4inch 6inch Lithium niobate otu ihe nkiri kristal LNOI wafer
A na-ekewa usoro nkwadebe nke ihe LNOI n'ime usoro anọ ndị a
(1) A na-agbanye ya ion n'ime ihe ndị dị na lithium niobate X-ebipụ n'otu ume, ma weba ya n'ime oyi akwa ntụpọ n'otu omimi dị n'okpuru elu nke lithium niobate;
(2) Ihe ion etinyere lithium niobate na-ejikọta ya na mkpụrụ osisi silicon na oyi akwa oxide iji mepụta usoro njikọ;
(3) E kpochapuru usoro njikọ ahụ iji mee ka ntụpọ nke He ion implantation webatara wee gbakọta ka ọ bụrụ mgbawa. N'ikpeazụ, e kewapụrụ lithium niobate n'akụkụ oyi akwa ntụpọ iji mepụta mpekere lithium niobate fọdụrụnụ na wafers LNOI.
Ngwa na uru nke LNOI wafer
1-- Lithium niobate piezoelectric fim (LNOI) nwere ọnụ ọgụgụ dị elu piezoelectric ọnụọgụ na dielectric mgbe niile, nke nwere ike ịgbanwe n'ibu ike na eletriki ike ma ọ bụ eletriki ike n'ime n'ibu ike. Ya mere, a na-ejikarị ya eme ihe n'ọhịa nke sensọ, dị ka ihe mmetụta nrụgide, ihe mmetụta ngwa ngwa, ihe mmetụta okpomọkụ na ihe ndị ọzọ. Tụkwasị na nke ahụ, a pụkwara iji ihe nkiri lithium niobate piezoelectric na-eme ihe na ngwaọrụ ụda na ngwaọrụ vibration, dị ka piezoelectric seramiiki transducer complex piezoelectric seramiiki filter.
2-Nkwụsi ike nke ihe nkiri lithium niobate piezoelectric bụkwa otu n'ime uru ya. N'ihi nkwụsi ike nke kristal ya na inertness kemịkalụ, ihe nkiri lithium niobate piezoelectric nwere ike ịrụ ọrụ na okpomọkụ dị elu, oke iru mmiri, acid siri ike, alkali siri ike na gburugburu ebe obibi siri ike, na-enwe ezigbo nguzogide corrosion na ogologo oge.
3-Lithium niobate piezoelectric film bụ ihe ọhụrụ piezoelectric ihe na magburu onwe arụmọrụ na nkwụsi ike, na nwere nnukwu ngwa atụmanya. Site na mmepe nke sayensị na teknụzụ na-aga n'ihu, a ga-etinye ihe nkiri lithium niobate piezoelectric n'ime obodo ndị ọzọ, na-ewetakwu mma na ihe ọhụrụ na ndụ ndị mmadụ.