4 inch SiC Wafers 6H Semi-Insulating SiC Substrates praịmarị, nyocha na ọkwa nju.

4 inch SiC Wafers 6H Semi-Insulating SiC Substrates praịm, nyocha na ọkwa dummy egosipụtara

Nkọwa dị mkpirikpi:

A na-etolite mkpụrụ osisi silicon carbide nke nwere ọkara mkpuchi site na ịcha, ichikota, polishing, ihicha na teknụzụ nhazi ndị ọzọ mgbe uto nke kristal silicon carbide nwere ọkara mkpuchi.A na-etolite akwa oyi akwa ma ọ bụ kristal multilayer n'elu mkpụrụ nke na-emezu ihe achọrọ dị ka epitaxy, emesia a na-eme ngwaọrụ RF microwave site na ijikọta nhazi sekit na nkwakọ ngwaahịa.Dị ka 2inch 3inch 4incgh 6inch 8 inch industry, research and test grade semi-insulated silicon carbide single crystal substrates.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwapụta ngwaahịa

Ọkwa			Ọkwa mmepụta MPD efu (ọkwa Z)			Ọkachamara Mmepụta Ọkọrịa(P Ọkwa)		Ngụsị akwụkwọ (D grade)
Dayameta			99.5 mm ~ 100.0 mm
	4H-SI		500 μm± 20 μm			500 μm± 25 μm
Usoro Wafer			Gbanyụọ axis: 4.0° n'ebe <1120> ± 0.5° maka 4H-N, On axis: <0001>±0.5° maka 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Nhazi Flat nke izizi		{10-10} ±5.0°
Ogologo Flat nke izizi		32.5 mm± 2.0 mm
Ogologo Flat nke abụọ		18.0 mm± 2.0 mm
Nhazi Flat nke abụọ		Silicon ihu elu: 90° CW.si Prime flat ± 5.0°
Mwepu ihu		3 mm
LTV/TTV/Ụta/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Isi ike			C ihu				Polish		Ra≤1 nm
			Si ihu	CMP	Ra≤0.2 nm					Ra ≤0.5 nm
Edge cracks Site na nnukwu ọkụ ọkụ		Ọ dịghị						Ogologo ngụkọta ≤ 10 mm, otu ogologo≤2 mm
Efere Hex Site na Ìhè Dị Elu		Mpaghara mkpokọta ≤0.05%						Mpaghara mkpokọta ≤0.1%
Mpaghara Polytype Site n'ìhè dị elu		Ọ dịghị						Mpaghara mkpokọta≤3%
Ntinye Carbon Anya Anya		Mpaghara mkpokọta ≤0.05%						Mpaghara mkpokọta ≤3%
Silicon dị n'elu Scratches Site na nnukwu ọkụ ọkụ		Ọ dịghị						Ogologo ngụkọta ogologo≤1＊wafer dayameta
Edge Chips High Site n'ọkụ ọkụ		Ọnweghị nke enyere ikike ≥0.2 mm obosara na omimi						5 kwere, ≤1 mm nke ọ bụla
Mmetọ Silicon dị n'elu site na oke ike		Ọ dịghị
Nkwakọ ngwaahịa		Cassette Multi-wafer ma ọ bụ otu akpa wafer