HPSI SiC Wafer ≥90% Nnyefe ngwa anya maka enyo AI/AR

HPSI SiC Wafer ≥90% Ngosipụta Nleba anya maka enyo enyo AI/AR

Nkọwa dị mkpirikpi:

Oke	Ọkwa	Ngwakọta 4-inch	Ngwakọta 6-inch
Dayameta	Ọkwa Z / D	99.5 mm - 100.0 mm	149.5 mm - 150.0 mm
Ụdị poly	Ọkwa Z / D	4H	4H
Ọkpụrụkpụ	Z ọkwa	500 μm ± 15 μm	500 μm ± 15 μm
Ọkpụrụkpụ	D ọkwa	500 μm ± 25 μm	500 μm ± 25 μm
Wafer Orientation	Ọkwa Z / D	Na axis: <0001> ± 0.5°	Na axis: <0001> ± 0.5°
Njupụta Micropipe	Z ọkwa	≤ 1 cm²	≤ 1 cm²
Njupụta Micropipe	D ọkwa	≤ 15 cm²	≤ 15 cm²
Resistivity	Z ọkwa	≥ 1E10 Ω·cm	≥ 1E10 Ω·cm
Resistivity	D ọkwa	≥ 1E5 Ω·cm	≥ 1E5 Ω·cm

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Atụmatụ

Okwu mmalite: Ọrụ HPSI SiC Wafers na AI/AR Glass

HPSI (High-Purity Semi-Insulating) Silicon Carbide wafers bụ wafers pụrụ iche nke ejiri elu resistivity (> 10⁹ Ω·cm) na njupụta ntụpọ dị oke ala. N'ime ugogbe anya AI / AR, ha na-arụ ọrụ dị ka isi ihe dị mkpa maka anya anya anya anya waveguide dị iche iche, na-ekwu okwu karama jikọtara ya na ngwa ngwa anya ọdịnala n'ihe gbasara ụdị dị mkpa na ọkụ, mgbasa ọkụ, na arụmọrụ anya. Dịka ọmụmaatụ, enyo AR na-eji oghere SiC waveguide lensị anya nwere ike nweta nnukwu nlele anya (FOV) nke 70 ° – 80 Celsius, ebe ọ na-ebelata ọkpụrụkpụ nke otu oghere oghere ka ọ bụrụ naanị 0.55mm na ịdị arọ naanị 2.7g, na-abawanye nke ukwuu iyi nkasi obi na imikpu anya.

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Àgwà ndị dị mkpa: ka SiC ihe onwunwe na-enye ike imewe iko AI/AR

Index refractive dị elu na njikarịcha arụmọrụ anya

Ntụgharị ntụgharị nke SiC (2.6–2.7) fọrọ nke nta ka ọ bụrụ 50% dị elu karịa nke iko ọdịnala (1.8–2.0). Nke a na-enye ohere maka ihe dị gịrịgịrị ma na-arụ ọrụ nke ọma na-efegharị efegharị, na-agbasawanye FOV nke ukwuu. Ndekọ ntụgharị uche dị elu na-enyekwara aka ebelata “mmetụta egwurugwu” nke a na-ahụkarị na ebili mmiri dị iche iche, na-eme ka ịdị ọcha onyonyo dịkwuo mma.

Ike njikwa okpomọkụ pụrụiche

Site na ikuku ọkụ dị elu dị ka 490 W / m · K (nke dị nso na ọla kọpa), SiC nwere ike ịgbasa ọkụ ngwa ngwa site na modul ngosi Micro-LED. Nke a na-egbochi mmebi arụmọrụ ma ọ bụ ịka nká ngwaọrụ n'ihi oke okpomọkụ, na-eme ka ndụ batrị dị ogologo na nkwụsi ike dị elu.

Ike Mechanical na Ogologo Ogologo

SiC nwere ike Mohs nke 9.5 (nke abụọ bụ naanị diamond), na-enye nkwụsi ike na-enweghị atụ, na-eme ka ọ dị mma maka enyo ndị ahịa a na-ejikarị. Enwere ike ịchịkwa ịdị nro elu ya na Ra <0.5 nm, na-eme ka ọ dị obere na-ebufe ọkụ na-agbanwe agbanwe na ụzọ ụgbọ mmiri.

Ndakọrịta Ngwongwo Eletriki

Ihe mgbochi HPSI SiC (> 10⁹ Ω·cm) na-enyere aka igbochi ndabichi mgbaàmà. Ọ nwekwara ike ije ozi dị ka ihe ngwaọrụ ike na-arụ ọrụ nke ọma, na-ebuli modul njikwa ike na iko AR.

Ntuziaka ngwa mbụ

Ngwa ngwa anya isi maka AI/AR Glasss

Diffractive Waveguide lenses: A na-eji mkpụrụ osisi SiC mepụta ntuziaka ebili mmiri dị nro na-akwado nnukwu FOV na mkpochapụ mmetụta egwurugwu.
Mpempe windo na prisms: Site na ịkpụ na polishing ahaziri, enwere ike ịhazi SiC ka ọ bụrụ windo nchebe ma ọ bụ prisms anya maka iko AR, na-eme ka nnyefe ọkụ na-eyi nguzogide.

Ngwa agbakwunyere na mpaghara ndị ọzọ

Eletrọnịkị ike: A na-eji ya n'ọnọdụ dị elu, ike dị elu dị ka ihe ngbanwe ụgbọ ala ọhụrụ na njikwa moto ụlọ ọrụ mmepụta ihe.
Quantum Optics: Ọ na-arụ ọrụ dị ka onye ọbịa maka ebe agba agba, ejiri mee ihe maka nkwukọrịta quantum na ngwaọrụ nghọta.

4 inch & 6 inch HPSI SiC nkọwa nkọwa nkọwa

Oke	Ọkwa	Ngwakọta 4-inch	Ngwakọta 6-inch
Dayameta	Ọkwa Z / D	99.5 mm - 100.0 mm	149.5 mm - 150.0 mm
Ụdị poly	Ọkwa Z / D	4H	4H
Ọkpụrụkpụ	Z ọkwa	500 μm ± 15 μm	500 μm ± 15 μm
Ọkpụrụkpụ	D ọkwa	500 μm ± 25 μm	500 μm ± 25 μm
Wafer Orientation	Ọkwa Z / D	Na axis: <0001> ± 0.5°	Na axis: <0001> ± 0.5°
Njupụta Micropipe	Z ọkwa	≤ 1 cm²	≤ 1 cm²
Njupụta Micropipe	D ọkwa	≤ 15 cm²	≤ 15 cm²
Resistivity	Z ọkwa	≥ 1E10 Ω·cm	≥ 1E10 Ω·cm
Resistivity	D ọkwa	≥ 1E5 Ω·cm	≥ 1E5 Ω·cm
Usoro nhazi nke isi	Ọkwa Z / D	(10-10) ± 5.0°	(10-10) ± 5.0°
Ogologo Flat nke izizi	Ọkwa Z / D	32.5 mm ± 2.0 mm	Ọkwa
Ogologo Flat nke abụọ	Ọkwa Z / D	18.0 mm ± 2.0 mm	-
Mwepu nke Edge	Ọkwa Z / D	3 mm	3 mm
LTV / TTV / Ụta / Warp	Z ọkwa	≤ 2.5 μm / ≤ 5 μm / ≤ 15 μm / ≤ 30 μm	≤ 2.5 μm / ≤ 6 μm / ≤ 25 μm / ≤ 35 μm
LTV / TTV / Ụta / Warp	D ọkwa	≤ 10 μm / ≤ 15 μm / ≤ 25 μm / ≤ 40 μm	≤ 5 μm / ≤ 15 μm / ≤ 40 μm / ≤ 80 μm
Ịdị nro	Z ọkwa	Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm	Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm
Ịdị nro	D ọkwa	Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm	Polish Ra ≤ 1 nm / CMP Ra ≤ 0.5 nm
Edge cracks	D ọkwa	Mpaghara mkpokọta ≤ 0.1%	Ogologo ngụkọta ≤ 20 mm, otu ≤ 2 mm
Mpaghara Polytype	D ọkwa	Mpaghara mkpokọta ≤ 0.3%	Mpaghara mkpokọta ≤ 3%
Ntinye Carbon Anya Anya	Z ọkwa	Mpaghara mkpokọta ≤ 0.05%	Mpaghara mkpokọta ≤ 0.05%
Ntinye Carbon Anya Anya	D ọkwa	Mpaghara mkpokọta ≤ 0.3%	Mpaghara mkpokọta ≤ 3%
Silicon Surface Scratches	D ọkwa	5 kwere, nke ọ bụla ≤1mm	Ogologo ngụkọta ≤ 1 x dayameta
Ụdị Chips	Z ọkwa	Enweghị ikike (obosara na omimi ≥0.2mm)	Enweghị ikike (obosara na omimi ≥0.2mm)
Ụdị Chips	D ọkwa	7 kwere, nke ọ bụla ≤1mm	7 kwere, nke ọ bụla ≤1mm
Threading Screw Dislocation	Z ọkwa	-	≤500 cm²
Nkwakọ ngwaahịa	Ọkwa Z / D	Cassette Multi-wafer ma ọ bụ otu akpa wafer	Cassette Multi-wafer ma ọ bụ otu akpa wafer

Ọrụ XKH: Nrụpụta agbakwunyere na ikike ịhazi ya

Ụlọ ọrụ XKH nwere ikike ntinye kwụ ọtọ site na akụrụngwa ruo na wafers agwụla, na-ekpuchi usoro mkpụrụ osisi SiC niile, slicing, polishing, na nhazi omenala. Isi uru ọrụ gụnyere:

Ihe dị iche iche:Anyị nwere ike ịnye ụdị wafer dị iche iche dị ka ụdị 4H-N, ụdị 4H-HPSI, ụdị 4H / 6H-P, na ụdị 3C-N. Enwere ike ịhazigharị nkwụghachi azụ, ọkpụrụkpụ, na nghazi dịka ihe achọrọ.
nkeNhazi nha na-agbanwe agbanwe:Anyị na-akwado nhazi wafer site na dayameta 2-inch ruo 12-inch, ma nwekwara ike hazie ihe owuwu pụrụ iche dị ka iberibe square (dịka ọmụmaatụ, 5x5mm, 10x10mm) na prisms oge niile.
Njikwa ngwa anya-ọkwa nkenke:Enwere ike idowe Wafer Total Thickness Variation (TTV) na <1μm, yana ịdị nro n'elu na Ra <0.3 nm, na-ezute ihe achọrọ larịị larịị nano maka ngwaọrụ waveguide.
Nzaghachi ahịa ngwa ngwa:Ụdị azụmahịa agbakwunyere na-eme ka mgbanwe dị mma site na R&D gaa na mmepụta nke ukwuu, na-akwado ihe niile site na nkwenye obere-ogbe gaa na mbupu nnukwu ibu (oge ụzọ na-abụkarị ụbọchị 15-40).

FAQ nke HPSI SiC Wafer

Q1: Gini mere HPSI SiC ji ewere ya dika ihe kacha mma maka lenses waveguide AR?
A1: Ndekọ ntugharị ya dị elu (2.6–2.7) na-eme ka ọ dị gịrịgịrị, na-arụ ọrụ nke ọma na-arụ ọrụ ebili mmiri na-akwado nnukwu nlele anya (dịka, 70°-80°) ka ọ na-ewepụ “mmetụta egwurugwu”.
Q2: Kedu ka HPSI SiC si eme ka njikwa okpomọkụ dị na enyo AI / AR?
A2: Site na ikuku okpomọkụ ruo 490 W / m · K (nso na ọla kọpa), ọ na-arụ ọrụ nke ọma na-ekpochapụ okpomọkụ site na ihe ndị dị ka Micro-LED, na-eme ka arụmọrụ kwụsie ike na ogologo ndụ ngwaọrụ.
Q3: Kedu uru ịdịte aka ka HPSI SiC na-enye maka enyo a na-eyi?
A3: Ike ya pụrụ iche (Mohs 9.5) na-enye nguzogide ọkọchị dị elu, na-eme ka ọ dịgidere nke ukwuu maka ojiji kwa ụbọchị na iko AR nke ndị ahịa.