TGV Glass na-agbanye 12inch wafer Glass ịkụ ọkpọ

Nkọwa dị mkpirikpi:

Mkpụrụ iko iko nwere elu dị nro karịa nke rọba, ọnụ ọgụgụ nke vias dị ukwuu n'otu mpaghara karịa ihe ndị na-emepụta ihe. A na-ekwu na oghere dị n'etiti oghere na oghere iko nwere ike ịbụ ihe na-erughị 100 microns, nke na-eme ka njupụta nke njikọ dị n'etiti wafers na-abawanye site na ihe dị ka 10. Ịba ụba nke njikọ njikọ nwere ike ịnweta ọnụ ọgụgụ dị ukwuu nke transistors, na-enye ohere maka mgbagwoju anya. atụmatụ na iji ohere rụọ ọrụ nke ọma karị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Igwe iko iko na-arụ ọrụ nke ọma n'ihe gbasara akụrụngwa ọkụ, nkwụsi ike nke anụ ahụ, ma na-enwekwa ọkụ na-eguzogide ma na-adịkarị mfe ịlụ ọgụ ma ọ bụ nrụrụ nsogbu n'ihi oke okpomọkụ;

Tụkwasị na nke ahụ, ihe eletrik pụrụ iche nke isi iko na-enye ohere maka mfu dielectric dị ala, na-ekwe ka mgbaàmà doro anya na nnyefe ike. N'ihi ya, ike na-efunahụ n'oge nnyefe mgbaàmà na-ebelata na mkpokọta arụmọrụ nke mgbawa bụ ndammana akwalite. Enwere ike ibelata ọkpụrụkpụ nke mkpụrụ isi iko ihe dị ka ọkara ma e jiri ya tụnyere plastik ABF, na mkparị ahụ na-eme ka ọsọ mgbasa ozi na arụmọrụ ike dịkwuo mma.

Teknụzụ na-emepụta oghere nke TGV:

A na-eji usoro etching laser na-akpali akpali iji mee ka mpaghara denaturation na-aga n'ihu site na laser pulsed, wee tinye iko laser ahụ n'ime ngwọta hydrofluoric acid maka etching. Ọnụego etching nke enyo mpaghara denaturation na hydrofluoric acid na-adị ngwa karịa nke iko a na-emeghị nke ọma na-etolite site na oghere.

TGV jupụtara:

Nke mbụ, a na-eme oghere TGV kpuru ìsì. Nke abuo, a na-edobere oyi akwa mkpụrụ n'ime oghere TGV kpuru site na ntinye ikuku anụ ahụ (PVD). Nke atọ, ala-elu electroplating na-enweta enweghị nkebi ndochi nke TGV; N'ikpeazụ, site na nwa oge bonding, azụ egweri, kemịkalụ n'ibu polishing (CMP) ọla kọpa ikpughe, unbonding, akpụ a TGV metal jupụtara efere mbufe.