4H/6H-P 6inch SiC wafer Zero MPD ọkwa Mmepụta ọkwa nju oyi

4H/6H-P 6inch SiC wafer Zero MPD ọkwa Mmepụta Ngosipụta Dummy Grade egosipụtara

Nkọwa dị mkpirikpi:

Ụdị 4H / 6H-P 6-inch SiC wafer bụ ihe semiconductor eji eme ihe n'ichepụta ngwaọrụ eletrọnịkị, nke a ma ama maka nrụpụta ọkụ ya dị mma, oke mgbawa voltaji, na iguzogide oke okpomọkụ na corrosion. Nrụpụta-ọkwa na Zero MPD (Micro Pipe Defect) ọkwa na-ahụ na a pụrụ ịdabere na ya na nkwụsi ike na ngwá electronic na-arụ ọrụ dị elu. A na-eji wafers-ọkwa mmepụta eme ihe maka nrụpụta ngwaọrụ buru ibu yana njikwa mma siri ike, ebe a na-eji wafers klas dummy eme ihe maka nbibi usoro yana nyocha akụrụngwa. Ngwongwo ndị pụtara ìhè nke SiC na-eme ka a na-etinye ya n'ọtụtụ ebe na igwe ọkụ dị elu, oke voltaji na ngwa eletrik dị elu, dị ka ngwaọrụ ike na ngwaọrụ RF.

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4H/6H-P Ụdị SiC Ngwakọta Ngwakọta Ngwakọta ihe ndị a na-ahụkarị

6 inch dayameta Silicon Carbide (SiC) mkpụrụ Nkọwapụta

Ọkwa			Mmepụta MPD efuỌkwa (Z Ọkwa)	Standard mmepụtaỌkwa (P Ọkwa)	Ngụsị akwụkwọ (D Ọkwa)
Dayameta			145.5 mm ~ 150.0 mm
Ọkpụrụkpụ			350 μm ± 25 μm
Usoro Wafer			-Offaxis: 2.0°-4.0° chere ihu [1120] ± 0.5° maka 4H/6H-P, On axis:〈111〉± 0.5° maka 3C-N
Njupụta Micropipe			0 cm-2
Nguzogide	p-ụdị 4H/6H-P		≤0.1 Ωꞏcm		≤0.3 mm
	n-ụdị 3C-N		≤0.8 mΩ nke cm		≤1 m Ωꞏcm
Nhazi Flat nke izizi		4H/6H-P	-{1010} ± 5.0°
		3C-N	-{110} ± 5.0°
Ogologo Flat nke izizi			32.5 mm ± 2.0 mm
Ogologo Flat nke abụọ			18.0 mm ± 2.0 mm
Nhazi Flat nke abụọ			Silicon ihu elu: 90° CW. si Prime flat ± 5.0°
Mwepu ihu			3 mm		6 mm
LTV/TTV/Ụta/Warp			≤2.5 μm/≤5 μm/≤15 μm/≤30 μm		≤10 μm/≤15 μm/≤25 μm/≤40 μm
Isi ike			Polish Ra≤1 nm
			CMP Ra≤0.2 nm		Ra ≤0.5 nm
Edge cracks Site na nnukwu ọkụ ọkụ			Ọ dịghị		Ogologo ngụkọta ≤ 10 mm, otu ogologo≤2 mm
Efere Hex Site na Ìhè Dị Elu			Mpaghara mkpokọta ≤0.05%		Mpaghara mkpokọta ≤0.1%
Mpaghara Polytype Site n'ìhè dị elu			Ọ dịghị		Mpaghara mkpokọta≤3%
Ntinye Carbon Anya Anya			Mpaghara mkpokọta ≤0.05%		Mpaghara mkpokọta ≤3%
Silicon dị n'elu Scratches Site na nnukwu ọkụ ọkụ			Ọ dịghị		Mgbakọ ogologo≤1 × dayameta wafer
Edge Chips High Site n'ọkụ ọkụ			Ọnweghị nke anabatara obosara na omimi ≥0.2mm		5 kwere, ≤1 mm nke ọ bụla
Mmetọ Silicon dị n'elu site na oke ike			Ọ dịghị
Nkwakọ ngwaahịa			Cassette Multi-wafer ma ọ bụ otu akpa wafer

ndetu:

※ Oke ntụpọ na-emetụta n'elu wafer dum ma ewezuga mpaghara mwepu ihu. # Ekwesịrị ịlele ncha ahụ na Si ihu o

Ụdị 4H/6H-P 6-inch SiC wafer nwere akara zero MPD na mmepụta ma ọ bụ ọkwa dummy na-ejikarị na ngwa eletrọnịkị dị elu. Nrụpụta ọkụ ya dị mma, voltaji ndakpọ dị elu, na iguzogide gburugburu ebe siri ike na-eme ka ọ dị mma maka ngwa eletrọnịkị, dị ka mgba ọkụ voltaji dị elu na inverters. Ọkwa MPD efu na-eme ka nrụrụ dị ntakịrị, dị oke mkpa maka ngwaọrụ nwere ntụkwasị obi dị elu. A na-eji wafers ọkwa mmepụta ihe n'ichepụta ngwaọrụ ike yana ngwa RF, ebe arụmọrụ na nkenke dị oke mkpa. Dummy-grade wafers, n'aka nke ọzọ, na-eji maka nhazi nhazi, ngwá ọrụ, na prototyping, na-enyere aka na-agbanwe agbanwe àgwà njikwa na semiconductor mmepụta gburugburu.

Uru nke ụdị N-ụdị SiC ngwakọta mejupụtara gụnyere

Omume okpomọkụ dị elu: 4H / 6H-P SiC wafer na-arụ ọrụ nke ọma na-ekpochapụ okpomọkụ, na-eme ka ọ dị mma maka ngwa eletrik dị elu na ike dị elu.
Voltaji ndakpọ dị elu: Ikike ya ijikwa voltaji dị elu na-enweghị ọdịda na-eme ka ọ dị mma maka eletrik eletrik na ngwa ngbanwe voltaji dị elu.
Ọkwa MPD efu (Nkwarụ ọkpọkọ).: Ngwongwo obere ntụpọ na-eme ka ntụkwasị obi dị elu na arụmọrụ dị elu, dị oke mkpa maka ịchọ ngwaọrụ eletrọnịkị.
Mmepụta-ọkwa maka nrụpụta uka: Kwesịrị ekwesị maka nnukwu mmepụta nke ngwaọrụ semiconductor na-arụ ọrụ dị elu na ụkpụrụ ịdị mma siri ike.
Dummy-ọkwa maka Nnwale na nhazigharị: Na-eme ka njikarịcha usoro, nyocha akụrụngwa, na prototyping na-ejighi ihe nrụpụta ọkwa ọkwa dị elu.

N'ozuzu, 4H/6H-P 6-inch SiC wafers nwere akara Zero MPD, ọkwa mmepụta, na ọkwa dummy na-enye uru dị ukwuu maka mmepe nke ngwaọrụ eletrọnịkị dị elu. Wafers ndị a bara uru karịsịa na ngwa na-achọ ọrụ okpomọkụ dị elu, njupụta ike dị elu, na ntụgharị ike dị mma. Ọkwa MPD Zero na-eme ka ntụpọ pere mpe maka ịrụ ọrụ ngwaọrụ a pụrụ ịdabere na ya ma kwụsie ike, ebe wafer ọkwa ọkwa na-akwado nrụpụta nnukwu ọnụ yana njikwa njikwa siri ike. Dummy-grade wafers na-enye ihe ngwọta dị ọnụ ahịa maka njikarịcha usoro na nhazi akụrụngwa, na-eme ka ha dị mkpa maka ịmepụta semiconductor dị elu.