Ihe ndị na-esote: Semiconductor Substrates: Sapphire, Silicon, na Silicon Carbide

N'ime ụlọ ọrụ semiconductor, ihe ndị e ji emepụta ihe bụ ihe ndị bụ isi nke arụmọrụ ngwaọrụ dabere na ha. Njirimara anụ ahụ, okpomọkụ, na eletriki ha na-emetụta kpọmkwem arụmọrụ, ntụkwasị obi, na oke ngwa. N'ime nhọrọ niile, sapphire (Al₂O₃), silicon (Si), na silicon carbide (SiC) abụrụla ihe ndị e ji emepụta ihe ndị a na-ejikarị eme ihe, nke ọ bụla na-eme nke ọma na mpaghara teknụzụ dị iche iche. Isiokwu a na-enyocha njirimara ihe ha, ọdịdị ala ngwa, na usoro mmepe n'ọdịnihu.

Safaịra: Ịnyịnya Ọrụ Anya

Sapphire bụ otu kristal nke aluminom oxide nwere lattice hexagonal. Ihe ndị bụ isi ya gụnyere ike pụrụ iche (ike Mohs 9), nghọta anya sara mbara site na ultraviolet ruo na infrared, na ike kemịkalụ siri ike, na-eme ka ọ dị mma maka ngwaọrụ optoelectronic na gburugburu ebe siri ike. Usoro uto dị elu dịka Usoro Mgbanwe Okpomọkụ na usoro Kyropoulos, yana polishing kemịkalụ-mekanik (CMP), na-emepụta wafers nwere oke elu sub-nanometer.

A na-ejikarị ihe ndị e ji sapphire mee eme ihe n'ọtụtụ ebe na LED na Micro-LED dị ka oyi akwa epitaxial nke GaN, ebe ihe ndị e ji sapphire mee (PSS) na-eme ka arụmọrụ mwepụta ìhè ka mma. A na-ejikwa ha na ngwaọrụ RF ugboro ugboro n'ihi ihe mkpuchi eletriki ha, nakwa na ngwa eletrọniki ndị ahịa na ngwa ụgbọelu dị ka windo na ihe mkpuchi ihe mmetụta. Mmachi gụnyere obere conductivity okpomọkụ (35–42 W/m·K) na enweghị njikọ lattice na GaN, nke chọrọ akwa nchekwa iji belata ntụpọ.

Silicon: Ntọala Microelectronics

Silicon ka bụ isi ihe dị mkpa n'ihe gbasara eletrọniki ọdịnala n'ihi usoro mmepụta ihe ya toro eto, ike eletrik a na-agbanwe agbanwe site na doping, na ihe ndị dị na okpomọkụ dị mma (ike okpomọkụ ~150 W/m·K, ebe ịgbaze 1410°C). Ihe karịrị 90% nke sekit agbakwunyere, gụnyere CPU, ebe nchekwa, na ngwaọrụ echiche, ka a na-emepụta na wafer silicon. Silicon na-achịkwakwa sel fotovoltaic ma a na-ejikarị ya eme ihe na ngwaọrụ ike dị ala ruo nke ọkara dịka IGBTs na MOSFETs.

Agbanyeghị, silicon na-eche nsogbu ihu n'ọrụ voltaji dị elu na ugboro ugboro n'ihi obere bandgap ya (1.12 eV) na bandgap na-apụtaghị ìhè, nke na-egbochi arụmọrụ mwepụta ìhè.

Silicon Carbide: Onye Mmepụta Ihe Dị Ike Dị Elu

SiC bụ ihe semiconductor nke ọgbọ nke atọ nwere nnukwu bandgap (3.2 eV), voltaji mgbawa dị elu (3 MV/cm), ike okpomọkụ dị elu (~490 W/m·K), na ọsọ ọsọ nke njupụta elektrọn (~2 × 10⁷ cm/s). Àgwà ndị a na-eme ka ọ dị mma maka ngwaọrụ voltaji dị elu, ike dị elu, na ugboro ugboro. A na-akọkarị SiC substrates site na mbufe vapor anụ ahụ (PVT) na okpomọkụ karịrị 2000°C, yana ihe achọrọ nhazi dị mgbagwoju anya na nke ziri ezi.

Ngwa ndị a gụnyere ụgbọala eletriki, ebe SiC MOSFETs na-eme ka arụmọrụ inverter dịkwuo mma site na 5–10%, sistemụ nkwukọrịta 5G na-eji SiC nke na-egbochi ihe mgbochi maka ngwaọrụ GaN RF, na grid smart nwere nnyefe voltaji direct current (HVDC) na-ebelata mfu ike ruo 30%. Mmachi bụ ọnụ ahịa dị elu (wafers inch 6 dị ọnụ karịa silicon ugboro 20–30) na ihe ịma aka nhazi n'ihi oke ike.

Ọrụ Ndị Ọzọ na Echiche Ọdịnihu

Sapphire, silicon, na SiC na-etolite usoro ihe ndị ọzọ na-eme ka ihe dị n'ime ala n'ime ụlọ ọrụ semiconductor. Sapphire na-achịkwa optoelectronics, silicon na-akwado microelectronics ọdịnala na ngwaọrụ ike dị ala ruo nke ọkara, SiC na-eduzikwa eletrọniki ike dị elu, nke na-adị elu, na nke na-arụ ọrụ nke ọma.

Mmepe ndị ga-eme n'ọdịnihu gụnyere ịgbasa ngwa sapphire na LED miri emi na obere LED, na-eme ka GaN heteroepitaxy nke Si dabere na ya kwalite arụmọrụ ugboro ugboro dị elu, na ịbawanye mmepụta wafer SiC ruo sentimita 8 na mmụba mmepụta na arụmọrụ ọnụ ahịa. N'ịhazi, ihe ndị a na-akwalite ihe ọhụrụ na 5G, AI, na mmegharị eletrik, na-akpụzi ọgbọ na-esote nke teknụzụ semiconductor.