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Graphite efere seramiiki SiC nwere mkpuchi CVD SiC maka akụrụngwa

Grafite efere seramiiki SiC nwere mkpuchi CVD SiC maka akụrụngwa Foto a na-egosi
  • Graphite efere seramiiki SiC nwere mkpuchi CVD SiC maka akụrụngwa
  • Graphite efere seramiiki SiC nwere mkpuchi CVD SiC maka akụrụngwa

Nkọwa Dị Mkpirikpi:

Shanghai Xinkehui New Materials Co., Ltd. na-emepụta diski etching semiconductor Φ380mm–Φ600mm, diski bearing wafer, tray silicon carbide, tray SIC, tray silicon carbide, tray etching ICP, tray etching, ịdị ọcha silicon carbide > 99.9%, ndụ ọrụ tray SIC dị okpukpu anọ karịa tray CVD nke dabeere na graphite, ojiji ogologo oge na-enweghị mgbanwe, Na-eguzogide acid FH, nchara H2So4 siri ike.


atụmatụ

A naghị eji seramiiki silicon carbide eme ihe naanị n'oge a na-etinye ihe nkiri dị gịrịgịrị, dịka epitaxy ma ọ bụ MOCVD, ma ọ bụ na nhazi wafer, ebe a na-ebu ụzọ tinye tray ndị na-ebu wafer maka MOCVD n'ebe a na-etinye ihe, ya mere ha na-eguzogide okpomọkụ na nchara. Ndị na-ebu SiC nwekwara nnukwu ike okpomọkụ na ihe onwunwe nkesa okpomọkụ dị mma.

Ihe ndị na-ebu wafer Silicon Carbide (CVD SiC) dị ọcha maka nhazi vapor metal organic kemịkalụ dị elu (MOCVD).

Ndị na-ebu wafer CVD SiC dị ọcha dị oke mma karịa ndị na-ebu wafer nkịtị eji eme ihe n'usoro a, nke bụ graphite ma kpuchie ya na oyi akwa nke CVD SiC. Ndị na-ebu graphite ndị a kpuchiri ekpuchi enweghị ike iguzogide oke okpomọkụ (1100 ruo 1200 degrees Celsius) achọrọ maka itinye GaN nke led na-acha anụnụ anụnụ na ọcha nke taa. Okpomọkụ dị elu na-eme ka mkpuchi ahụ mepụta obere oghere pin nke kemịkalụ usoro na-emebi graphite dị n'okpuru. Ihe ndị na-ebu grafite ahụ na-agbaze ma merụọ GaN, na-eme ka a dochie ihe mkpuchi wafer a kpuchiri ekpuchi.

CVD SiC nwere ịdị ọcha nke 99.999% ma ọ bụ karịa ma nwee nnukwu ike iguzogide okpomọkụ na oke ọkụ. Ya mere, ọ nwere ike iguzogide okpomọkụ dị elu na gburugburu siri ike nke mmepụta LED na-enwu enwu. Ọ bụ ihe siri ike monolithic nke na-eru njupụta nke echiche, na-emepụta obere ihe, ma na-egosipụta oke ike nchara na mbuze. Ihe ahụ nwere ike ịgbanwe opacity na ike mbugharị na-enweghị itinye ihe ndị na-adịghị mma nke ígwè. Ndị na-ebu wafer na-abụkarị sentimita 17 na dayameta ma nwee ike ijide ruo wafers 40 2-4 inch.

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