SICOI (Silicon Carbide on Insulator) Wafers SiC Film ON Silicon

Nkọwa Dị Mkpirikpi:

Wafers Silicon Carbide on Insulator (SICOI) bụ ihe ndị na-emepụta semiconductor nke ọgbọ na-esote nke na-ejikọta ihe ndị dị elu na ihe ndị dị na eletrọniki nke silicon carbide (SiC) na njirimara nkewapụ eletriki pụrụ iche nke oyi akwa nchekwa mkpuchi, dị ka silicon dioxide (SiO₂) ma ọ bụ silicon nitride (Si₃N₄). Wafer SICOI nkịtị nwere obere oyi akwa SiC epitaxial, ihe nkiri mkpuchi etiti, na ihe nkwado ntọala, nke nwere ike ịbụ silicon ma ọ bụ SiC.

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atụmatụ

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Mwebata Silicon Carbide na Insulator (SICOI) wafers

A haziri nhazi ngwakọ a iji mezuo ihe siri ike nke ngwaọrụ eletrọniki dị elu, nke na-adị elu, na nke na-ekpo ọkụ. Site na itinye akwa mkpuchi, wafers SICOI na-ebelata ikike parasitic ma na-egbochi mmiri na-agbapụta, si otú a na-ahụ na ugboro ọrụ dị elu, arụmọrụ ka mma, na njikwa okpomọkụ ka mma. Uru ndị a na-eme ka ha baa uru nke ukwuu na ngalaba dịka ụgbọ ala eletrik, akụrụngwa nkwukọrịta 5G, sistemụ ikuku, eletrọniki RF dị elu, na teknụzụ sensọ MEMS.

Ụkpụrụ Mmepụta nke Wafers SICOI

A na-emepụta wafer SICOI (Silicon Carbide on Insulator) site na usoro dị eluusoro njikọta na ịcha wafer:

Uto SiC Substrate– A na-akwadebe wafer SiC dị elu nke otu kristal (4H/6H) dị ka ihe onyinye.
Mkpuchi oyi akwa– A na-akpụ ihe mkpuchi (SiO₂ ma ọ bụ Si₃N₄) n'elu wafer ebu (Si ma ọ bụ SiC).
Njikọ Wafer– A na-ejikọta wafer SiC na wafer ebu ibu n'okpuru oke okpomọkụ ma ọ bụ enyemaka plasma.
Ịdị mfe na ime ka ọ dị ọcha– A na-eme ka wafer SiC nke na-enye onyinye dị obere ruo obere maịkromita ole na ole ma na-eme ka ọ dị nro iji nweta elu dị nro dịka nke atọm.
Nnyocha Ikpeazụ– A na-anwale wafer SICOI emechara maka otu ọkpụrụkpụ ya, oke ya siri ike, na arụmọrụ mkpuchi ya.

Site na usoro a,oyi akwa SiC dị gịrịgịrị na-arụ ọrụA na-ejikọta ya na ihe mkpuchi na ihe nkwado dị mma nke nwere ihe eletriki na okpomọkụ, na-emepụta ikpo okwu dị elu maka ike ọgbọ na ngwaọrụ RF.

Uru dị mkpa nke SICOI Wafers

Ụdị Atụmatụ	Njirimara Teknụzụ	Uru Ndị Dị Mkpa
Nhazi Ihe	Oyi akwa na-arụ ọrụ nke 4H/6H-SiC + ihe mkpuchi ihe mkpuchi (SiO₂/Si₃N₄) + Si ma ọ bụ SiC	Na-enweta ikewapụ eletriki siri ike, na-ebelata nnyonye anya parasitic
Njirimara Ọdụdọ Eletriki	Ike mgbawa dị elu (>3 MV/cm), obere mfu dielectric	Emebere maka ọrụ voltaji dị elu na nke dị elu ugboro ugboro
Njirimara nke okpomọkụ	Ọkwa okpomọkụ ruo 4.9 W/cm·K, kwụsiri ike karịa 500°C	Mwepụ okpomọkụ dị irè, arụmọrụ dị mma n'okpuru ibu okpomọkụ siri ike
Njirimara Mekaniki	Ike siri ike (Mohs 9.5), obere ọnụọgụ nke mgbasawanye okpomọkụ	Ike megide nrụgide, na-eme ka ogologo oge ngwaọrụ dịkwuo mma
Ogo Elu	Elu dị nro nke ukwuu (Ra <0.2 nm)	Na-akwalite mmepụta ngwaọrụ epitaxy na-enweghị ntụpọ na ntụkwasị obi
Mkpuchi	Nguzogide >10¹⁴ Ω·cm, obere mmiri na-agbapụta	Ọrụ a pụrụ ịtụkwasị obi na RF na ngwa mwepụ voltaji dị elu
Nha na Nhazi	Dị na usoro 4, 6, na 8-inch; ọkpụrụkpụ SiC 1-100 μm; mkpuchi 0.1–10 μm	Nhazi dị mfe maka ihe dị iche iche achọrọ maka ngwa

Ebe Ngwa Isi

Ngalaba Ngwa	Ihe Ojiji A Na-ejikarị Eme Ihe	Uru Arụmọrụ
Eletrọniki Ike	Ndị na-agbanwe ọkụ eletrik EV, ọdụ chaja, ngwaọrụ ike ụlọ ọrụ	Voltaji mgbawa dị elu, mbelata mfu mgbanwe
RF na 5G	Ndị na-eme ka ike dị n'ọdụ ala, ihe ndị na-eme ka ebili mmiri milimita rụọ ọrụ	Ndị na-adịghị arụ ọrụ nke ọma, na-akwado ọrụ GHz
Sensọ MEMS	Ihe mmetụta nrụgide gburugburu ebe obibi siri ike, MEMS ọkwa ịnyagharịa	Nkwụsi ike dị elu nke okpomọkụ, na-eguzogide radieshon
Ụgbọelu na Nchekwa	Nkwukọrịta satịlaịtị, modulu ike avionics	Ntụkwasị obi na oke okpomọkụ na ikpughe radieshon
Grid Amamihe	Ndị na-agbanwe HVDC, ndị na-agbaji sekit siri ike	Mkpuchi dị elu na-ebelata mfu ike
Optoelectronics	UV LEDs, ihe ndị na-emepụta laser	Ogo kristal dị elu na-akwado mwepụta ìhè dị irè

Mmepụta nke 4H-SiCOI

A na-enweta mmepụta nke wafers 4H-SiCOI site nausoro njikọta wafer na ịcha ntutu, na-eme ka njikọ mkpuchi dị elu na akwa ọrụ SiC na-enweghị ntụpọ.

a: Usoro nke imepụta ihe 4H-SiCOI n'elu ikpo okwu.
bFoto nke wafer 4H-SiCOI nke dị sentimita 4 nke ejiri njikọ na ịcha; akara akara mpaghara ntụpọ.
c: Nha nhata nke ọkpụrụkpụ nke ihe mejupụtara 4H-SiCOI.
d: Foto anya nke ihe 4H-SiCOI.
eUsoro nhazi maka imepụta resonator SiC microdisk.
f: SEM nke resonator microdisk emechara.
g: E buliri SEM buru ibu nke na-egosi akụkụ akụkụ nke resonator; ihe dị n'ime AFM na-egosi ịdị nro nke elu nanoscale.
h: SEM nke na-egosi elu elu dị ka parabolic.

Ajụjụ Ndị A Na-ajụkarị Banyere Wafers SICOI

Q1: Uru dị aṅaa ka wafer SICOI nwere karịa wafer SiC ọdịnala?
A1: N'adịghị ka ihe ndị e ji SiC mee, ihe ndị e ji SICOI mee nwere ihe mkpuchi mkpuchi nke na-ebelata ikike parasitic capacitance na mmiri na-agbapụta, na-eduga n'ịdị irè, nzaghachi ugboro ugboro ka mma, na arụmọrụ okpomọkụ ka mma.

Q2: Kedu nha wafer dịkarịsịrị?
A2: A na-emepụta wafer SICOI n'ụdị nke 4-inch, 6-inch, na 8-inch, yana SiC ahaziri ahazi na ọkpụrụkpụ oyi akwa mkpuchi dị dabere na ihe ngwaọrụ chọrọ.

Q3: Kedụ ụlọ ọrụ ndị na-erite uru kacha na wafers SICOI?
A3: Isi ụlọ ọrụ gụnyere ngwa eletrọniki ike maka ụgbọ ala eletrik, ngwa eletrọniki RF maka netwọk 5G, MEMS maka ihe mmetụta ikuku, na optoelectronics dịka UV LEDs.

Q4: Kedu ka oyi akwa mkpuchi si eme ka arụmọrụ ngwaọrụ ka mma?
A4: Ihe mkpuchi ahụ (SiO₂ ma ọ bụ Si₃N₄) na-egbochi mmiri na-agbapụta ugbu a ma na-ebelata mkparịta ụka eletriki, na-eme ka ike voltaji dị elu, na-agbanwe agbanwe nke ọma, na-ebelata mfu okpomọkụ.

Q5: Wafer SICOI ọ dị mma maka ojiji dị elu?
A5: Ee, n'ihi oke okpomọkụ na iguzogide ihe karịrị 500°C, a na-eme ka wafer SICOI rụọ ọrụ nke ọma n'okpuru oke okpomọkụ na gburugburu ebe siri ike.

Q6: Enwere ike ịhazi wafer SICOI?
A6: N'ezie. Ndị nrụpụta na-enye atụmatụ ahaziri ahazi maka ọkpụrụkpụ, ọkwa doping, na njikọta substrate iji mezuo ọtụtụ nyocha na mkpa ụlọ ọrụ mmepụta ihe dị iche iche.

Nke gara aga: Igwe Ịcha Waya Daịamọnd maka SiC | Sapphire | Quartz | Iko

Osote: Igwe Ịcha Diamond nke Multi-Waya maka SiC Sapphire Ihe Ndị Na-adịghị Agbanwe Agbanwe