Igwe abụọ nke ebe a na-arụ ọrụ n'akụkụ abụọ nke ígwè silicon monocrystalline. Nhazi mkpanaka silicon monocrystalline 6/8/12 inch dị larịị. Ra≤0.5μm
Njirimara akụrụngwa:
(1) Nhazi nhazi nke ọdụ abụọ
· Arụmọrụ okpukpu abụọ: Nhazi nke mkpanaka silicon abụọ (Ø6"-12") n'otu oge na-eme ka mmepụta ihe dịkwuo elu site na 40%-60% megide ngwaọrụ Simplex.
· Njikwa nọọrọ onwe ya: Ọdụ ọ bụla nwere ike ịgbanwe paramita ịkpụ (nrụgide, ọsọ nri) n'onwe ya iji mee ka ọ dabara na nkọwapụta mkpanaka silicon dị iche iche.
(2) Mkpụcha dị elu nke ọma
· Izi ezi nha: ndidi nke akụkụ akụkụ mmanya square ±0.15mm, oke ≤0.20mm.
· Ọdịdị elu: mmebi nke akụkụ dị n'akụkụ <0.5mm, belata ọnụọgụ nke ịchacha ihe na-esote.
(3) Njikwa ọgụgụ isi
· Ịcha ihe na-agbanwe agbanwe: nlekota oge nke usoro mkpanaka silicon, mgbanwe mgbanwe nke ụzọ ịkpụ (dịka nhazi mkpanaka silicon bent).
· Nchọta data: dekọọ paramita nhazi nke mkpanaka silicon ọ bụla iji kwado nkwụnye sistemụ MES.
(4) Ọnụ ego oriri dị ala
· Oriri waya dayamọnd: ≤0.06m/mm (ogologo mkpanaka silikọn), dayameta waya ≤0.30mm.
· Mgbasa mmiri oyi: Sistemụ nzacha na-agbatị ndụ ọrụ ma na-ebelata mkpofu mmiri mkpofu.
Uru teknụzụ na mmepe:
(1) Ịchacha teknụzụ kachasị mma
- Ịcha ọtụtụ ahịrị: A na-eji ahịrị dayamọnd 100-200 n'otu oge, ọsọ ịcha ya bụ ≥40mm/min.
- Njikwa nrụgide: Sistemụ nhazi akaụnt mechiri emechi (±1N) iji belata ihe egwu nke mgbawa waya.
(2) Mgbakwunye ndakọrịta
- Nhazi ihe eji eme ihe: Kwado silicon monocrystalline ụdị P/N, nke dakọtara na TOPCon, HJT na mkpanaka silicon batrị ndị ọzọ dị elu.
- Nha na-agbanwe agbanwe: ogologo mkpanaka silicon 100-950mm, anya akụkụ mkpanaka square 166-233mm nwere ike ịgbanwe.
(3) Mmelite akpaaka
- Ibu na nbudata robot: ibu/ibudata mkpara silicon ozugbo, tie ≤ nkeji 3.
- Nchọpụta ọgụgụ isi: Mmezi amụma iji belata oge ezumike na-enweghị atụmatụ.
(4) Ọchịchị ụlọ ọrụ mmepụta ihe
- Nkwado Wafer: enwere ike iji mkpanaka square mee ihe dịka silicon ≥100μm nke dị gịrịgịrị, ọnụego nkewa <0.5%.
- Nhazi oriri ike: A na-ebelata oriri ike kwa otu nke mkpanaka silicon site na 30% (ma e jiri ya tụnyere akụrụngwa ọdịnala).
Teknụzụ paramita:
| Aha nke paramita | Uru ndeksi |
| Ọnụọgụ nke ogwe ndị a haziri | Ibe abụọ/setịpụ |
| Nhazi ogologo ogwe ogologo | 100~950mm |
| Oke oke igwe | 166~233mm |
| Ọsọ mbelata | ≥40mm/min |
| Ọsọ waya dayamọnd | 0~35m/s |
| Dayamọnd | 0.30 mm ma ọ bụ ihe na-erughị ya |
| Oriri kwụ ọtọ | 0.06 m/mm ma ọ bụ ihe na-erughị ya |
| Dayameta mkpanaka gburugburu dakọtara | Dayameta mkpanaka square emechara + 2mm, Hụ na ọnụego ngafe polishing na-adị mma |
| Njikwa mmebi akụkụ dị mkpụmkpụ | Ọnụ dị larịị ≤0.5mm, Enweghị mgbawa, ịdị elu dị elu |
| Nha nhata nke ogologo arc | Oke ntule <1.5mm, Ewezuga ntụgharị mkpanaka silicon |
| Akụkụ igwe (otu igwe) | 4800 × 3020 × 3660mm |
| Mkpokọta ike enyere ọkwa | 56kW |
| Ibu arọ nke akụrụngwa | 12t |
Tebụl index ziri ezi nke igwe:
| Ihe nkenke | Oke ndidi |
| Nnwere onwe oke ogwe akụkụ anọ | ±0.15mm |
| Oke nsọtụ ogwe aka anọ | ≤0.20mm |
| Akụkụ n'akụkụ niile nke mkpanaka square | 90°±0.05° |
| Ịdị larịị nke mkpanaka square | ≤0.15mm |
| Izi ezi ọnọdụ nke robot ugboro ugboro | ±0.05mm |
Ọrụ XKH:
XKH na-enye ọrụ zuru oke maka igwe mono-crystalline silicon dual-station, gụnyere nhazi akụrụngwa (dakọtara na nnukwu mkpanaka silicon), ọrụ nhazi (nhazi paramita ịkpụ), ọzụzụ ọrụ na nkwado mgbe erechara ahịa (inye akụkụ dị mkpa, nchọpụta anya), na-ahụ na ndị ahịa nwetara nnukwu mmepụta (>99%) na obere ọnụ ahịa oriri, yana inye nkwalite teknụzụ (dịka nhazi ịkpụ AI). Oge nnyefe bụ ọnwa 2-4.
Ihe osise zuru ezu









