Wafer SiC nke dị sentimita 4, 6H Semi-insulating SiC Substrates dị elu, nyocha, na ọkwa nzuzu

Wafers SiC nke dị sentimita 4, 6H Semi-insulating SiC Substrates dị elu, nyocha, na ọkwa nzuzu Foto a na-egosipụta

Nkọwa Dị Mkpirikpi:

A na-emepụta ihe mkpuchi silicon carbide nke ọkara-insulated site na ịkpụ, ịcha, ịchacha, nhicha na teknụzụ nhazi ndị ọzọ mgbe kristal silicon carbide nke ọkara-insulated tolitere. A na-akụ oyi akwa ma ọ bụ akwa kristal dị ọtụtụ n'elu ihe mkpuchi ahụ nke na-emezu ihe achọrọ maka mma dị ka epitaxy, wee mepụta ngwaọrụ microwave RF site na ijikọta nhazi sekit na nkwakọ ngwaahịa. Dị ka ihe mkpuchi silicon carbide nke ọkara-insulated, nyocha na ule nke ọkara-insulated silicon carbide otu kristal.

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atụmatụ

Nkọwapụta Ngwaahịa

Ọkwa			Ọkwa Mmepụta MPD efu (Ọkwa Z)			Ọkwa Mmepụta Ọkọlọtọ (Ọkwa P)		Akara D (Ọkwa D)
Dayameta			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Nhazi Wafer			N'akụkụ : 4.0° gaa < 1120 > ±0.5° maka 4H-N, N'akụkụ : <0001>±0.5° maka 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Nhazi Ala Dị Elu nke Mbụ		{10-10} ±5.0°
Ogologo Dị larịị nke Mbụ		32.5 mm±2.0 mm
Ogologo Dị larịị nke Abụọ		18.0 mm±2.0 mm
Nhazi nke Abụọ nke Dị larịị		Ihu silicon dị elu: 90° CW. site na Prime flat ±5.0°
Mwepu nke Ọnụọgụ		3 mm
LTV/TTV/Bọọlụ/Mgbawa		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Isi ike			Ihu C				Ndị Poland		Ra≤1 nm
			Ihu Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Mgbawa Ọkụ Site na Ọkụ Ike Dị Elu		Ọ dịghị						Ogologo mkpokọta ≤ 10 mm, otu ogologo ≤2 mm
Efere Hex Site na Ìhè Dị Ike		Mpaghara mkpokọta ≤0.05%						Mpaghara mkpokọta ≤0.1%
Ebe Polytype Site na Ọkụ Dị Ike		Ọ dịghị						Mpaghara mkpokọta≤3%
Ihe Ndị A Na-ahụ Anya Banyere Carbon		Mpaghara mkpokọta ≤0.05%						Mpaghara mkpokọta ≤3%
Ọkpụkpọ Elu Silikọn Site na Ìhè Dị Ike		Ọ dịghị						Ogologo mkpokọta ≤1＊dayameta wafer
Ibe Ọkụ Dị Elu Site na Ìhè Ike		Ọ dịghị ihe e kwere ka ≥0.2 mm obosara na omimi						5 e kwere, ≤1 mm nke ọ bụla
Mmetọ Elu Silikọn Site na Ike Dị Elu		Ọ dịghị
Nkwakọ ngwaahịa		Kaseti nwere ọtụtụ wafer ma ọ bụ otu wafer akpa