Ngwa mwepụta nke Laser Semiconductor
Ihe osise zuru ezu
Nchịkọta Ngwaahịa nke Ngwa Ibuli Laser
Ngwa Semiconductor Laser Lift-Off na-anọchite anya ngwọta ọgbọ ọzọ maka ingot thinning dị elu na nhazi ihe semiconductor. N'adịghị ka ụzọ wafering ọdịnala nke dabere na igwe eji egweri ígwè, ịkpụ waya diamond, ma ọ bụ nhazi kemịkalụ, ikpo okwu laser a na-enye nhọrọ ọzọ na-enweghị kọntaktị, nke na-anaghị emebi emebi maka iwepụ akwa dị oke mkpa na ingots semiconductor buru ibu.
E ji ya mee ihe maka ihe ndị na-agbawa agbawa na ndị bara uru dị ka gallium nitride (GaN), silicon carbide (SiC), sapphire, na gallium arsenide (GaAs), Semiconductor Laser Lift-Off Equipment na-enye ohere ịkpụzi ihe nkiri wafer-scale ozugbo site na kristal ingot. Teknụzụ ọhụrụ a na-ebelata ihe mkpofu ihe nke ukwuu, na-eme ka mmepụta ya ka mma, ma na-eme ka iguzosi ike n'ezi ihe nke substrate dịkwuo mma - ihe ndị a niile dị mkpa maka ngwaọrụ ọgbọ na-abịa na eletrọniki ike, sistemụ RF, photonics, na obere ngosipụta.
Site n'itinye uche na njikwa akpaaka, nhazi osisi, na nyocha mmekọrịta ihe eji eme ihe na laser, e mere Semiconductor Laser Lift-Off Equipment ka ọ na-ejikọta ya na usoro mmepụta semiconductor n'enweghị nsogbu ma na-akwado mgbanwe R&D na nhazi mmepụta oke.
Ụkpụrụ Teknụzụ na Ọrụ nke Ngwaọrụ Ibuli Laser
Usoro nke Semiconductor Laser Lift-Off Equipment na-eme na-amalite site n'ikpughepụ ingot onye nyere onyinye site n'otu akụkụ site na iji ọkụ ultraviolet laser dị elu. A na-elekwasị anya nke ọma na omimi dị n'ime, nke na-abụkarị n'akụkụ nke e ji aka rụọ, ebe a na-eme ka ike jupụta n'ike n'ihi ọdịiche anya, okpomọkụ, ma ọ bụ kemịkalụ.
N'ime oyi akwa nnabata ike a, ikpo ọkụ mpaghara na-eduga na obere mgbawa ngwa ngwa, mgbasawanye gas, ma ọ bụ mmebi nke oyi akwa interfacial (dịka ọmụmaatụ, ihe nkiri nrụgide ma ọ bụ oxide àjà). Nsogbu a a na-achịkwa nke ọma na-eme ka oyi akwa kristal dị n'elu - nke nwere ọkpụrụkpụ nke ọtụtụ iri micrometers - kewapụ na ingot ntọala ahụ nke ọma.
Ngwaọrụ Semiconductor Laser Lift-Off na-eji isi nyocha mmegharị, njikwa axis z nke a na-ahazi, na reflectometry oge iji hụ na mkpali ọ bụla na-enye ike kpọmkwem na ebe ebumnuche ya. Enwere ike ịhazi akụrụngwa ahụ site na iji ụdị mgbawa ma ọ bụ ikike multi-pulse iji mee ka ịdị nro nke mwepụta dịkwuo mma ma belata nrụgide fọdụrụnụ. Ihe dị mkpa bụ na ebe ọ bụ na ogwe laser anaghị emetụ ihe ahụ aka n'anụ ahụ, ihe egwu nke obere mgbawa, ịkpọ isiala, ma ọ bụ mgbawa elu na-ebelata nke ukwuu.
Nke a na-eme ka usoro ịcha ntutu laser dị mfe ịgbanwe, ọkachasị n'ọrụ ebe achọrọ wafers dị larịị, nke dị gịrịgịrị na sub-micron TTV (Nhazi ọkpụrụkpụ).
Paramita nke Semiconductor Ngwaọrụ Ịweli Laser
| Ogologo ebili mmiri | IR/SHG/THG/FHG |
|---|---|
| Obosara Pulse | Nanosecond, Picosecond, Femtosekọnd |
| Sistemụ Anya | Sistemụ anya edoziri edozi ma ọ bụ sistemụ Galvano-optical |
| Ọkwa XY | 500 mm × 500 mm |
| Oke nhazi | 160 mm |
| Ọsọ Mmegharị | Oke 1,000 mm/sekọnd |
| Imeghachi ihe | ±1 μm ma ọ bụ ihe na-erughị ya |
| Ezigbo Ọnọdụ Ziri Ezi: | ±5 μm ma ọ bụ ihe na-erughị ya |
| Nha Wafer | 2–6 sentimita asatọ ma ọ bụ ahaziri ahazi |
| Njikwa | Windows 10, 11 na PLC |
| Voltaji Ike Inye | AC 200 V ±20 V, Otu usoro, 50/60 kHz |
| Akụkụ Mpụga | 2400 mm (W) × 1700 mm (D) × 2000 mm (H) |
| Ibu | 1,000 n'arọ |
Ngwa Mmepụta Ihe nke Ngwa Ibuli Laser
Ngwa mwepụta laser semiconductor na-agbanwe ngwa ngwa otu esi akwadebe ihe n'ọtụtụ ngalaba semiconductor:
- Ngwaọrụ Ike GaN kwụ ọtọ nke Ngwa Ibuli Laser
Iwepụ ihe nkiri GaN-on-GaN dị oke mkpa site na nnukwu ingots na-eme ka usoro nhazi ikuku kwụ ọtọ na iji ihe ndị dị oke ọnụ eme ihe.
- Ngwa Schottky na MOSFET maka SiC Wafer Thinning
Na-ebelata ọkpụrụkpụ oyi akwa ngwaọrụ ma na-echekwa nha nke substrate - nke kacha mma maka ngwa eletrọniki ike na-agbanwe ngwa ngwa.
- Ihe ngosi LED na ihe ngosi nke ngwaọrụ mwepụta laser dabere na sapphire
Na-eme ka ikewapụ nke oyi akwa ngwaọrụ site na sapphire boules dị irè iji kwado mmepụta obere LED dị gịrịgịrị, nke e mere ka ọ dị mma n'oge okpomọkụ.
- Injinịa Ihe nke III-V nke Ngwa Ibuli Laser
Na-eme ka ikewapụ nke oyi akwa GaAs, InP, na AlGaN dị mfe maka njikọta optoelectronic dị elu.
- Ịmepụta IC dị gịrịgịrị na Sensor
Na-emepụta akwa dị gịrịgịrị maka ihe mmetụta nrụgide, ihe na-eme ka ihe dị mfe, ma ọ bụ fotodiodes, ebe nnukwu ihe na-eme ka ihe ghara ịrụ ọrụ nke ọma.
- Ngwa eletrọniki na-agbanwe agbanwe ma na-apụta ìhè
Na-akwadebe ihe ndị dị gịrịgịrị nke ọma maka ngosipụta ndị na-agbanwe agbanwe, sekit ndị a na-eyi, na windo smart na-enwu enwu.
N'akụkụ nke ọ bụla n'ime mpaghara ndị a, Semiconductor Laser Lift-Off Equipment na-arụ ọrụ dị mkpa n'inyere aka ime ka obere ihe dị mfe, iji ihe ndị ọzọ eme ihe, na ime ka usoro ahụ dị mfe.
Ajụjụ Ndị A Na-ajụkarị (Ajụjụ Ndị A Na-ajụkarị) nke Ngwa Ibuli Laser
Q1: Kedu oke ọkpụrụkpụ kacha nta m nwere ike inweta site na iji ngwa Semiconductor Laser Lift-Off?
A1:Ọ na-adịkarị n'etiti micron 10-30 dabere na ihe e ji mee ya. Usoro a nwere ike ime ka ihe ndị dị gịrịgịrị karịa ma ọ bụrụ na e jiri ntọala ndị a gbanwere gbanwee ya.
Q2: Enwere ike iji nke a bee ọtụtụ wafers site na otu ingot?
A2:Ee. Ọtụtụ ndị ahịa na-eji usoro iwepụ laser eme ihe iji wepụta ọtụtụ oyi akwa dị gịrịgịrị site na otu ingot buru ibu.
Q3: Kedu ihe nchekwa dị na ya maka ọrụ laser dị elu?
A3:Ihe mkpuchi nke Klas nke 1, sistemụ mkpọchi, ihe mkpuchi osisi, na mkpọchi akpaaka bụ ihe a na-ahụkarị.
Q4: Kedu ka usoro a si tụnyere igwe waya daịamọnd n'ihe gbasara ọnụ ahịa ya?
A4:Ọ bụ ezie na capex mbụ nwere ike ịdị elu karịa, iwepụ laser na-ebelata ọnụ ahịa ihe oriri, mmebi ihe ndị dị n'ime ala, na usoro nhazi mgbe emechara ya - na-ebelata ọnụ ahịa zuru oke nke ihe onwunwe (TCO) ogologo oge.
Q5: Usoro a ọ ga-eru ingots nke dị sentimita isii ma ọ bụ sentimita asatọ?
A5:N'ezie. Ikpo okwu a na-akwado ihe ndị dị n'ime ya ruru sentimita iri na abụọ, nwere ikesa otu ụdị osisi ahụ, nakwa usoro mmegharị ya buru ibu.
Gbasara anyị
XKH bụ ọkachamara n'ihe gbasara mmepe teknụzụ dị elu, mmepụta, na ire nke iko anya pụrụ iche na ihe kristal ọhụrụ. Ngwaahịa anyị na-enye ngwa eletrọnịkị anya, ngwa eletrọnịkị ndị ahịa, na ndị agha. Anyị na-enye ihe ndị mejupụtara anya Sapphire, mkpuchi anya ekwentị mkpanaaka, seramiiki, LT, Silicon Carbide SIC, Quartz, na wafers kristal semiconductor. Site na ahụmịhe ọkachamara na ngwa ọgbara ọhụrụ, anyị na-eme nke ọma na nhazi ngwaahịa na-abụghị ọkọlọtọ, na-achọ ịbụ ụlọ ọrụ teknụzụ dị elu nke ihe optoelectronic.
