Tray Seramiiki SiC maka ihe eji ebu Wafer nwere oke okpomọkụ
Tray Seramiiki Silicon Carbide (Tray SiC)
Ihe mejupụtara seramiiki dị elu nke dabere na ihe silicon carbide (SiC), nke e mepụtara maka ngwa ụlọ ọrụ dị elu dịka mmepụta semiconductor na mmepụta LED. Isi ọrụ ya gụnyere ije ozi dị ka ihe na-ebu wafer, ikpo okwu usoro etching, ma ọ bụ nkwado usoro okpomọkụ dị elu, na-eji ike okpomọkụ pụrụ iche, iguzogide okpomọkụ dị elu, na nkwụsi ike kemịkalụ iji hụ na usoro ahụ dị n'otu na mmepụta ngwaahịa.
Isi Ihe dị mkpa
1. Arụmọrụ okpomọkụ
- Oke Ọkụ: 140–300 W/m·K, nke karịrị graphite ọdịnala (85 W/m·K), nke na-eme ka okpomọkụ gbazee ngwa ngwa ma belata nrụgide okpomọkụ.
- Ọnụọgụ Mgbasawanye Okpomọkụ Dị Ala: 4.0×10⁻⁶/℃ (25–1000℃), silicon dakọtara nke ọma (2.6×10⁻⁶/℃), na-ebelata ihe egwu nke mgbanwe okpomọkụ.
2. Njirimara igwe
- Ike Dị Elu: Ike flexural ≥320 MPa (20℃), na-eguzogide mkpakọ na mmetụta.
- Ike Dị Elu: Ike siri ike nke Mohs bụ 9.5, nke abụọ karịa diamond, nke na-enye ike iyi dị elu.
3. Nkwụsi ike nke kemịkalụ
- Nguzogide Njehie: Na-eguzogide acid siri ike (dịka ọmụmaatụ, HF, H₂SO₄), nke dabara adaba maka gburugburu usoro ịkpụcha ihe.
- Enweghị Magnetik: Mmetụta magnetik dị n'ime <1×10⁻⁶ emu/g, na-ezere nnyonye anya na ngwaọrụ ndị ziri ezi.
4. Nnwere Onwe Gburugburu Ebe Obibi Dị Oke
- Ogologo Okpomọkụ Dị Elu: Okpomọkụ ọrụ ogologo oge ruo 1600–1900℃; iguzogide obere oge ruo 2200℃ (ebe ikuku oxygen na-enweghị).
- Nguzogide Mkpọchi Okpomọkụ: Na-anagide mgbanwe okpomọkụ mberede (ΔT > 1000℃) na-enweghị mgbawa.
Ngwa
| Ngalaba Ngwa | Ọnọdụ ndị a kapịrị ọnụ | Uru Teknụzụ |
| Mmepụta Semiconductor | Ịkpụcha Wafer (ICP), itinye ihe mkpuchi dị gịrịgịrị (MOCVD), Ịkpụcha CMP | Nnukwu ike okpomọkụ na-eme ka ubi okpomọkụ dị otu; obere mgbasawanye okpomọkụ na-ebelata agha wafer. |
| Mmepụta LED | Uto epitaxial (dịka ọmụmaatụ, GaN), ịkpụ wafer, nkwakọ ngwaahịa | Na-ebelata ọtụtụ ntụpọ, na-eme ka arụmọrụ ọkụ LED na ndụ ya ka mma. |
| Ụlọ ọrụ mmepụta fotovoltaic | Igwe ọkụ silikọn wafer, ihe nkwado akụrụngwa PECVD | Oke okpomọkụ na oke okpomọkụ na-egbochi ngwa ahụ ịgbatị ndụ ya. |
| Laser na Optics | Ihe ndị na-eme ka mmiri dị n'ime laser dị elu, ihe nkwado sistemụ anya | Nnukwu ike okpomọkụ na-eme ka okpomọkụ gbazee ngwa ngwa, na-eme ka akụkụ anya kwụsie ike. |
| Ngwa Nyocha | Ndị ji ihe nlele TGA/DSC | Ike okpomọkụ dị ala na nzaghachi okpomọkụ ngwa ngwa na-eme ka izi ezi nha dịkwuo mma. |
Uru Ngwaahịa
- Arụmọrụ zuru oke: Ike, ike, na nguzogide nchara karịrị seramiiki alumina na silicon nitride, na-emezu oke mkpa ọrụ.
- Nhazi Dị Mfe: Njupụta nke 3.1–3.2 g/cm³ (40% nke ígwè), na-ebelata ibu ikuku ma na-eme ka nhazi mmegharị dịkwuo mma.
- Ogologo na ntụkwasị obi: Ndụ ọrụ karịrị afọ 5 na 1600 ℃, na-ebelata oge ọrụ ma na-ebelata ọnụ ahịa ọrụ site na 30%.
- Nhazi: Na-akwado geometrị dị mgbagwoju anya (dịka ọmụmaatụ, iko mmiri oghere, tray nwere ọtụtụ oyi akwa) yana njehie dị larịị <15 μm maka ngwa ziri ezi.
Nkọwapụta Teknụzụ
| Nkeji paramita | Ihe ngosi |
| Njirimara Anụ Ahụ | |
| Njupụta | ≥3.10 g/cm³ |
| Ike Flexural (20℃) | 320–410 MPa |
| Ọkụ conductivity (20℃) | 140–300 W/(m·K) |
| Ọnụọgụ Mgbasawanye Okpomọkụ (25–1000℃) | 4.0×10⁻⁶/℃ |
| Njirimara Kemịkalụ | |
| Nguzogide Asịd (HF/H₂SO₄) | Enweghị nchara mgbe awa 24 gachara |
| Nhazi igwe | |
| Ịdị larịị | ≤15 μm (300 × 300 mm) |
| Ọdịdị siri ike nke elu (Ra) | ≤0.4 μm |
Ọrụ XKH
XKH na-enye ngwọta ụlọ ọrụ zuru oke nke gụnyere mmepe omenala, nhazi ziri ezi, na njikwa mma siri ike. Maka mmepe omenala, ọ na-enye ngwọta ihe dị ọcha (>99.999%) na oghere (30-50% porosity), jikọtara ya na nhazi 3D na simulation iji melite geometries dị mgbagwoju anya maka ngwa dị ka semiconductors na aerospace. Nhazi nkenke na-eso usoro dị mfe: nhazi ntụ ntụ → isostatic/dry pressure → 2200°C sintering → CNC/diamond grinding → inspection, hụ na polishing ọkwa nanometer na ±0.01 mm nha ndidi. Njikwa mma gụnyere nnwale usoro zuru oke (ihe mejupụtara XRD, microstructure SEM, mgbagọ isi atọ) na nkwado teknụzụ (nhazi usoro, ndụmọdụ 24/7, nnyefe ihe nlele awa 48), na-enye ihe ndị a pụrụ ịtụkwasị obi, arụmọrụ dị elu maka mkpa ụlọ ọrụ dị elu.
Ajụjụ Ndị A Na-ajụkarị (FAQ)
1. Ajụjụ: Kedụ ụlọ ọrụ na-eji tray seramiiki silicon carbide?
A: A na-ejikarị ya eme ihe n'ịmepụta semiconductor (njikwa wafer), ike anyanwụ (usoro PECVD), akụrụngwa ahụike (ihe mejupụtara MRI), na ikuku (akụkụ okpomọkụ dị elu) n'ihi oke iguzogide okpomọkụ na nkwụsi ike kemịkalụ ha.
2. Ajụjụ: Olee otú silicon carbide si emeri tray quartz/glass?
A: Nguzogide okpomọkụ dị elu (ruo 1800°C vs. quartz's 1100°C), enweghị nnyonye anya magnetik, na ndụ ogologo (afọ 5+ vs. quartz's ọnwa 6-12).
3. Ajụjụ: Traị silicon carbide ọ nwere ike ijikwa gburugburu acidic?
A: Ee. Na-eguzogide HF, H2SO4, na NaOH nke na-emebi ihe ruru <0.01mm/afọ, nke na-eme ka ha dị mma maka ịchacha kemịkalụ na ihicha wafer.
4. Ajụjụ: Traị silicon carbide ọ dabara na akpaaka?
A: Ee. Emebere ya maka ịkwọ ihe na ijikwa igwe ikuku, yana ịdị larịị nke elu <0.01mm iji gbochie mmetọ ihe ndị dị na ihe ndị na-akpaghị aka.
5. A: Gịnị bụ ntụnyere ọnụ ahịa na ihe ndị e ji eme ihe ọdịnala?
A: Ọnụ ego dị elu karịa (3-5x quartz) mana TCO30-50% dị ala n'ihi ogologo ndụ, mbelata oge ọrụ, na nchekwa ike site na njikwa okpomọkụ dị elu.
