Ngwa uto nke Sapphire Ingot Usoro Czochralski CZ maka imepụta Wafers Sapphire nke dị sentimita 2-12
Ụkpụrụ Ọrụ
Usoro CZ na-arụ ọrụ site na usoro ndị a:
1. Ịgbaze Ihe Ndị A Na-anaghị Agbanwe Agbanwe: A na-agbaze Al₂O₃ dị ọcha nke ukwuu (ịdị ọcha karịa 99.999%) n'ime iridium crucible na 2050–2100°C.
2. Okwu Mmalite nke Crystal Mkpụrụ: A na-ebelata kristal mkpụrụ n'ime mmiri gbazee, wee dọpụta ya ngwa ngwa iji mepụta olu (dayameta <1 mm) iji wepụ nkwarụ.
3. Nhazi ubu na uto buru ibu: A na-ebelata ọsọ ndọda ruo 0.2–1 mm/h, na-agbasa dayameta kristal ahụ nwayọ nwayọ ruo nha ebumnuche (dịka ọmụmaatụ, sentimita 4–12).
4. Ịkwanye na Ịjụ oyi: A na-ajụ kristal ahụ oyi na 0.1–0.5°C/min iji belata mgbawa okpomọkụ nke nrụgide na-akpata.
5. Ụdị kristal dakọtara:
Ọkwa Elektrọnik: Ihe ndị na-emepụta Semiconductor (TTV <5 μm)
Ọkwa Anya: windo laser UV (nnyefe > 90% @ 200 nm)
Ụdị dị iche iche e tinyere n'ime mmiri: Ruby (njupụta Cr³⁺ 0.01–0.5 wt.%), tub sapphire acha anụnụ anụnụ
Akụkụ Sistemụ Isi
1. Sistemụ Agbaze
Iridium Crucible: Na-eguzogide okpomọkụ ruo 2300°C, na-eguzogide nchara, dakọtara na nnukwu agbaze (100-400 kg).
Ọkụ Ọkụ Induction: Njikwa okpomọkụ nke na-adabereghị na mpaghara dị iche iche (±0.5°C), nhazi okpomọkụ kachasị mma.
2. Sistemụ ndọda na ntụgharị
Moto Servo Dị Elu: Mkpebi ndọda 0.01 mm/h, ntụgharị nke ntụgharị <0.01 mm.
Mkpuchi Mmiri Magnetik: Nnyefe na-anaghị emetụ aka maka uto na-aga n'ihu (> awa 72).
3. Sistemụ Njikwa Okpomọkụ
Njikwa PID Emechiri Emechi: Nhazi ike n'oge (50–200 kW) iji mee ka ubi okpomọkụ kwụsie ike.
Nchedo Gas Na-adịghị Ike: Ngwakọta Ar/N₂ (ịdị ọcha 99.999%) iji gbochie oxidation.
4. Akpaaka na Nlekota
Nlekota nke dayameta CCD: Nzaghachi oge (izizi ± 0.01 mm).
Infrared Thermography: Na-enyocha ọdịdị njikọ siri ike na mmiri mmiri.
Ntụnyere Usoro CZ na KY
| Paramita | Usoro CZ | Usoro KY |
| Nha kristal kachasị | sentimita iri na abụọ (300 mm) | 400 mm (ihe e ji ube mee) |
| Njupụta ntụpọ | <100/cm² | <50/cm² |
| Ọnụego uto | 0.5–5 mm/h | 0.1–2 mm/h |
| Oriri Ike | 50–80 kWh/kg | 80–120 kWh/kg |
| Ngwa | Ihe ndị e ji LED mee, GaN epitaxy | Windo anya, nnukwu ingots |
| Ọnụ ego | Oke (itinye ego akụrụngwa dị elu) | Usoro dị elu (usoro dị mgbagwoju anya) |
Ngwa Ndị Dị Mkpa
1. Ụlọ ọrụ Semiconductor
Ihe ndị dị na GaN Epitaxial: Wafers nke dị sentimita 2–8 (TTV ihe na-erughị 10 μm) maka Micro-LED na diode laser.
SOI Wafers: Ọdịdị elu <0.2 nm maka ibe 3D ejikọtara.
2. Optoelectronics
Windo Laser UV: Na-eguzogide njupụta ike 200 W/cm² maka lithography optics.
Ihe Ndị Dị na Infrared: Ihe na-eme ka mmadụ na-amịkọrọ ihe <10⁻³ cm⁻¹ maka onyonyo okpomọkụ.
3. Eletrọniki Ndị Ahịa
Mkpuchi Igwefoto Ama: Mmezi siri ike nke Mohs 9, 10 × iguzogide ọkọ.
Ngosipụta elekere smart: ọkpụrụkpụ 0.3–0.5 mm, nnyefe > 92%.
4. Nchebe na Ụgbọelu
Windo Reactor Nuklia: Ịnagide radieshon ruo 10¹⁶ n/cm².
Enyo Laser Dị Ike: Mgbanwe okpomọkụ <λ/20@1064 nm.
Ọrụ XKH
1. Nhazi akụrụngwa
Nhazi Ụlọ A Na-agbanwe Agbanwe: Nhazi Φ200–400 mm maka mmepụta wafer nke 2–12-inch.
Mgbanwe nke Doping: Na-akwado doping rare-earth (Er/Yb) na transition-metal (Ti/Cr) maka njirimara optoelectronic ahaziri ahazi.
2. Nkwado site na njedebe ruo na njedebe
Nhazi Usoro: Ntụziaka akwadoro (ihe karịrị iri ise) maka LED, ngwaọrụ RF, na ihe ndị e ji radieshon mee.
Netwọk Ọrụ zuru ụwa ọnụ: Nchọpụta ihe dị anya awa 24 kwa ụbọchị na mmezi n'ebe ọrụ yana akwụkwọ ikike ọnwa 24.
3. Nhazi dị n'okpuru
Ịkpụ Wafer: Ịkpụcha, ịchacha, na ịchacha maka wafers 2-12-inch (C/A-plane).
Ngwaahịa Ndị Bara Uru:
Ihe ndị dị na anya: windo UV/IR (ọkpụrụkpụ 0.5–50 mm).
Ihe eji achọ mma: ruby Cr³⁺ (nke GIA kwadoro), sapphire kpakpando Ti³⁺.
4. Ọchịchị teknụzụ
Asambodo: Wafers ndị na-agbaso EMI.
Ikike Patent: Isi ikike patent na usoro CZ.
Mmechi
Ngwa usoro CZ na-enye nkwekọ nha nha buru ibu, ọnụego ntụpọ dị ala, yana nkwụsi ike usoro dị elu, na-eme ka ọ bụrụ ihe atụ nke ụlọ ọrụ maka ngwa LED, semiconductor, na nchekwa. XKH na-enye nkwado zuru oke site na ntinye akụrụngwa ruo na nhazi mgbe uto gasịrị, na-enye ndị ahịa ohere inweta mmepụta kristal sapphire dị ọnụ ala ma dị elu.
