Sapphire Crystal Growth Furnace KY Kyropoulos Ụzọ maka Sapphire Wafer na Mmepụta Window anya.
Ụkpụrụ ọrụ
Ụkpụrụ bụ isi nke usoro KY gụnyere ịgbaze ngwa ngwa Al₂O₃ dị ọcha na tungsten/molybdenum crucible na 2050 Celsius. A na-eweda kristal mkpụrụ n'ime gbazee, na-esote mwepu a na-achịkwa (0.5-10 mm / h) na ntụgharị (0.5-20 rpm) iji nweta uto ntụzịaka nke otu kristal α-Al₂O₃. Atụmatụ gụnyere:
kristal buru ibu (max. Φ400 mm × 500 mm)
• Sapphire ọtụ anya-mmetụta dị ala (mgbagwoju anya n'ihu ebili mmiri <λ/8 @ 633 nm)
kristal doped (dịka ọmụmaatụ, Ti³⁰ doping maka sapphire kpakpando)
Ngwa Sistemụ Isi
1. Sistemụ mgbaze dị elu
• Tungsten-molybdenum composite crucible (max. temp. 2300°C)
• Igwe ọkụ graphite ọtụtụ mpaghara (± 0.5°C njikwa okpomọkụ)
2. Crystal Growth System
• Usoro ịdọrọ nke Servo (nkenke ± 0.01 mm)
• Akara mmiri magnetik rotary akara (0-30 rpm stepless ụkpụrụ ụkpụrụ)
3. Thermal Field Control
• 5-mpaghara njikwa okpomọkụ nke onwe (1800-2200°C)
• Ọta ọkụ na-agbanwe agbanwe (± 2°C/cm gradient)
• Sistemu ikuku & ikuku
• 10⁻ Pa elu oghere
• Ar/N₂/H₂ njikwa gas agwakọta
4. Nleba anya nke ọgụgụ isi
• CCD ezigbo oge nlebanya dayameta kristal
• Multi-spectral gbazee larịị nchọpụta
Ntụle usoro KY vs. CZ
| Parameter | Usoro KY | Usoro CZ |
| Oke. Nha kristal | Φ400 mm | Φ200 mm |
| Ọnụego uto | 5-15 mm / h | 20-50 mm / h |
| Njupụta | <100/cm² | 500-1000/cm² |
| Oriri ike | 80-120 kWh / n'arọ | 50-80 kWh / n'arọ |
| Ngwa a na-ahụkarị | Window ngwa anya/ nnukwu wafer | Ihe eji eme LED / ihe ịchọ mma |
Ngwa igodo
1. Optoelectronic Windows
• Ndị agha IR domes (nfefe> 85% @ 3-5 μm)
• Window laser UV (nagide njupụta ike 200 W/cm²)
2. Semiconductor Substrates
• GaN epitaxial wafers (2-8 inch, TTV <10 μm)
• Ihe ndị na-emepụta SOI (mkpụrụ ike elu <0.2 nm)
3. Eletrọnịkị ndị ahịa
• Igwefoto mkpuchi mkpuchi igwefoto Smartphone (Mohs hardness 9)
• Ngosipụta smartwatch (mmalite nkwụsi ike 10 ×)
4. Ngwa ndị pụrụ iche
• Igwe optic IR dị ọcha dị elu (ọnụọgụ absorption <10⁻³ cm⁻¹)
• Window nleba anya reactor nuklea (nnweta radieshon: 10¹⁶ n/cm²)
Uru nke Kyropoulos (KY) Sapphire Crystal Growth Equipment
Usoro Kyropoulos (KY) nke sapphire kristal na-eto eto na-enye uru ọrụ aka na-enweghị atụ, na-edobe ya dị ka ihe ngwọta dị mma maka mmepụta ihe mmepụta ihe. Isi uru gụnyere:
1. Nnukwu dayameta ike: Ike nke na-eto kristal sapphire ruo sentimita 12 (300 mm) na dayameta, na-eme ka mmepụta ihe dị elu nke wafers na ngwa anya maka ngwa dị elu dị ka GaN epitaxy na windo ọkwa agha.
2. Ultra-Low Density Density: Na-enweta njupụta dislocation <100/cm² site n'ichepụta ebe okpomọkụ kachasị mma yana njikwa gradient okpomọkụ, na-eme ka iguzosi ike n'ezi ihe kristal dị elu maka ngwaọrụ optoelectronic.
3. Arụmọrụ ngwa anya dị elu: Na-ebufe nnyefe> 85% gafee anya na spectra infrared (400-5500 nm), dị oke egwu maka windo laser UV na ngwa anya infrared.
4. Advanced Automation: Atụmatụ servo-chụpụrụ usoro ịdọrọ (± 0.01 mm nkenke) na magnetik fluid rotary seal (0-30 rpm stepless control), na-ebelata ntinye aka mmadụ na ịkwalite nkwụsi ike.
5. Nhọrọ Doping na-agbanwe agbanwe: Na-akwado nhazi ya na dopants dị ka Cr³⁰ (maka ruby) na Ti³⁰ (maka sapphire kpakpando), na-eri nri na niche ahịa na optoelectronics na ọla.
6. Ịrụ Ọrụ Ike: Ihe mkpuchi ọkụ kachasị mma (tungsten-molybdenum crucible) na-ebelata oriri ike ruo 80-120 kWh / kg, asọmpi na ụzọ uto ọzọ.
7. Scalable Production : Na-enweta mmepụta kwa ọnwa nke 5,000+ wafers na oge okirikiri ngwa ngwa (ụbọchị 8-10 maka kristal 30-40 n'arọ), kwadoro site na nrụnye zuru ụwa ọnụ 200.
nke
8. Ogologo ọkwa ọkwa ndị agha: Na-agbakwunye atụmatụ na-eguzogide radieshon na ihe ndị na-eguzogide okpomọkụ (na-eguzogide 10¹⁶ n/cm²), dị mkpa maka ikuku ikuku na ngwa nuklia.
Ihe ọhụrụ ndị a na-eme ka usoro KY sie ike dị ka ọkọlọtọ ọla edo maka imepụta kristal sapphire dị elu, ọganihu na-anya na nkwukọrịta 5G, mgbakọ quantum, na teknụzụ nchekwa.
Ọrụ XKH
XKH na-enye azịza ntụgharị zuru oke maka sistemu kristal sapphire, gụnyere ntinye, njikarịcha usoro, yana ọzụzụ ndị ọrụ iji hụ na njikọta arụ ọrụ enweghị nkebi. Anyị na-ebuga usoro ntụzịaka uto akwadoro (50+) ahaziri maka mkpa ụlọ ọrụ dị iche iche, na-ebelata oge R&D nke ukwuu maka ndị ahịa. Maka ngwa pụrụ iche, ọrụ mmepe omenala na-enyere aka ịhazi oghere (Φ200-400 mm) na sistemu doping dị elu (Cr/Ti/Ni), na-akwado akụrụngwa ngwa anya dị elu yana ihe na-eguzogide radieshon.
Ọrụ agbakwunyere bara uru gụnyere nhazi n'ihu ọha dị ka slicing, egweri, na polishing, akwadoro site n'ọtụtụ ngwaahịa sapphire dị ka wafers, tubes, na gemstone oghere. Onyinye ndị a na-enye aka na mpaghara site na ngwa eletrọnịkị ndị ahịa ruo na mbara ikuku. Nkwado nka na ụzụ anyị na-ekwe nkwa akwụkwọ ikike nke ọnwa 24 yana nyocha nyocha nke oge dịpụrụ adịpụ, na-ahụta obere oge ọdịda yana nrụpụta mmepụta ihe.
