Ihe mkpuchi seramiiki silicon carbide maka sapphire SiC Si GAAs Wafer

Ihe e ji silikọn Carbide seramiiki mee maka SiC sapphire Si GAAs Wafer nke e ji silikọn Carbide mee

Nkọwa Dị Mkpirikpi:

Silicon Carbide Ceramic Chuck bụ ikpo okwu dị elu nke e mepụtara maka inyocha semiconductor, imepụta wafer, na ijikọta ihe. Ejiri ihe seramiiki dị elu rụọ ya - gụnyere SiC (SSiC), SiC (RSiC), silicon nitride, na aluminum nitride - ọ na-enye ike dị elu, obere mgbasawanye okpomọkụ, ezigbo ike iyi, na ndụ ogologo oge.

Zitere anyị ozi-e

atụmatụ

Ihe osise zuru ezu

Nkọwa nke Silicon Carbide (SiC) Ceramic Chuck

IheSilicon Carbide Seramiiki Chuckbụ ikpo okwu arụmọrụ dị elu nke e mepụtara maka inyocha semiconductor, imepụta wafer, na ngwa njikọ. Ejiri ihe seramiiki dị elu rụọ ya—gụnyereSiC a gwakọtara agwakọta (SSiC), SiC nke ejiri mmeghachi omume jikọta (RSiC), silicon nitride, naaluminom nitride-ọ na-enyeike siri ike, obere mgbasawanye okpomọkụ, ezigbo nguzogide iyi, na ndụ ogologo oge ọrụ.

Site na injinia ziri ezi na imepụta ihe eji eme ihe nke ọma, chuck na-enye ọrụịdị larịị nke sub-micron, elu dị mma maka enyo, na nkwụsi ike nke akụkụ ogologo oge, na-eme ka ọ bụrụ ihe ngwọta kacha mma maka usoro semiconductor dị mkpa.

Uru Ndị Dị Mkpa

Nkọwapụta Dị Elu
Ịdị larịị a na-achịkwa n'ime0.3–0.5 μm, na-ahụ na wafer kwụsiri ike ma na-agbanwe agbanwe usoro ziri ezi.
Ịchacha enyo
MmezuRa 0.02 μmọdịghị ike n'elu, na-ebelata ọkpụkpọ na mmetọ wafer—nke zuru oke maka gburugburu ebe dị ọcha nke ukwuu.
Dị Mfe nke ukwuu
Ka ọ dị ike ma dịkwa mfe karịa quartz ma ọ bụ ihe ndị e ji ígwè mee, na-eme ka njikwa mmegharị ahụ ka mma, na-aza ajụjụ, na izi ezi nke nhazi ya.
Isi Ike Dị Elu
Modulu nke Exceptional Young na-eme ka ọ kwụsie ike n'okpuru ibu dị arọ na ọrụ ọsọ ọsọ.
Mgbasawanye Okpomọkụ Dị Ala
CTE na-ejikọta wafer silicon nke ọma, na-ebelata nrụgide okpomọkụ ma na-eme ka ntụkwasị obi usoro dịkwuo elu.
Nguzogide Iyi Pụrụ Iche
Ike siri ike nke ukwuu na-echekwa ịdị larịị na nkenke ọbụlagodi n'oge ogologo oge, ojiji ugboro ugboro.

Usoro Mmepụta

Nkwadebe Ihe Ndị E Ji Arụ Ọrụ
Ntụ SiC dị ọcha nke ukwuu nke nwere nha ihe ndị a na-achịkwa na ihe ndị na-adịghị ọcha nke ukwuu.
Ịkpụ na Ịkpụcha ihe
Usoro dịkasintering na-enweghị nrụgide (SSiC) or njikọ mmeghachi omume (RSiC)mepụta ihe ndị dị arọ, nke e ji seramiiki mee.
Nhazi nke ọma
Nchikota CNC, ịkpụcha laser, na igwe eji eme ihe nke ọma na-enweta ndidi ±0.01 mm na ≤3 μm.
Ọgwụgwọ Elu
Ịcha na ịchacha ọtụtụ ogbo ruo Ra 0.02 μm; mkpuchi nhọrọ dị maka iguzogide nchara ma ọ bụ njirimara esemokwu ahaziri ahazi.
Nnyocha na Njikwa Ogo
Ihe ndị na-egosi ihe dị n'etiti ihe na ihe ndị na-egosi ihe siri ike na-egosi na ha na-agbaso nkọwapụta ọkwa semiconductor.

Nkọwapụta Nkà na ụzụ

Paramita	Uru	Ngalaba
Ịdị larịị	≤0.5	μm
Nha wafer	6'', 8'', 12'' (ọ dị maka omenala)	—
Ụdị elu	Ụdị ntụtụ / Ụdị mgbanaka	—
Ogologo ntụtụ	0.05–0.2	mm
Dayameta ntụtụ kacha nta	ϕ0.2	mm
Oghere dị obere maka ntụtụ	3	mm
Obosara mgbaaka akara kacha nta	0.7	mm
Ọdịdị elu siri ike	Ra 0.02	μm
Ịnagide ọkpụrụkpụ	±0.01	mm
ndidi dayameta	±0.01	mm
Nnagide nhata yiri nke ahụ	≤3	μm

Ngwa Ndị Isi

Ngwa nyocha wafer semiconductor
Sistemụ mmepụta na mbufe Wafer
Ngwa njikọ na nkwakọ ngwaahịa Wafer
Mmepụta ngwaọrụ optoelectronic dị elu
Ngwa nkenke nke chọrọ elu dị larịị, dị ọcha nke ukwuu

Ajụjụ na Azịza – Silicon Carbide Ceramic Chuck

Q1: Kedu ka SiC seramiiki chucks si tụnyere quartz ma ọ bụ metal chucks?
A1: SiC chucks dị mfe, sie ike karịa, ma nwee CTE dị nso na silicon wafers, na-ebelata mmebi okpomọkụ. Ha na-enyekwa ike iguzogide iyi dị elu na ndụ ogologo oge.

Q2: Kedu nha nha enwere ike inweta?
A2: A na-achịkwa ya n'ime0.3–0.5 μm, na-emezu ihe siri ike nke mmepụta semiconductor.

Q3: Elu ọ ga-akpụcha wafers?
A3: Mba—e ji enyo kpụọ yaRa 0.02 μm, na-ahụ na njikwa enweghị ọkọ na mbelata mmepụta ihe dị iche iche.

Q4: Kedu nha wafer ka akwadoro?
A4: Nha ọkọlọtọ nke6'', 8'', na 12'', yana nhazi dị.

Q5: Kedu ka iguzogide okpomọkụ si dị?
A5: Seramiki SiC na-enye arụmọrụ dị elu dị mma yana obere mgbanwe n'okpuru okirikiri okpomọkụ.

Gbasara anyị

XKH bụ ọkachamara n'ihe gbasara mmepe teknụzụ dị elu, mmepụta, na ire nke iko anya pụrụ iche na ihe kristal ọhụrụ. Ngwaahịa anyị na-enye ngwa eletrọnịkị anya, ngwa eletrọnịkị ndị ahịa, na ndị agha. Anyị na-enye ihe ndị mejupụtara anya Sapphire, mkpuchi anya ekwentị mkpanaaka, seramiiki, LT, Silicon Carbide SIC, Quartz, na wafers kristal semiconductor. Site na ahụmịhe ọkachamara na ngwa ọgbara ọhụrụ, anyị na-eme nke ọma na nhazi ngwaahịa na-abụghị ọkọlọtọ, na-achọ ịbụ ụlọ ọrụ teknụzụ dị elu nke ihe optoelectronic.