Wafer Epitaxial SiC maka Ngwaọrụ Ike - 4H-SiC, N-ụdị, Njupụta obere ntụpọ
Ihe osise zuru ezu
Okwu Mmalite
Wafer Epitaxial SiC bụ isi ihe dị mkpa na ngwaọrụ semiconductor dị elu nke oge a, ọkachasị ndị e mere maka ọrụ ike dị elu, ugboro ugboro, na okpomọkụ dị elu. Mkpụmkpụ maka Wafer Epitaxial Silicon Carbide, Wafer Epitaxial SiC nwere akwa epitaxial SiC dị elu, dị gịrịgịrị nke a kụrụ n'elu nnukwu ihe SiC substrate. Ojiji nke teknụzụ Wafer Epitaxial SiC na-agbasa ngwa ngwa na ụgbọ ala eletrik, grid smart, sistemụ ike mmeghari ohuru, na ikuku n'ihi njirimara anụ ahụ na eletrọniki ya dị elu ma e jiri ya tụnyere wafers dabere na silicon nkịtị.
Ụkpụrụ Mmepụta nke SiC Epitaxial Wafer
Ịmepụta Wafer Epitaxial SiC chọrọ usoro nchekwa anwụrụ ọkụ kemịkalụ a na-achịkwa nke ọma (CVD). A na-akụkarị oyi akwa epitaxial na ihe mkpuchi SiC monocrystalline site na iji gas dị ka silane (SiH₄), propane (C₃H₈), na hydrogen (H₂) na okpomọkụ karịrị 1500°C. Mmụba epitaxial a dị elu na-eme ka nhazi kristal dị mma na obere ntụpọ dị n'etiti oyi akwa epitaxial na ihe mkpuchi ahụ.
Usoro a gụnyere ọtụtụ isi ihe dị mkpa:
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Nkwadebe ihe ndị e ji eme ihe: A na-ehicha ma na-eme ka wafer SiC dị n'okpuru ya dị nro.
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Uto CVD: N'ime ihe na-eme ka ihe dị ọcha nke ukwuu, gas na-emeghachi omume iji tinye otu kristal SiC oyi akwa n'elu ihe ahụ.
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Njikwa Ọgwụ Mgbochi Mmebi: A na-etinye ụdị N-ụdị ma ọ bụ P-ụdị doping n'oge epitaxy iji nweta njirimara eletriki achọrọ.
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Nnyocha na Usoro Ọgwụ: A na-eji igwe onyonyo anya, AFM, na mgbasa ozi X-ray iji chọpụta ọkpụrụkpụ oyi akwa, ntinye ọgwụ mgbochi, na njupụta ntụpọ.
A na-enyocha Wafer Epitaxial SiC ọ bụla nke ọma iji nọgide na-enwe nguzozi siri ike n'otu nhata ọkpụrụkpụ, ịdị larịị n'elu, na iguzogide nrụgide. Ike ịhazi paramita ndị a dị oke mkpa maka MOSFETs dị elu, diodes Schottky, na ngwaọrụ ike ndị ọzọ.
Nkọwapụta
| Paramita | Nkọwapụta |
| Nkeji edemede | Sayensị Ihe, Otu Akara Kristal |
| Ụdị Polytype | 4H |
| Ịṅụ ọgwụ ike | Ụdị N |
| Dayameta | 101 mm |
| Nnwale Dayameta | ± 5% |
| Ọkpụrụkpụ | 0.35 mm |
| Ntachi Obi | ± 5% |
| Ogologo Dị larịị nke Mbụ | 22 mm (± 10%) |
| TTV (Mkpokọta ọkpụrụkpụ) | ≤10 µm |
| Warp | ≤25 µm |
| FWHM | ≤30 Arc-sec |
| Mmecha Elu | Rq ≤0.35 nm |
Ngwa nke SiC Epitaxial Wafer
Ngwaahịa Wafer nke SiC Epitaxial dị oke mkpa n'ọtụtụ ngalaba:
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Ụgbọala eletriki (EV): Ngwaọrụ dabere na SiC Epitaxial Wafer na-eme ka arụmọrụ powertrain dịkwuo mma ma belata ibu.
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Ike Mmegharị ỌhụrụA na-eji ya eme ihe na inverters maka sistemụ ike anyanwụ na ikuku.
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Ngwa Ike Ụlọ Ọrụ: Mee ka mgbanwe okpomọkụ dị elu, nke na-agbanwe ugboro ugboro, nwee obere mfu.
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Ụgbọelu na Nchebe: Ọ dị mma maka gburugburu ebe siri ike nke chọrọ semiconductor siri ike.
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Ọdụ Isi 5G: Ihe ndị dị na SiC Epitaxial Wafer na-akwado njupụta ike dị elu maka ngwa RF.
Wafer SiC Epitaxial na-enye ohere imepụta obere nhazi, ịgbanwe ngwa ngwa, na ịrụ ọrụ dị elu na mgbanwe ike ma e jiri ya tụnyere wafer silicon.
Uru nke SiC Epitaxial Wafer
Teknụzụ SiC Epitaxial Wafer nwere uru dị ukwuu:
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Voltaji Nkwụsị Dị Elu: Na-eguzogide voltaji ruo ugboro iri karịa Si wafers.
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Ọgbakọ okpomọkụ: SiC Epitaxial Wafer na-ekpochapụ okpomọkụ ngwa ngwa, na-enye ngwaọrụ ohere ịrụ ọrụ oyi na ntụkwasị obi karịa.
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Ọsọ Mgbanwe Dị EluMfu mgbanwe dị ala na-eme ka arụmọrụ dị elu na obere mgbanwe dị mfe.
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Bandgap sara mbara: Na-eme ka ọ kwụsie ike na voltaji na okpomọkụ dị elu.
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Ike Ihe: SiC dị ike ma dịkwa ike n'ụzọ kemịkalụ, ọ dị mma maka ngwa ndị siri ike.
Uru ndị a na-eme ka SiC Epitaxial Wafer bụrụ ihe a ga-ahọrọ maka ọgbọ semiconductors na-abịa.
Ajụjụ: SiC Epitaxial Wafer
Q1: Kedu ihe dị iche n'etiti wafer SiC na wafer SiC Epitaxial?
Wafer SiC na-ezo aka na nnukwu ihe mejupụtara ya, ebe Wafer SiC Epitaxial nwere akwa doped a kụrụ nke ọma nke e ji emepụta ngwaọrụ.
Q2: Kedu ọkpụrụkpụ dị maka akwa SiC Epitaxial Wafer?
Okpomọkụ epitaxial na-adịkarị site na obere micrometers ruo ihe karịrị 100 μm, dabere na ihe achọrọ maka ngwa.
Q3: Wafer Epitaxial SiC ọ dị mma maka gburugburu ebe okpomọkụ dị elu?
Ee, SiC Epitaxial Wafer nwere ike ịrụ ọrụ n'ọnọdụ karịrị 600°C, na-arụ ọrụ nke ọma karịa silicon.
Q4: Gịnị mere njupụta ntụpọ ji dị mkpa na SiC Epitaxial Wafer?
Njupụta obere ntụpọ na-eme ka arụmọrụ na mmepụta ngwaọrụ dịkwuo mma, ọkachasị maka ngwa voltaji dị elu.
Q5: Ụdị N-ụdị na ụdị P-ụdị SiC Epitaxial Wafers hà dị?
Ee, a na-emepụta ụdị abụọ a site na iji njikwa gas dopant ziri ezi n'oge usoro epitaxial.
Q6: Kedu nha wafer bụ ọkọlọtọ maka SiC Epitaxial Wafer?
Dayameta ọkọlọtọ gụnyere sentimita abụọ, sentimita anọ, sentimita isii, na sentimita asatọ karịa maka imepụta ihe dị elu.
Q7: Kedu ka SiC Epitaxial Wafer si emetụta ọnụ ahịa na arụmọrụ?
Ọ bụ ezie na ọ dị oke ọnụ karịa silicon na mbụ, SiC Epitaxial Wafer na-ebelata nha sistemụ na mfu ike, na-eme ka arụmọrụ ọnụ ahịa zuru oke dịkwuo mma n'oge dị anya.
