SICOI (Silicon Carbide na Insulator) Wafers SiC Film na Silicon

SICOI (Silicon Carbide na Insulator) Wafers Ihe nkiri SiC na onyonyo egosipụtara silicon

Nkọwa dị mkpirikpi:

Silicon Carbide on Insulator (SICOI) wafers bụ ihe na-esote ọgbọ semiconductor nke na-ejikọta akụrụngwa anụ ahụ na eletrọnịkị nke silicon carbide (SiC) yana njirimara ikewapụ eletrịịk pụtara ìhè nke oyi akwa mkpuchi mkpuchi, dị ka silicon dioxide (SiO₂) ma ọ bụ silicon nitride (Si₃N₄). A na-ahụkarị SICOI wafer nwere oyi akwa SiC epitaxial dị gịrịgịrị, ihe nkiri mkpuchi etiti, yana mkpụrụ ntọala na-akwado, nke nwere ike ịbụ silicon ma ọ bụ SiC.

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Atụmatụ

Eserese zuru ezu

Ewebata Silicon Carbide na Insulator (SICOI) wafers

A na-emezi usoro ngwakọ a iji gboo ihe siri ike nke ngwaọrụ eletrọnịkị dị elu, ugboro dị elu na oke okpomọkụ. Site na itinye akwa mkpuchi mkpuchi, SCOI wafers na-ebelata ikike parasitic ma na-ebelata mmiri iyi, si otú ahụ na-agba mbọ hụ na ugboro ole na-arụ ọrụ dị elu, ịrụ ọrụ nke ọma, yana njikwa okpomọkụ ka mma. Uru ndị a na-eme ka ha baa uru nke ukwuu na ngalaba dị ka ụgbọ ala eletrik, akụrụngwa nkwukọrịta 5G, sistemu ikuku, elektrọnik RF dị elu, na teknụzụ sensọ MEMS.

Ụkpụrụ mmepụta nke SICOI Wafers

A na-emepụta wafers SICOI (Silicon Carbide na Insulator) site na nke dị eluwafer bonding na thinning usoro:

Uto Substrate SiC- A na-akwado otu kristal SiC wafer (4H / 6H) dị elu dị ka ihe inye onyinye.
Ndobe oyi akwa mkpuchi- A na-emepụta ihe nkiri mkpuchi mkpuchi (SiO₂ ma ọ bụ Si₃N₄) na wafer (Si ma ọ bụ SiC).
Mgbakọ Wafer- A na-ejikọta SiC wafer na onye na-ebu ụgbọ mmiri n'okpuru enyemaka dị elu ma ọ bụ enyemaka plasma.
Na-akparị & ihicha- A na-agbadata wafer onye na-enye onyinye SiC ruo micrometer ole na ole ma na-egbu maramara iji nweta elu dị larịị.
Nyocha ikpeazụ- A na-anwale wafer SICOI mezuru maka ịdị n'otu nha, ịdị nro elu na arụmọrụ mkpuchi.

Site na usoro a, aoyi akwa SiC na-arụ ọrụnwere ezigbo ọkụ eletrik na ihe ọkụ na-ejikọta ya na ihe nkiri mkpuchi na ihe nkwado, na-emepụta ikpo okwu dị elu maka ike ọgbọ ọzọ na ngwaọrụ RF.

Uru dị mkpa nke SICOI Wafers

Ụdị njirimara	Njirimara nka nka	Isi Uru
Nhazi ihe	4H/6H-SiC arụ ọrụ oyi akwa + ihe nkiri mkpuchi (SiO₂/Si₃N₄) + Si ma ọ bụ SiC ụgbọelu	Na-enweta ikewapụ ọkụ eletrik siri ike, na-ebelata nnyonye anya parasitic
Ngwongwo eletriki	Ike ndakpọ dị elu (> 3 MV / cm), ọnwụ dielectric dị ala	Kachasị mma maka nnukwu voltaji na arụ ọrụ ugboro ugboro
Njirimara okpomọkụ	Nrụpụta ọkụ ruo 4.9 W/cm·K, kwụsiri ike karịa 500°C	Mgbasa ọkụ dị mma, arụmọrụ dị mma n'okpuru ibu ọkụ ọkụ siri ike
Ihe eji arụ ọrụ	Ike siri ike (Mohs 9.5), ọnụọgụ dị ala nke mgbasawanye thermal	Na-emegide nrụgide, na-akwalite ogologo ndụ ngwaọrụ
Ogo elu	Elu dị mma nke ukwuu (Ra <0.2 nm)	Na-akwalite epitaxy na-enweghị ntụpọ yana imepụta ngwaọrụ a pụrụ ịdabere na ya
Ihe mkpuchi	Resistivity>10¹⁴ Ω·cm, ntapu dị ala ugbu a	Ọrụ ntụkwasị obi na RF na ngwa ikewapụ voltaji dị elu
Nha & Nhazi	Dị na 4, 6, na 8-inch format; SiC ọkpụrụkpụ 1-100 μm; mkpuchi 0.1-10 μm	Mgbanwe imewe maka ngwa dị iche iche chọrọ

Mpaghara Ngwa Isi

Ngalaba Ngwa	Akpa eji eme ihe	Uru arụmọrụ
Igwe ọkụ eletrik	EV inverters, chaja ọdụ, ngwaọrụ ike mmepụta ihe	Voltage ndakpọ dị elu, mbelata ngbanwe mgbanwe
RF & 5G	Ihe nrịbawanye ike ọdụ ọdụ, ihe mejupụtara ebili mmiri milimita	Parasitics dị ala, na-akwado ọrụ ndị dị nso GHz
Ihe mmetụta MEMS	Ihe mmetụta nrụgide gburugburu gburugburu, MEMS-ọkwa nsoro ụzọ	Nkwụsi ike dị elu, na-eguzogide radieshon
Aerospace & Nchekwa	Nkwukọrịta Satellite, modul ike avionics	Ntụkwasị obi na oke okpomọkụ na ikpughe radieshon
Smart Grid	Ndị ntụgharị HVDC, ndị na-agbaji sekit steeti siri ike	Ihe mkpuchi dị elu na-ebelata mfu ike
Optoelectronics	UV LEDs, ihe ntinye laser	Ogo kristal dị elu na-akwado mpụta ọkụ dị mma

Mwepụta nke 4H-SiCOI

A na-enweta mmepụta nke 4H-SiCOI wafers site nawafer bonding na thinning usoro, na-enye ohere mkpuchi mkpuchi dị elu yana ọkwa SiC na-arụ ọrụ na-enweghị ntụpọ.

a: Atụmatụ nke 4H-SiCOI ihe eji eme ihe n'elu ikpo okwu.
b: Onyonyo nke 4-inch 4H-SiCOI wafer na-eji njikọ na thinning; akara mpaghara ntụpọ.
c: Nkọwapụta otu ịdị arọ nke mkpụrụ 4H-SiCOI.
d: Onyonyo anya nke 4H-SiCOI anwụ.
e: Usoro eruba maka imepụta ihe resonator SiC microdisk.
f: SEM nke microdisk resonator mezuru.
g: gbasaa SEM na-egosi akụkụ akụkụ resonator; Inset AFM na-egosi ire ụtọ elu nanoscale.
h: Cross-section SEM na-egosi elu elu nke yiri parabolic.

FAQ na SICOI Wafers

Q1: Kedu uru ndị SCOI wafer nwere karịa wafer SiC ọdịnala?
A1: N'adịghị ka ọkọlọtọ SiC substrates, SICOI wafers na-agụnye ihe mkpuchi oyi akwa na-ebelata parasitic capacitance na ntapu mmiri, na-eduga na elu arụmọrụ, mma ugboro nzaghachi, na elu okpomọkụ arụmọrụ.

Q2: Kedu nha wafer na-adịkarị?
A2: A na-emepụtakarị wafers SICOI n'ụdị inch 4, 6-inch na 8-inch, yana ọkpụrụkpụ SiC ahaziri ahazi na mkpuchi mkpuchi dị dabere na ihe ngwaọrụ chọrọ.

Q3: Kedu ụlọ ọrụ na-erite uru na SCOI wafers?
A3: Ụlọ ọrụ ndị dị mkpa gụnyere ọkụ eletrik maka ụgbọ ala eletrik, RF electronics maka netwọk 5G, MEMS maka ihe mmetụta ikuku, na optoelectronics dị ka UV LEDs.

Q4: Kedu ka oyi akwa mkpuchi si eme ka arụmọrụ ngwaọrụ dị mma?
A4: Ihe nkiri mkpuchi (SiO₂ ma ọ bụ Si₃N₄) na-egbochi nkwụsị nke ugbu a ma na-ebelata okwu mkparịta ụka eletriki, na-eme ka ntachi obi dị elu dị elu, ngbanwe nke ọma, ma belata okpomọkụ.

Q5: SCOI wafers dabara maka ngwa okpomọkụ dị elu?
A5: Ee, na elu okpomọkụ conductivity na nguzogide karịrị 500 ° C, SICOI wafers e mere na-arụ ọrụ ntụkwasị obi n'okpuru oké okpomọkụ na na gburugburu ebe obibi siri ike.

Q6: Enwere ike ịhazi wafers SICOI?
A6: Kpamkpam. Ndị na-emepụta ihe na-enye atụmatụ ahaziri ahazi maka ọkpụrụkpụ, ọkwa doping, na ngwakọta mkpụrụ iji gboo mkpa nyocha dị iche iche na ụlọ ọrụ mmepụta ihe.

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