Silicon carbide (SiC), dị ka ụdị obosara band gap semiconductor ihe, na-arụ ọrụ na-esiwanye mkpa na ngwa nke sayensị na teknụzụ ọgbara ọhụrụ.Silicon carbide nwere ezigbo nkwụsi ike ọkụ, nnabata ọkụ eletrik dị elu, ebumnuche ebumnuche na akụrụngwa anụ ahụ na ngwa anya ndị ọzọ, a na-ejikwa ya na ngwa optoelectronic na ngwaọrụ anyanwụ.N'ihi mmụba na-arịwanye elu maka ngwaọrụ eletrọnịkị na-arụ ọrụ nke ọma na nke kwụsiri ike, ịmara teknụzụ uto nke silicon carbide aghọwo ebe na-ekpo ọkụ.
Kedu ihe ị maara gbasara usoro uto SiC?
Taa, anyị ga-atụle usoro atọ bụ isi maka uto nke silicon carbide otu kristal: njem ikuku anụ ahụ (PVT), mmiri mmiri epitaxy (LPE), na nnukwu ikuku mmiri kemịkalụ (HT-CVD).
Ụzọ Nyefe Uku Anụ ahụ (PVT)
Usoro mbufe uzuoku anụ ahụ bụ otu n'ime usoro uto silicon carbide a na-ejikarị.Uto nke otu silicon carbide kristal na-adabere na sublimation nke sic ntụ ntụ na redeposition na kristal mkpụrụ n'okpuru ọnọdụ okpomọkụ dị elu.Na graphite crucible mechiri emechi, silicon carbide ntụ ntụ na-ekpo ọkụ na oke okpomọkụ, site na njikwa nke gradient okpomọkụ, silicon carbide uzuoku condens n'elu nke mkpụrụ kristal, na nke nta nke nta na-eto a nnukwu size otu kristal.
Ihe ka ukwuu n'ime SiC monocrystalline anyị na-enye ugbu a bụ n'ụzọ uto a.Ọ bụkwa ụzọ bụ isi na ụlọ ọrụ.
Epitaxy nke mmiri mmiri (LPE)
A na-akwado kristal silicon carbide site na epitaxy nke mmiri mmiri site na usoro uto kristal na interface mmiri siri ike.Na usoro a, silicon carbide ntụ ntụ na-agbaze na silicon-carbon ngwọta na okpomọkụ dị elu, mgbe ahụ, a na-ebelata okpomọkụ nke mere na silicon carbide na-esi na ngwọta na-eto eto na kristal mkpụrụ.Isi uru nke usoro LPE bụ ikike ịnweta kristal dị elu na obere okpomọkụ na-eto eto, ọnụ ahịa ya dị ntakịrị, ọ dịkwa mma maka mmepụta nnukwu.
Ntụkwasị mmiri kemịkalụ dị elu (HT-CVD)
Site na iwebata gas nwere silicon na carbon n'ime ụlọ mmeghachi omume na oke okpomọkụ, a na-edobe otu kristal oyi akwa nke silicon carbide ozugbo n'elu kristal mkpụrụ site na mmeghachi omume kemịkal.Uru nke usoro a bụ na enwere ike ịchịkwa ọnụ ọgụgụ na-asọpụta na ọnọdụ mmeghachi omume nke gas nke ọma, ka ị nweta kristal silicon carbide nke nwere ịdị ọcha dị elu na ntụpọ ole na ole.Usoro HT-CVD nwere ike ịmepụta kristal silicon carbide nwere ihe ndị magburu onwe ya, nke bara uru karịsịa maka ngwa ebe achọrọ ihe dị oke elu.
Usoro uto nke silicon carbide bụ isi nkuku nke ngwa na mmepe ya.Site na teknụzụ teknụzụ na-aga n'ihu na njikarịcha, ụzọ atọ a na-eto eto na-arụ ọrụ dị iche iche iji gboo mkpa nke oge dị iche iche, na-ahụ na ọnọdụ dị mkpa nke silicon carbide.Site na omimi nke nyocha na ọganihu nkà na ụzụ, usoro uto nke silicon carbide ihe ga-anọgide na-eme ka ọ dịkwuo mma, a ga-emeziwanye arụmọrụ nke ngwaọrụ eletrọnịkị.
(nyocha)
Oge nzipu: Jun-23-2024