe		Mmeghachi omume Sintered Silicon Carbide	Carbide Silicon Sintered Enweghị Nrụgide	Silicon Carbide emegharịrị emegharị
Ihe mejupụtara ya		RBSiC	SSiC	R-SiC
Njupụta buru ibu	g/cm3	3	3.15 ± 0.03	2.60-2.70
Ike nke Flexural	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100(1400°C)
Ike Mkpakọ	MPa (kpsi)	1120(158)	3970(560)	> 600
Ike siri ike	Knoop	2700	2800	/
Ike Na-agbawa Obi	MPa m1/2	4.5	4	/
Ọgbakọ okpomọkụ	W/mk	95	120	23
Ọnụọgụ nke Mgbasawanye Okpomọkụ	10^-6.1/°C	5	4	4.7
Okpomọkụ Pụrụ Iche	Joule/g 0k	0.8	0.67	/
Okpomọkụ kachasị elu n'ikuku	℃	1200	1500	1600
Modulu Elastic	GPA	360	410	240

Ajụjụ na Azịza nke efere seramiiki SiC

Q: Kedu ihe ndị dị na efere silicon carbide?

A: A maara efere silicon carbide (SiC) maka ike dị elu ha, ike ha siri ike, na nkwụsi ike okpomọkụ ha. Ha na-enye ezigbo ike okpomọkụ na obere mgbasawanye okpomọkụ, na-eme ka arụmọrụ a pụrụ ịdabere na ya n'okpuru oke okpomọkụ. SiC bụkwa ihe na-adịghị arụ ọrụ nke ọma, na-eguzogide asịd, alkalis, na gburugburu plasma, na-eme ka ọ dị mma maka nhazi semiconductor na LED. Elu ya dị oke ma dị nro na-ebelata mmepụta ihe dị iche iche, na-eme ka ụlọ dị ọcha dakọtara. A na-eji efere SiC eme ihe nke ukwuu dị ka ihe na-ebu wafer, ihe na-egbochi ya, na ihe nkwado na gburugburu okpomọkụ dị elu na corrosive n'ofe ụlọ ọrụ semiconductor, photovoltaic, na aerospace.