Silicon carbide (SiC), dịka ụdị ihe semiconductor nwere oghere band band, na-arụ ọrụ dị mkpa n'itinye sayensị na teknụzụ ọgbara ọhụrụ n'ọrụ. Silicon carbide nwere ezigbo nkwụsi ike okpomọkụ, oke nnabata ubi eletriki, njikwa ebumnuche na ihe ndị ọzọ dị mma nke anụ ahụ na anya, a na-ejikwa ya nke ọma na ngwaọrụ optoelectronic na ngwaọrụ anyanwụ. N'ihi mmụba nke ọchịchọ maka ngwaọrụ eletrọnịkị dị irè ma kwụsie ike, ịmụta nkà na ụzụ uto nke silicon carbide aghọwo ebe a na-achọsi ike.
Ya mere, kedu ihe ị maara gbasara usoro uto SiC?
Taa, anyị ga-atụle ụzọ atọ dị mkpa maka uto nke kristal silicon carbide otu: njem ikuku anụ ahụ (PVT), epitaxy nke mmiri mmiri (LPE), na deposition nke kemịkalụ okpomọkụ dị elu (HT-CVD).
Ụzọ Mbufe Uzuoku Anụ Ahụ (PVT)
Usoro mbufe anwụrụ ọkụ nkịtị bụ otu n'ime usoro uto silicon carbide a na-ejikarị eme ihe. Mmụba nke otu kristal silicon carbide dabere na ntinye nke sic powder na itinyeghachi ya na kristal mkpụrụ osisi n'ọnọdụ okpomọkụ dị elu. N'ime graphite crucible mechiri emechi, a na-ekpo ọkụ ntụ silicon carbide ruo okpomọkụ dị elu, site na njikwa nke okpomọkụ gradient, uzuoku silicon carbide na-agbakọta n'elu kristal mkpụrụ osisi, ma jiri nwayọọ nwayọọ na-eto nnukwu kristal otu.
Ọtụtụ n'ime monocrystalline SiC anyị na-enye ugbu a bụ nke e ji eto eto. Ọ bụkwa ụzọ a na-esi eme ya n'ụlọ ọrụ a.
Epitaxy nke usoro mmiri mmiri (LPE)
A na-akwadebe kristal silicon carbide site na mmiri mmiri epitaxy site na usoro uto kristal na njikọ siri ike na mmiri mmiri. N'ụzọ a, a na-agbaze ntụ ntụ silicon carbide na mmiri silicon-carbon na okpomọkụ dị elu, wee belata okpomọkụ ka silicon carbide wee si na mmiri ahụ pụta ma too na kristal mkpụrụ. Isi uru nke usoro LPE bụ ikike inweta kristal dị elu na okpomọkụ uto dị ala, ọnụ ahịa ya dị ntakịrị ala, ọ dịkwa mma maka mmepụta buru ibu.
Mbelata Uzuoku Kemịkalụ dị elu (HT-CVD)
Site n'itinye gas nwere silicon na carbon n'ime ụlọ mmeghachi omume na okpomọkụ dị elu, a na-etinye otu kristal nke silicon carbide ozugbo n'elu kristal mkpụrụ site na mmeghachi omume kemịkalụ. Uru nke usoro a bụ na enwere ike ijikwa ọnụego mmiri na ọnọdụ mmeghachi omume nke gas ahụ nke ọma, ka e wee nweta kristal silicon carbide nke nwere ịdị ọcha dị elu na obere ntụpọ. Usoro HT-CVD nwere ike imepụta kristal silicon carbide nke nwere njirimara dị mma, nke bara uru karịsịa maka ojiji ebe achọrọ ihe dị oke mma.
Usoro uto nke silicon carbide bụ isi ihe dị mkpa maka ojiji na mmepe ya. Site na mmepụta na imeziwanye teknụzụ na-aga n'ihu, ụzọ uto atọ a na-arụ ọrụ nke ha iji gboo mkpa nke oge dị iche iche, na-ahụ na ọnọdụ dị mkpa nke silicon carbide dị. Site na mmụba nke nyocha na ọganihu teknụzụ, usoro uto nke ihe silicon carbide ga-aga n'ihu na-emeziwanye, a ga-emekwa ka arụmọrụ nke ngwaọrụ eletrọnịkị ka mma.
(nyocha)
Oge ozi: Jun-23-2024