156mm 159mm 6 inch Sapphire Wafer maka ụgbọelu C-Plane DSP TTV

156mm 159mm 6 inch Sapphire Wafer maka onye na-ebu C-Plane DSP TTV Foto egosipụtara

Nkọwa dị mkpirikpi:

Dayameta 156mm / 159mm, 6 ″ Al2O3 sapphire nwere akụkụ abụọ na-egbu maramara (DSP) nwere TTV na-erughị 3 microns maka bọọdụ ụgbọ mmiri.Mgbakwunye 8″/6″/5″/2″/3″/4″/5″ C-axis, A-axis, R-axis, M-axis wafers.Sapphire C-plane wafers ruo 6 inch (6 ″/6 inch) na dayameta, na-enwe ma otu akụkụ polished (SSP) ma ọ bụ akụkụ abụọ polished (DSP), na ọkpụrụkpụ nke 650 microns ma ọ bụ 1000 microns.

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Nkọwa ngwaahịa

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Nkọwapụta

Ihe	6-anụ ọhịa C-ụgbọ elu (0001) Sapphire Wafers
Ihe ndị kristal	99,999%, ịdị ọcha dị elu, Monocrystalline Al2O3
Ọkwa	Prime, Epi-Njikere
Ntuzi ihu ihu	Ụgbọ elu C (0001)
	C-ụgbọ elu kwụsịrị-akuku chere ihu M-axis 0.2 +/- 0.1°
Dayameta	100.0 mm +/- 0.1 mm
Ọkpụrụkpụ	650 μm +/- 25 μm
Nhazi Flat nke izizi	C-ụgbọ elu (00-01) +/- 0.2°
Otu akụkụ ehichapụ	Ihu ihu	Epi-egbu maramara, Ra <0.2 nm (nke AFM)
(SSP)	Azụ elu	Ala mara mma, Ra = 0.8 μm ruo 1.2 μm
Agbachapụrụ akụkụ abụọ	Ihu ihu	Epi-egbu maramara, Ra <0.2 nm (nke AFM)
(DSP)	Azụ elu	Epi-egbu maramara, Ra <0.2 nm (nke AFM)
TTV	<20 μm
ỤTA	<20 μm
WARP	<20 μm
Nchacha / nkwakọ ngwaahịa	Klas 100 nhicha ụlọ dị ọcha na nkwakọ ngwaahịa,
	Iberibe 25 n'otu ngwugwu cassette ma ọ bụ otu ngwugwu.

Ọtụtụ ụlọ ọrụ dị na China na-eji usoro Kylopoulos (usoro KY) ugbu a iji mepụta kristal sapphire maka ojiji na ụlọ ọrụ elektrọnik na optics.

N'ime usoro a, aluminom oxide dị ọcha na-agbaze na crucible na okpomọkụ karịa 2100 degrees Celsius.Ọtụtụ mgbe, a na-eme crucible nke tungsten ma ọ bụ molybdenum.A na-emikpu mkpụrụ kristal gbakwasara ahụ nke ọma n'ime alumina a wụrụ awụ.A na-eji nwayọọ nwayọọ na-ebuli kristal mkpụrụ ahụ elu ma nwee ike ịtụgharị ya n'otu oge.Site n'ịchịkwa nke ọma gradient okpomọkụ, ọnụ ọgụgụ ịdọrọ na ọnụego jụrụ oyi, nnukwu, otu-kristal, ihe fọrọ nke nta ka ọ bụrụ cylindrical ingot nwere ike ịmepụta site na agbaze.

Mgbe otu ingots sapphire kristal tolitechara, a na-agbaba ha n'ime mkpanaka cylindrical, bụ́ ndị a na-egbutuzi ya ruo n'obosara windo a chọrọ ma mesịa na-egbuke egbuke ruo n'elu ebe a chọrọ.