Ihe mkpuchi seramiiki silicon carbide nke na-enye ihe mkpuchi okpomọkụ dị elu nhazi omenala
Isi atụmatụ:
1. Traị seramiiki silicon carbide
- Ike siri ike na nguzogide iyi: ike siri ike dị nso na diamond, ọ nwekwara ike iguzogide iyi igwe na nhazi wafer ruo ogologo oge.
- Oke ike okpomọkụ na obere oke mgbasawanye okpomọkụ: mwepụ okpomọkụ ngwa ngwa na nkwụsi ike nha, na-ezere mgbanwe nke nrụgide okpomọkụ kpatara.
- Ọdịdị dị larịị na njedebe elu: Ọdịdị dị larịị nke elu ahụ ruru ọkwa micron, na-eme ka njikọ zuru oke n'etiti wafer na diski ahụ, na-ebelata mmetọ na mmebi.
Nkwụsi ike kemịkalụ: Nguzogide siri ike nke nchara, nke dabara adaba maka nhicha mmiri na usoro ịkpụcha ihe na mmepụta semiconductor.
2. Tube seramiiki silicon carbide
- Nguzogide okpomọkụ dị elu: Ọ nwere ike ịrụ ọrụ na gburugburu okpomọkụ dị elu karịa 1600°C ruo ogologo oge, dabara adaba maka usoro okpomọkụ dị elu nke semiconductor.
Ezigbo nguzogide nchara: na-eguzogide asịd, alkalis na ọtụtụ ihe mgbaze kemịkalụ dị iche iche, dabara adaba maka gburugburu usoro siri ike.
- Ike siri ike na nguzogide iyi dị elu: iguzogide mbuze na nbibi igwe, gbasaa ndụ ọrụ.
- Oke ike okpomọkụ na obere oke nke mgbasawanye okpomọkụ: mbugharị ngwa ngwa nke okpomọkụ na nkwụsi ike nha, na-ebelata mgbanwe ma ọ bụ mgbawa nke nrụgide okpomọkụ kpatara.
Ngwaahịa Paramita:
Paramita seramiiki silicon carbide:
| (Ihe onwunwe) | (Nkeji) | (ssic) | |
| (Ọdịnaya SiC) | (Wt)% | >99 | |
| (Nha ọka nkezi) | maịkrọn | 4-10 | |
| (Njupụta) | kg/dm3 | >3.14 | |
| (O doro anya na porosity) | Vo1% | <0.5 | |
| (Isi ike nke Vickers) | HV 0.5 | GPA | 28 |
| *() Ike flexural* (isi atọ) | 20ºC | MPa | 450 |
| (Ike mkpakọ) | 20ºC | MPa | 3900 |
| (Modulu Elastic) | 20ºC | GPA | 420 |
| (Ike nke mgbawa) | MPa/m'% | 3.5 | |
| (Ọnọdụ okpomọkụ) | 20°C | W/(m*K) | 160 |
| (Nguzogide) | 20°C | Ohm.cm | 106-108 |
(Ọnọdụ mgbasawanye okpomọkụ) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Okpomọkụ kachasị arụ ọrụ) | oºC | 1700 | |
Paramita nke silikọn carbide seramiiki tube:
| ihe | Ndepụta Ndekọ |
| α-SIC | Nkeji 99% |
| Porosity A Na-ahụ Anya | 16% kachasị |
| Njupụta buru ibu | 2.7g/cm3 nkeji |
| Ike ịgbagọ na okpomọkụ dị elu | 100 Mpa min |
| Ọnụọgụ nke Mgbasawanye Okpomọkụ | K-1 4.7x10 -6 |
| Ọnụọgụ nke Ọkụ Conductivity (1400ºC) | 24 W/mk |
| Oke okpomọkụ ọrụ | 1650ºC |
Ngwa ndị bụ isi:
1. Efere seramiiki silicon carbide
- Ịcha na ịchacha Wafer: na-eje ozi dị ka ikpo okwu na-ebu ibu iji hụ na e nwere ezigbo nkenke na nkwụsi ike n'oge ịcha na ịchacha.
- Usoro Lithography: A na-etinye wafer ahụ n'ime igwe lithography iji hụ na e tinyere ya nke ọma n'oge a na-ekpughe ya.
- Nchacha Mechanical Polishing (CMP): na-arụ ọrụ dị ka ikpo okwu nkwado maka paadị polishing, na-enye otu nrụgide na nkesa okpomọkụ.
2. Tube seramiiki silicon carbide
- Tube ọkụ dị elu: eji ya maka akụrụngwa okpomọkụ dị elu dịka ọkụ mgbasa ozi na ọkụ oxidation iji buru wafers maka ọgwụgwọ usoro okpomọkụ dị elu.
- Usoro CVD/PVD: Dịka ọkpọkọ na-ebu ibu n'ime ụlọ mmeghachi omume, na-eguzogide okpomọkụ dị elu na gas na-emebi emebi.
- Ngwa akụrụngwa Semiconductor: maka ihe mgbanwe okpomọkụ, ọkpọkọ gas, wdg, iji melite arụmọrụ njikwa okpomọkụ nke akụrụngwa.
XKH na-enye ọtụtụ ọrụ ahaziri iche maka tray seramiiki silicon carbide, iko mmiri na tube seramiiki silicon carbide. Tray seramiiki silicon carbide na iko mmiri, enwere ike ịhazi XKH dịka ihe ndị ahịa chọrọ si dị, nha na ọdịdị dị iche iche, ma kwado ọgwụgwọ mkpuchi pụrụ iche, melite iguzogide iyi na iguzogide nchara; Maka tube seramiiki silicon carbide, XKH nwere ike ịhazi ọtụtụ dayameta dị n'ime, dayameta mpụta, ogologo na nhazi dị mgbagwoju anya (dị ka tube a kpụrụ akpụ ma ọ bụ tube porous), ma nye mkpuchi mma, mgbochi oxidation na usoro ọgwụgwọ elu ndị ọzọ. XKH na-ahụ na ndị ahịa nwere ike iji uru arụmọrụ nke ngwaahịa seramiiki silicon carbide zuru oke iji mezuo ihe achọrọ nke ubi mmepụta dị elu dị ka semiconductors, leds na photovoltaics.
Ihe osise zuru ezu
