Wafer Silicon / Silicon Carbide (SiC) Ejiri usoro nhazi polish nke nwere ogbo anọ (Ahịrị njikwa post-Polish jikọtara ọnụ)

Ahịrị Arụmọrụ Ndozi Arụmọrụ nke Anọ a bụ ngwọta ejikọtara ọnụ, nke dị n'ime ahịrị nke emere makapost-polish / post-CMPọrụ nkesilikọnnasilicon carbide (SiC)Wafers. E wuru ya gburugburundị na-ebu seramiiki (efere seramiiki), sistemụ ahụ na-ejikọta ọtụtụ ọrụ ndị dị n'okpuru ala n'otu ahịrị nhazi - na-enyere aka belata njikwa aka, mee ka oge ọrụ dịkwuo mma, ma mee ka njikwa mmetọ sikwuo ike.

N'ime mmepụta semiconductor,nhicha dị irè mgbe CMP gasịrịa maara nke ọma dị ka nzọụkwụ dị mkpa iji belata ntụpọ tupu usoro ọzọ, yana ụzọ dị elu (gụnyerenhicha megasonic) a na-ekwukarị maka ime ka arụmọrụ mwepụ ihe dị n'ime ya ka mma.

Maka SiC, ọ dị mkpaike siri ike na enweghị ike kemịkalụ dị eluna-eme ka ịkpụcha ihe sie ike (a na-ejikọkarị ya na obere ọsọ mwepụ ihe na nnukwu ihe egwu nke mmebi elu/okpuru ala), nke na-eme ka akpaaka kwụsiri ike mgbe ewepụchara ihe na nhicha/njikwa a na-achịkwa baa uru karịsịa.