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SiC Epitaxial Wafer maka Ngwaọrụ Ike - 4H-SiC, ụdị N, njupụta dị ala

SiC Epitaxial Wafer maka Ngwaọrụ Ike - 4H-SiC, ụdị N, Onyonyo egosipụtara njupụta dị ala
  • SiC Epitaxial Wafer maka Ngwaọrụ Ike - 4H-SiC, ụdị N, njupụta dị ala
  • SiC Epitaxial Wafer maka Ngwaọrụ Ike - 4H-SiC, ụdị N, njupụta dị ala
  • SiC Epitaxial Wafer maka Ngwaọrụ Ike - 4H-SiC, ụdị N, njupụta dị ala

Nkọwa dị mkpirikpi:

SiC Epitaxial Wafer dị na isi nke ngwaọrụ semiconductor na-arụ ọrụ dị elu nke oge a, karịsịa ndị e mere maka ọrụ ike dị elu, ugboro ugboro, na okpomọkụ dị elu. Short for Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer nwere ọmarịcha SiC epitaxial oyi akwa toro n'elu nnukwu mkpụrụ SiC. Ojiji nke teknụzụ SiC Epitaxial Wafer na-agbasa ngwa ngwa na ụgbọ ala eletrik, grids smart, sistemu ike mmeghari ohuru, na ikuku ikuku n'ihi akụrụngwa anụ ahụ na eletrọnịkị ya kacha elu ma e jiri ya tụnyere wafers dabere na silicon.


Atụmatụ

Eserese zuru ezu

SiC Epitaxial Wafer-4
SiC Epitaxial Wafer-6 - 副本

Okwu mmalite

SiC Epitaxial Wafer dị na isi nke ngwaọrụ semiconductor na-arụ ọrụ dị elu nke oge a, karịsịa ndị e mere maka ọrụ ike dị elu, ugboro ugboro, na okpomọkụ dị elu. Short for Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer nwere ọmarịcha SiC epitaxial oyi akwa toro n'elu nnukwu mkpụrụ SiC. Ojiji nke teknụzụ SiC Epitaxial Wafer na-agbasa ngwa ngwa na ụgbọ ala eletrik, grids smart, sistemu ike mmeghari ohuru, na ikuku ikuku n'ihi akụrụngwa anụ ahụ na eletrọnịkị ya kacha elu ma e jiri ya tụnyere wafers dabere na silicon.

Ụkpụrụ nrụpụta nke SiC Epitaxial Wafer

Ịmepụta SiC Epitaxial Wafer chọrọ usoro ntinye mmiri mmiri kemịkalụ (CVD) na-achịkwa nke ukwuu. A na-etokarị oyi akwa epitaxial na mkpụrụ osisi SiC monocrystalline na-eji gas dị ka silane (SiH₄), propane (C₃H₈), na hydrogen (H₂) na okpomọkụ karịrị 1500ºC. Okpomọkụ epitaxial a dị elu na-eme ka nhazi kristal dị mma na obere ntụpọ dị n'etiti oyi akwa epitaxial na mkpụrụ.

Usoro a gụnyere ọtụtụ isi usoro:

  1. Nkwadebe mkpụrụ osisi: A na-ehicha wafer isi ala SiC ma na-egbu maramara ka ọ bụrụ ire ụtọ atọm.

  2. Uto CVD: Na reactor dị ọcha dị elu, gas na-emeghachi omume iji tinye otu kristal SiC oyi akwa na mkpụrụ.

  3. Njikwa Doping: Ụdị N-ụdị ma ọ bụ P-ụdị doping na-ewebata n'oge epitaxy iji nweta ihe eletriki chọrọ.

  4. Nyocha na Metrology: A na-eji anya microscope, AFM, na X-ray diffraction iji nyochaa ọkpụrụkpụ oyi akwa, ntinye doping, na njupụta ntụpọ.

A na-enyocha nke ọma SiC Epitaxial Wafer nke ọ bụla ka ọ nọgide na-enwe nnabata siri ike n'ịdị n'otu nha, ịdị larịị elu na mgbochi. Ikike ịmegharị ihe ndị a dị mkpa maka MOSFET voltaji dị elu, Schottky diodes, na ngwaọrụ ike ndị ọzọ.

Nkọwapụta

Oke Nkọwapụta
Otu Sayensị ihe onwunwe, Ngwakọta kristal otu
Ụdị Poly 4H
Doping Ụdị N
Dayameta 101 mm
Nkwenye dayameta ± 5%
Ọkpụrụkpụ 0.35 mm
Ọkpụrụkpụ ndidi ± 5%
Ogologo Flat nke izizi 22 mm (± 10%)
TTV (Mkpokọta Ọdịiche ịdị arọ) ≤10 µm
Warp ≤25 µm
FWHM ≤30 Arc-sk
Emecha elu elu Rq ≤0.35 nm

Ngwa SiC Epitaxial Wafer

Ngwaahịa SiC Epitaxial Wafer dị mkpa n'ọtụtụ ngalaba:

  • Ụgbọ ala eletrik (EV): Ngwa SiC Epitaxial Wafer na-abawanye arụmọrụ ike ma belata ibu.

  • Ike mmeghari ohuru: Ejiri ya na inverters maka sistemụ ike anyanwụ na ikuku.

  • Ngwaahịa ike ụlọ ọrụ: Kwado elu-ugboro, mgbanwe okpomọkụ dị elu na obere mfu.

  • Aerospace na nchekwa: Ezigbo maka gburugburu ebe siri ike chọrọ semiconductor siri ike.

  • 5G ọdụ ọdụ: Akụkụ SiC Epitaxial Wafer na-akwado njupụta ike dị elu maka ngwa RF.

SiC Epitaxial Wafer na-enyere atụmatụ kọmpat, mgbanwe ngwa ngwa, yana nrụpụta ike dị elu ma e jiri ya tụnyere silicon wafers.

Uru nke SiC Epitaxial Wafer

Teknụzụ SiC Epitaxial Wafer na-enye nnukwu uru:

  1. Voltaji ndakpọ dị elu: Na-eguzogide voltaji ruo ugboro 10 dị elu karịa Si wafers.

  2. Nrụpụta okpomọkụ: SiC Epitaxial Wafer na-agbasa ọkụ ngwa ngwa, na-ekwe ka ngwaọrụ na-agba ọsọ ngwa nju oyi na ntụkwasị obi.

  3. Ọsọ ngbanwe dị elu: Lower ịgbanwee ọnwụ na-enyere aka elu arụmọrụ na miniaturization.

  4. Bandgap sara mbara: Na-eme ka nkwụsi ike na elu voltaji na okpomọkụ.

  5. Ike ihe onwunwe: SiC bụ kemịkalụ inert na arụ ọrụ siri ike, dị mma maka ngwa na-achọ.

Uru ndị a na-eme ka SiC Epitaxial Wafer bụrụ ihe a na-ahọrọ maka ọgbọ na-esote semiconductor.

FAQ: SiC Epitaxial Wafer

Q1: Kedu ihe dị iche n'etiti wafer SiC na SiC Epitaxial Wafer?
A SiC wafer na-ezo aka na nnukwu mkpụrụ, ebe SiC Epitaxial Wafer na-agụnye oyi akwa doped toro eto nke ejiri na nrụpụta ngwaọrụ.

Q2: Kedu ọkpụrụkpụ dị maka akwa SiC Epitaxial Wafer?
Epitaxial layers na-adịkarị site na micrometer ole na ole ruo ihe karịrị 100 μm, dabere na ngwa achọrọ.

Q3: SiC Epitaxial Wafer dị mma maka gburugburu okpomọkụ dị elu?
Ee, SiC Epitaxial Wafer nwere ike ịrụ ọrụ na ọnọdụ n'elu 600°C, na-arụpụta silicon nke ukwuu.

Q4: Gịnị kpatara njupụta ntụpọ dị mkpa na SiC Epitaxial Wafer?
Njupụta ntụpọ dị ala na-eme ka arụmọrụ ngwaọrụ dịkwuo mma yana mkpụrụ, ọkachasị maka ngwa voltaji dị elu.

Q5: Ụdị N-ụdị na P-ụdị SiC Epitaxial Wafers abụọ dị?
Ee, a na-emepụta ụdị abụọ ahụ site na iji njikwa gas dopant ziri ezi n'oge usoro epitaxial.

Q6: Kedu nha wafer bụ ọkọlọtọ maka SiC Epitaxial Wafer?
Dayameta ọkọlọtọ na-agụnye 2-inch, 4-inch, 6-inch, na 8-inch na-arịwanye elu maka ịmepụta nnukwu olu.

Q7: Kedu ka SiC Epitaxial Wafer si emetụta ọnụ ahịa na arụmọrụ?
Ebe ọ bụ na mbụ dị ọnụ karịa silicon, SiC Epitaxial Wafer na-ebelata nha sistemu na mfu ike, na-emeziwanye arụmọrụ ọnụ ahịa n'ogologo ogologo oge.

  • Nke gara aga:
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