Usoro TVG na quartz sapphire BF33 wafer Glass wafer ịkụ ọkpọ

Uru nke TGV(Site na Glass Via) na-egosipụta nke ọma na:

1) Magburu onwe elu ugboro eletriki àgwà. Ihe iko bụ ihe insulator, dielectric mgbe niile bụ ihe dị ka 1/3 nke ihe silicon, ihe na-efunahụ bụ 2-3 iwu nke ịdị ukwuu karịa ihe silicon, na-eme ka mfu mkpụrụ na mmetụta parasitic belata nke ukwuu iji hụ na iguzosi ike n'ezi ihe nke mgbaàmà ebutere;

(2) Nnukwu nha na mkpụrụ iko iko dị oke mkpa dị mfe ịnweta. Anyị nwere ike na-enye Sapphire, Quartz, Corning, na SCHOTT na ndị ọzọ iko na-emepụta nwere ike inye ultra-nnukwu size (> 2m × 2m) na ultra-thin (<50µm) panel iko na ultra-mkpa mgbanwe iko ihe.

3) Ọnụ ala. Uru site na mfe ịnweta nnukwu iko panel nke ultra-thin, na ọ dịghị achọ ntinye nke mkpuchi mkpuchi, ọnụahịa mmepụta nke ihe nkwụnye iko bụ naanị ihe dịka 1/8 nke ihe nkwụnye ihe nkwụnye silicon;

4) Usoro dị mfe. Ọ dịghị mkpa itinye ihe mkpuchi mkpuchi n'elu ala na mgbidi dị n'ime TGV (site na Glass Via), ọ dịghịkwa mkpa ọ dị mkpa n'ime efere nkwụnye ihe na-egbuke egbuke;

(5) Nkwụsi ike n'ibu. Ọbụlagodi mgbe ọkpụrụkpụ nke ihe nkwụnye ihe na-erughị 100µm, warpage ka dị obere;

6) Nnukwu ngwa ngwa. Na mgbakwunye na atụmanya dị mma nke ngwa n'ọhịa nke ugboro ugboro, dị ka ihe na-emepụta ihe, a pụkwara iji ya mee ihe n'ọhịa nke optoelectronic system integration, airtightness na corrosion resistance uru na-eme ka iko iko na ubi nke MEMS encapsulation nwere nnukwu ikike.

Ka ọ dị ugbu a, ụlọ ọrụ anyị na-enye TGV (Site Glass Via) iko site na teknụzụ oghere, nwere ike ịhazi nhazi nke ihe ndị na-abata ma nye ngwaahịa ahụ ozugbo. Anyị nwere ike inye Sapphire, Quartz, Corning, na SCHOTT, BF33 na iko ndị ọzọ. Ọ bụrụ na ị nwere mkpa, ị nwere ike ịkpọtụrụ anyị ozugbo n'oge ọ bụla! Nnọọ ajụjụ!