Sapphire Crystal Growth Furnace KY Kyropoulos Usoro maka Sapphire Wafer na Optical Windo Production
Ụkpụrụ Ọrụ
Isi ihe dị na usoro KY gụnyere ịgbaze ihe ndị dị ọcha nke Al₂O₃ dị elu n'ime tungsten/molybdenum crucible na 2050°C. A na-ebelata kristal mkpụrụ n'ime mmiri gbazee, wee wepụ ya n'okpuru njikwa (0.5–10 mm/h) na ntụgharị (0.5–20 rpm) iji nweta uto ntụzịaka nke kristal otu α-Al₂O₃. Isi ihe ndị dị na ya gụnyere:
• Kristal buru ibu (kachasị Φ400 mm × 500 mm)
• Sapphire nke nwere obere nrụgide (mgbanwe ihu ebili mmiri <λ/8 @ 633 nm)
• Kristal e tinyere doped (dịka ọmụmaatụ, Ti³⁰ doping maka sapphire kpakpando)
Akụkụ Sistemụ Isi
1. Sistemụ Ịgbaze Okpomọkụ Dị Elu
• Mkpụrụ Tungsten-molybdenum mejupụtara (oke okpomọkụ kachasị: 2300°C)
• Igwe ọkụ graphite nke nwere ọtụtụ mpaghara (±0.5°C njikwa okpomọkụ)
2. Sistemụ uto kristal
• Usoro ndọda nke servo na-arụ (± 0.01 mm nkenke)
• Akara ntụgharị mmiri magnetik (nhazi ọsọ na-enweghị nzọụkwụ 0-30 rpm)
3. Njikwa Ọkụ
• Njikwa okpomọkụ nke mpaghara ise (1800–2200°C)
• Ihe mkpuchi okpomọkụ a na-agbanwe agbanwe (±2°C/cm gradient)
• Sistemụ Vacuum na Ikuku
• Pa 10⁻⁴ Vacuum dị elu
• Njikwa gas agwakọtara Ar/N₂/H₂
4. Nlekota anya nke ọma
• Nlekota dayameta kristal CCD n'oge dị adị
• Nchọpụta ọkwa agbaze nke ọtụtụ spectrum
Ntụnyere Usoro KY na CZ
| Paramita | Usoro KY | Usoro CZ |
| Nha kristal kachasị elu | Φ400 mm | Φ200 mm |
| Ọnụego uto | 5–15 mm/h | 20–50 mm/h |
| Njupụta ntụpọ | <100/cm² | 500–1000/cm² |
| Oriri Ike | 80–120 kWh/kg | 50–80 kWh/kg |
| Ngwa Ndị A Na-ahụkarị | Windo anya/nnukwu wafers | Ihe ndị e ji edobe ihe/ọla LED mee |
Ngwa Ndị Dị Mkpa
1. Windo elektrọniki
• Domes IR nke ndị agha (nnyefe >85%@3–5 μm)
• Windo laser UV (na-eguzogide njupụta ike 200 W/cm²)
2. Ihe ndị dị na semiconductor
• Wafers epitaxial GaN (2–8 inch, TTV <10 μm)
• Ihe ndị dị n'elu ala (ihe na-adịghị mma karịa 0.2 nm)
3. Eletrọniki Ndị Ahịa
• Iko mkpuchi igwefoto ekwentị (Ike siri ike nke Mohs 9)
• Ngosipụta elekere smart (mmezi mgbochi ọkọ 10×)
4. Ihe Ndị Pụrụ Iche
• Ngwa anya IR dị ọcha nke ukwuu (ihe na-amịkọrọ ihe <10⁻³ cm⁻¹)
• Windo nlele ihe gbasara ihe na-eme ka ihe dị n'ime nuklia (nkwenye nke radieshon: 10¹⁶ n/cm²)
Uru nke Ngwa Kyropoulos (KY) Sapphire Crystal Growth
Ngwa ọrụ Kyropoulos (KY) nke e ji usoro Kyropoulos (KY) mee na-enye uru teknụzụ na-enweghị atụ, na-etinye ya dị ka ihe ngwọta kachasị ọhụrụ maka mmepụta ụlọ ọrụ mmepụta ihe. Uru ndị dị mkpa gụnyere:
1. Ike Nnukwu Dayameta: Nwere ike itolite kristal sapphire ruo sentimita iri na abụọ (300 mm) na dayameta, na-eme ka mmepụta wafers na ihe anya dị elu maka ngwa dị elu dịka GaN epitaxy na windo ndị agha.
2. Oke Njupụta Nrụhie Dị Ala: Na-enweta njupụta ndọpụ <100/cm² site na nhazi ubi okpomọkụ kachasị mma na njikwa nhazi okpomọkụ ziri ezi, na-ahụ na ejiri kristal dị elu mee ihe maka ngwaọrụ optoelectronic.
3. Arụmọrụ Anya Dị Elu: Na-enye nnyefe ihe karịrị 85% n'ofe a na-ahụ anya na spectra infrared (400–5500 nm), nke dị oke mkpa maka windo laser UV na infrared optics.
4. Mmepụta akpaaka dị elu: Nwere usoro ndọda servo na-eduzi (± 0.01 mm nkenke) na akara ntụgharị mmiri magnetik (njikwa enweghị stepless 0-30 rpm), na-ebelata ntinye aka mmadụ ma na-eme ka nguzozi dịkwuo mma.
5. Nhọrọ Doping Na-agbanwe agbanwe: Na-akwado nhazi ya na dopants dịka Cr³⁰ (maka ruby) na Ti³⁰ (maka sapphire kpakpando), na-enye ahịa pụrụ iche na optoelectronics na ọla.
6. Ike arụmọrụ: Mkpuchi okpomọkụ kachasị mma (tungsten-molybdenum crucible) na-ebelata oriri ike ruo 80–120 kWh/kg, na-asọmpi na ụzọ uto ọzọ.
7. Mmepụta a na-agbanwe agbanwe: Na-arụpụta ihe karịrị wafers 5,000 kwa ọnwa site na oge okirikiri ngwa ngwa (ụbọchị 8-10 maka kristal 30-40 kg), nke ihe karịrị nrụnye ụwa 200 kwadoro.
nke
8. Ogologo Ike nke Ọkwa Ndị Agha: Ọ na-agụnye atụmatụ ndị na-eguzogide radieshon na ihe ndị na-eguzogide okpomọkụ (na-eguzogide 10¹⁶ n/cm²), nke dị mkpa maka ngwa ụgbọelu na nuklia.
Ihe ọhụrụ ndị a na-eme ka usoro KY sie ike dị ka ọkọlọtọ ọla edo maka imepụta kristal sapphire dị elu, na-akwalite ọganihu na nkwukọrịta 5G, kọmputa quantum, na teknụzụ nchekwa.
Ọrụ XKH
XKH na-enye ngwọta zuru oke maka sistemụ uto kristal sapphire, gụnyere ntinye, nhazi usoro, na ọzụzụ ndị ọrụ iji hụ na njikọta ọrụ na-enweghị nsogbu. Anyị na-enye usoro uto akwadoro (50+) nke ahaziri maka mkpa ụlọ ọrụ dị iche iche, na-ebelata oge nyocha na nhazi nke ukwuu maka ndị ahịa. Maka ngwa pụrụ iche, ọrụ mmepe omenala na-eme ka nhazi oghere dị (Φ200–400 mm) na sistemụ doping dị elu (Cr/Ti/Ni), na-akwado akụkụ anya dị elu na ihe ndị na-eguzogide radieshon.
Ọrụ ndị bara uru gụnyere nhazi mgbe uto gasịrị dịka ịkpụcha, ịchacha, na ịchacha ihe, nke ejiri ọtụtụ ngwaahịa sapphire dị ka wafers, tubes, na oghere nkume dị oké ọnụ ahịa mee. Ihe ndị a na-enye ọrụ na ngalaba dị iche iche site na ngwa eletrọnịkị ndị ahịa ruo na mbara igwe. Nkwado teknụzụ anyị na-ekwe nkwa nkwa ọnwa 24 na nchọpụta ihe dị anya n'oge, na-ahụ na obere oge ọrụ na arụmọrụ mmepụta na-aga n'ihu.









