4H-N/6H-N SiC Wafer Mmepụta nyocha ọzọ Dummy grade Dia150mm Silicon carbide substrate

4H-N/6H-N SiC Wafer Mmepụta Reasearch Dummy grade Dia150mm Silicon carbide substrate Featured Image

Nkọwa Dị Mkpirikpi:

Anyị nwere ike inye ihe nkiri dị gịrịgịrị nke na-eduzi okpomọkụ dị elu, ihe nkiri dị gịrịgịrị nke na-eme ka ọ dị ike ma na-eme ka ọ dị ike ma na-arụ ọrụ dị ka ihe nkiri ferroelectric, kristal semiconductor, kristal optical, ihe kristal laser, n'otu oge ahụ na-enye ntụziaka, ịkpụ kristal, ịkpụcha, ịchacha ya, na ọrụ nhazi ndị ọzọ. Ihe ndị SiC anyị sitere na Tankeblue Factory na China.

Zitere anyị ozi-e

atụmatụ

Nkọwapụta ihe mejupụtara silicon carbide (SiC) nke dị sentimita 6 n'obosara

Ọkwa	Enweghị MPD	Mmepụta	Ọkwa Nnyocha	Akara Dọmị
Dayameta	150.0mm±0.25mm
Ọkpụrụkpụ	4H-N	350um±25um
	4H-SI	500um±25um
Nhazi Wafer	N'akụkụ: <0001>±0.5°maka 4H-SI Axis gbapụrụ: 4.0° gaa <1120>±0.5° maka 4H-N
Ụlọ Elu Mbụ	{10-10}±5.0°
Ogologo Dị larịị nke Mbụ	47.5mm±2.5mm
Mwepu akụkụ	3mm
TTV/Bọọlụ/Mkpụgharị	≤15um/≤40um/≤60um
Njupụta nke paịpụ micropipe	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Nguzogide 4H-N 4H-SI	0.015~0.028Ω!cm
	≥1E5Ω!cm
Isi ike	Ra Polish ≤1nm CMP Ra≤0.5nm
# Mgbawa site na nnukwu ọkụ	Ọ dịghị		1 ekwere, ≤2mm	Ogologo mkpokọta ≤10mm, otu ogologo ≤2mm
*Efere Hex site na ìhè dị elu	Mpaghara mkpokọta ≤1%		Mpaghara mkpokọta ≤ 2%	Mpaghara mkpokọta ≤ 5%
*Ebe polytype site na ìhè dị elu	Ọ dịghị		Mpaghara mkpokọta ≤ 2%	Mpaghara mkpokọta ≤ 5%
*&Ọkpụkpụ site na nnukwu ọkụ	Mkpọka atọ ruo 1 x ogologo mkpokọta nke dayameta wafer		Mkpọcha ise ruo 1 x ogologo mkpokọta dayameta wafer	Mkpọcha 5 ruo 1 x dayameta wafer ogologo mkpokọta
Mkpọchi akụkụ	Ọ dịghị		A na-ekwe ka 3, ≤0.5mm nke ọ bụla	5 ekwere, ≤1mm nke ọ bụla
Mmetọ site na ìhè dị elu	Ọ dịghị

Ọrụ Ahịa na Ndị Ahịa

Ịzụta Ihe

Ngalaba na-azụta ihe dị iche iche bụ ọrụ ha ịchịkọta ihe niile dị mkpa iji mepụta ngwaahịa gị. A na-enweta ike ịchọta ngwaahịa na ihe niile, gụnyere nyocha kemịkalụ na nke anụ ahụ mgbe niile.

Ogo

N'oge na mgbe emechara ma ọ bụ rụchaa ngwaahịa gị, ngalaba njikwa mma na-etinye aka n'ịhụ na ihe niile na-anabata ma ọ bụ gafere nkọwapụta gị.

Ọrụ

Anyị ji obi anyị niile na-enwe ndị ọrụ injinia ire ere nwere ahụmịhe karịrị afọ ise na ụlọ ọrụ semiconductor. A zụrụ ha ịza ajụjụ teknụzụ yana inye ọnụahịa n'oge kwesịrị ekwesị maka mkpa gị.

Anyị nọnyeere gị n'oge ọ bụla ị nwere nsogbu, anyị ga-edozikwa ya n'ime awa 10.