Silicon Carbide (SiC) Otu-Kristal Substrate – Wafer 10×10mm
Ihe osise zuru ezu nke wafer silicon carbide (SiC) substrate
Nkọwa nke wafer silicon carbide (SiC) substrate
IheWafer silicon carbide (SiC) nke nwere otu kristal 10 × 10mmbụ ihe semiconductor dị elu nke e mere maka ngwa eletrọniki ike ọgbọ na-abịa na ngwa optoelectronic. Site na njikwa okpomọkụ pụrụ iche, bandgap sara mbara, na nkwụsi ike kemịkalụ dị mma, wafer substrate Silicon Carbide (SiC) na-enye ntọala maka ngwaọrụ ndị na-arụ ọrụ nke ọma n'okpuru ọnọdụ okpomọkụ dị elu, ugboro ugboro dị elu, na ọnọdụ voltaji dị elu. A na-akpụzi ihe ndị a nke ọma.10 × 10mm square ibe, nke dị mma maka nyocha, nhazi ihe atụ, na imepụta ngwaọrụ.
Ụkpụrụ Mmepụta nke wafer silicon carbide (SiC) substrate
A na-eji usoro Physical Vapor Transport (PVT) ma ọ bụ usoro uto sublimation emepụta wafer silicon Carbide (SiC). Usoro a na-amalite site na ntụ SiC dị ọcha nke a na-etinye n'ime graphite crucible. N'okpuru oke okpomọkụ karịrị 2,000°C na gburugburu ebe a na-achịkwa, ntụ ahụ na-abanye n'ime uzuoku ma na-etinyeghachi na kristal mkpụrụ nke a na-elezi anya nke ọma, na-emepụta nnukwu ingot kristal nke nwere ntụpọ.
Ozugbo a kụrụ SiC boule, ọ na-eme:
- Ịcha Ingot: Ịcha waya diamond a na-eji aka ehicha SiC ingot ka ọ bụrụ wafers ma ọ bụ chips.
- Ịcha na Ịgweri: A na-eme ka elu ya dị larịị iji wepụ akara osisi e ji akwọ osisi ma nweta ọkpụrụkpụ otu.
- Nchacha Kemịkal Mechanical (CMP): Na-eme ka enyo dị mma nke ukwuu ma nwee oke iru ala.
- Ntinye ọgwụ mgbochi nhọrọ: Enwere ike itinye nitrogen, aluminom, ma ọ bụ boron doping iji hazie njirimara eletriki (ụdị n ma ọ bụ ụdị p).
- Nnyocha ịdị mma: Usoro nyocha dị elu na-eme ka o doo anya na wafer dị larịị, ịdị nhata ọkpụrụkpụ, na njupụta ntụpọ na-emezu ihe achọrọ maka ọkwa semiconductor siri ike.
Usoro a nke nwere ọtụtụ nzọụkwụ na-eme ka e nwee iberibe wafer siri ike nke 10×10mm Silicon Carbide (SiC) nke dị njikere maka uto epitaxial ma ọ bụ imepụta ngwaọrụ ozugbo.
Àgwà Ihe nke Silicon Carbide (SiC) substrate wafer
A na-ejikarị ihe e ji silicon carbide (SiC) mee wafer substrate.4H-SiC or 6H-SiCụdịdị dị iche iche:
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4H-SiC:Nwere ike ibugharị elektrọn dị elu, nke na-eme ka ọ dị mma maka ngwaọrụ ike dịka MOSFETs na Schottky diodes.
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6H-SiC:Na-enye ihe pụrụ iche maka akụkụ RF na optoelectronic.
Isi ihe dị mkpa nke wafer silicon carbide (SiC) substrate:
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Oghere sara mbara:~3.26 eV (4H-SiC) – na-eme ka voltaji mgbawa dị elu na obere mfu mgbanwe.
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Ọkwa okpomọkụ:3–4.9 W/cm·K – na-ewepụ okpomọkụ nke ọma, na-eme ka ọ kwụsie ike na sistemụ ike dị elu.
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Ike:~9.2 na nha Mohs - na-eme ka igwe sie ike n'oge nhazi na ọrụ ngwaọrụ.
Ngwa nke wafer silicon carbide (SiC) substrate
Njupụta nke wafer silicon carbide (SiC) dị iche iche na-eme ka ha baa uru n'ọtụtụ ụlọ ọrụ:
Elektrọniki Ike: Ntọala maka MOSFETs, IGBTs, na Schottky diodes eji eme ihe n'ụgbọala eletrik (EVs), ihe ndị na-enye ike ụlọ ọrụ mmepụta ihe, na ihe ndị na-agbanwe ike mmeghari ohuru.
Ngwaọrụ RF na Ngwa Ngwa Ngwa: Na-akwado transistors, amplifiers, na ihe ndị dị na radar maka 5G, satịlaịtị, na ngwa nchekwa.
Optoelectronics: A na-eji ya na UV LEDs, photodetectors, na laser diode ebe oke UV na nkwụsi ike dị oke mkpa.
Ụgbọelu na Nchedo: Ihe a pụrụ ịtụkwasị obi maka ngwa eletrọniki nwere okpomọkụ dị elu ma sie ike site na radieshon.
Ụlọ Ọrụ Nnyocha na Mahadum: Ọ dị mma maka ọmụmụ ihe gbasara sayensị ihe onwunwe, imepụta ngwaọrụ ihe atụ, na ịnwale usoro epitaxial ọhụrụ.

Nkọwapụta maka ibe wafer silicon carbide (SiC) substrate
| Akụ na ụba | Uru |
|---|---|
| Nha | 10mm × 10mm square |
| Ọkpụrụkpụ | 330–500 μm (enwere ike ịhazi ya) |
| Ụdị Polytype | 4H-SiC ma ọ bụ 6H-SiC |
| Nhazi | C-plane, anọghị n'ahịrị (0°/4°) |
| Mmecha Elu | A na-egbutu otu akụkụ ma ọ bụ akụkụ abụọ; dị njikere maka epi-dị njikere |
| Nhọrọ Doping | Ụdị N ma ọ bụ ụdị P |
| Ọkwa | Ọkwa nyocha ma ọ bụ ọkwa ngwaọrụ |
Ajụjụ Ndị A Na-ajụkarị Banyere Wafer Silicon Carbide (SiC)
Q1: Gịnị mere wafer silicon Carbide (SiC) ji dị mma karịa wafer silicon ọdịnala?
SiC na-enye ike ubi mgbawa dị elu nke 10 ×, iguzogide okpomọkụ dị elu, na mbelata mfu mgbanwe, na-eme ka ọ dị mma maka ngwaọrụ dị elu na ike dị elu nke silicon enweghị ike ịkwado.
Q2: Enwere ike inye akwa epitaxial nke nwere wafer silicon carbide (SiC) nke 10 × 10mm?
Ee. Anyị na-enye ihe ndị e ji eme ihe dị ka ihe ...
Q3: Enwere nha omenala na ọkwa doping?
N'ezie. Ọ bụ ezie na ibe 10×10mm bụ ọkọlọtọ maka nyocha na nnwale ngwaọrụ, akụkụ ahaziri ahazi, ọkpụrụkpụ, na profaịlụ doping dị mgbe a rịọrọ ya.
Q4: Kedụ ka wafer ndị a siri sie ike n'ebe dị oke njọ?
SiC na-ejigide iguzosi ike n'ezi ihe na arụmọrụ eletriki karịa 600°C na n'okpuru radieshon dị elu, na-eme ka ọ dị mma maka ngwa eletrọniki ikuku na nke ndị agha.
Gbasara anyị
XKH bụ ọkachamara n'ihe gbasara mmepe teknụzụ dị elu, mmepụta, na ire nke iko anya pụrụ iche na ihe kristal ọhụrụ. Ngwaahịa anyị na-enye ngwa eletrọnịkị anya, ngwa eletrọnịkị ndị ahịa, na ndị agha. Anyị na-enye ihe ndị mejupụtara anya Sapphire, mkpuchi anya ekwentị mkpanaaka, seramiiki, LT, Silicon Carbide SIC, Quartz, na wafers kristal semiconductor. Site na ahụmịhe nwere nkà na ngwa ọgbara ọhụrụ, anyị na-eme nke ọma na nhazi ngwaahịa na-abụghị ọkọlọtọ, na-achọ ịbụ ụlọ ọrụ teknụzụ dị elu nke ihe optoelectronic.












