156mm 159mm 6 inch Sapphire Wafer maka ụgbọelu C-Plane DSP TTV
Nkọwapụta
| Ihe | 6-anụ ọhịa C-ụgbọ elu (0001) Sapphire Wafers | |
| Ihe ndị kristal | 99,999%, ịdị ọcha dị elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Njikere | |
| Ntuzi ihu ihu | Ụgbọ elu C (0001) | |
| C-ụgbọ elu kwụsịrị-akuku chere ihu M-axis 0.2 +/- 0.1° | ||
| Dayameta | 100.0 mm +/- 0.1 mm | |
| Ọkpụrụkpụ | 650 μm +/- 25 μm | |
| Nhazi Flat nke izizi | C-ụgbọ elu (00-01) +/- 0.2° | |
| Otu akụkụ ehichapụ | Ihu ihu | Epi-egbu maramara, Ra <0.2 nm (nke AFM) |
| (SSP) | Azụ elu | Ala mara mma, Ra = 0.8 μm ruo 1.2 μm |
| Agbachapụrụ akụkụ abụọ | Ihu ihu | Epi-egbu maramara, Ra <0.2 nm (nke AFM) |
| (DSP) | Azụ elu | Epi-egbu maramara, Ra <0.2 nm (nke AFM) |
| TTV | <20 μm | |
| ỤTA | <20 μm | |
| WARP | <20 μm | |
| Nchacha / nkwakọ ngwaahịa | Klas 100 nhicha ụlọ dị ọcha na nkwakọ ngwaahịa, | |
| Iberibe 25 n'otu ngwugwu cassette ma ọ bụ otu ngwugwu. | ||
Ọtụtụ ụlọ ọrụ dị na China na-eji usoro Kylopoulos (usoro KY) ugbu a iji mepụta kristal sapphire maka ojiji na ụlọ ọrụ elektrọnik na optics.
N'ime usoro a, aluminom oxide dị ọcha na-agbaze na crucible na okpomọkụ karịa 2100 degrees Celsius. Ọtụtụ mgbe, a na-eme crucible nke tungsten ma ọ bụ molybdenum. A na-emikpu mkpụrụ kristal gbakwasara ahụ nke ọma n'ime alumina a wụrụ awụ. A na-eji nwayọọ nwayọọ na-ebuli kristal mkpụrụ ahụ elu ma nwee ike ịtụgharị ya n'otu oge. Site n'ịchịkwa nke ọma gradient okpomọkụ, ọnụ ọgụgụ ịdọrọ na ọnụego jụrụ oyi, nnukwu, otu-kristal, ihe fọrọ nke nta ka ọ bụrụ cylindrical ingot nwere ike ịmepụta site na agbaze.
Mgbe otu ingots sapphire kristal tolitechara, a na-agbaba ha n'ime mkpanaka cylindrical, bụ́ ndị a na-egbutuzi ya ruo n'obosara windo a chọrọ ma mesịa na-egbuke egbuke ruo n'elu ebe a chọrọ.
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