LNOI Wafer (Lithium Niobate na Insulator) Mgbasa ozi na-ahụta Electro-Optic dị elu
Eserese zuru ezu
Nchịkọta
N'ime igbe wafer nwere oghere ndị na-ahụ anya, nke akụkụ ya na-edozi nke ọma iji kwado akụkụ abụọ nke wafer. A na-emekarị igbe kristal nke translucent plastic PP ihe na-eguzogide okpomọkụ, eyi na ọkụ eletrik. A na-eji agba dị iche iche nke mgbakwunye iji chọpụta akụkụ usoro metal na mmepụta semiconductor. N'ihi na obere isi size nke semiconductors, ok ụkpụrụ, na nnọọ nlezianya urughuru size chọrọ na mmepụta, na wafer igbe ga-ekwe nkwa a dị ọcha gburugburu ebe obibi jikọọ na microenvironment igbe mmeghachi omume oghere nke dị iche iche mmepụta igwe.
Usoro mmepụta
Nrụpụta nke wafers LNOI nwere ọtụtụ usoro ziri ezi:
Nzọụkwụ 1: Ịkụnye Helium ionA na-ewebata ion helium n'ime nnukwu LN kristal site na iji ihe ntinye ion. Ion ndị a na-abanye n'otu omimi, na-etolite ụgbọ elu na-esighị ike nke ga-emecha mee ka mwepu ihe nkiri dị mfe.
Kwụpụ 2: Nhazi mkpụrụ osisiA na-eme ka silicon ma ọ bụ wafer LN dị iche iche oxidized ma ọ bụ kpuchie ya na SiO2 site na iji PECVD ma ọ bụ oxidation thermal. A na-ahazi elu elu ya maka njikọta kacha mma.
Kwụpụ 3: Njikọ LN na mkpụrụA na-atụgharị kristal LN etinyere ion ma tinye ya na wafer ntọala site na iji njikọ wafer ozugbo. Na ntọala nyocha, enwere ike iji benzocyclobutene (BCB) dị ka nrapado iji mee ka njikọ dị mfe n'okpuru ọnọdụ ndị siri ike.
Nzọụkwụ 4: Ọgwụgwọ okpomọkụ na nkewa ihe nkiriAnnealing na-arụ ọrụ nguzobe afụ n'ime omimi etinyere, na-eme ka ikewapụ ihe nkiri dị gịrịgịrị (elu LN oyi akwa) site na nnukwu. A na-eji ike arụ ọrụ emecha ihe mkpofu ahụ.
Nzọụkwụ 5: Nchacha eluA na-etinye Polishing Mechanical Chemical (CMP) iji mee ka elu LN dị mma, na-eme ka ogo anya na mkpụrụ ngwaọrụ.
Nka nka
| Ihe onwunwe | Ngwa anya Ọkwa LiNbO3 wafe (Ọcha or Nwa) | |
| Curie Okpomọkụ | 1142 ± 0.7 ℃ | |
| Ịcha Akụkụ | X/Y/Z wdg | |
| Dayameta/nha | 2"/3"/4" ±0.03mm | |
| Tol (±) | <0.20 mm ±0.005mm | |
| Ọkpụrụkpụ | 0.18 ~ 0.5mm ma ọ bụ karịa | |
| Isi Dị larịị | 16mm / 22mm / 32mm | |
| TTV | <3μm | |
| Ụta | -30 | |
| Warp | <40μm | |
| Nhazi Dị larịị | Ha niile dị | |
| Elu Ụdị | Otu akụkụ ehichapụ (SSP)/Akpụchapụrụ akụkụ abụọ (DSP) | |
| Achachapụrụ akụkụ Ra | <0.5nm | |
| S/D | 20/10 | |
| Ọnụ Usoro | R=0.2mm Ụdị C or Ogbugbu | |
| Ogo | N'efu of mgbawa (afụ na nsonye) | |
| Ngwa anya doped | Mg/Fe/Zn/MgO wdg maka ngwa anya ọkwa LN wafer kwa rịọrọ | |
| Wafer Elu Usoro | Ntụgharị ntụgharị | Ọ dịghị = 2.2878/Ne=2.2033 @632nm wavelength/prism coupler method. |
| Mmetọ, | Ọ dịghị | |
| Ụmụ irighiri ihe c>0.3μ m | <=30 | |
| Scratch, Chipping | Ọ dịghị | |
| Mmejọ | Enweghị mgbawa n'ọnụ, scratches, akara hụ, ntụpọ | |
| Nkwakọ ngwaahịa | Igbe Qty/Wafer | 25pcs kwa igbe |
Jiri Okwu
N'ihi ike ya na arụmọrụ ya, a na-eji LNOI n'ọtụtụ ụlọ ọrụ:
Photonics:Kọmpat modulators, multiplexers, na photonic sekit.
RF/Acoustics:Acousto-optic modulators, RF nzacha.
Mgbakọ Quantum:Ndị na-agwakọta ugboro na-adịghị na ntanetị na ndị na-emepụta foton-pair.
Nchekwa & Aerospace:Gyros ngwa anya dị ala, ngwaọrụ na-agbanwe ugboro ugboro.
Ngwa ahụike:Ihe biosensors anya na nyocha mgbama dị elu.
FAQ
Ajụjụ: Gịnị kpatara LNOI ji amasị SOI na sistemu anya?
A:LNOI nwere ọnụọgụ electro-optic dị elu yana oke nghọta sara mbara, na-eme ka arụmọrụ dị elu na sekit fotonic.
Ajụjụ: CMP ọ bụ iwu ka e kewasịrị?
A:Ee. Elu LN ahụ ekpughere adịghị ike ka ion-slicing gachara, a ga-ehichapụrịrị ya iji zute nkọwa ọkwa nyocha.
Ajụjụ: Gịnị bụ oke wafer kacha dị?
A:Azụmahịa LNOI wafers bụ nke mbụ 3” na 4”, n'agbanyeghị na ụfọdụ ndị na-ebubata ya na-emepụta ụdịdị 6.
Ajụjụ: Enwere ike ijikwa oyi akwa LN ọzọ mgbe nkewa gasịrị?
A:Enwere ike ịmegharị kristal isi ma jiri ya mee ihe ọtụtụ ugboro, ọ bụ ezie na àgwà ahụ nwere ike ịda mbà mgbe ọtụtụ okirikiri gasịrị.
Ajụjụ: Wafers LNOI dakọtara na nhazi CMOS?
A:Ee, emebere ha ka ha kwekọọ na usoro nrụpụta semiconductor nke ọdịnala, ọkachasị mgbe ejiri mkpụrụ silicon.
