Ngwa Sapphire Ingot Uto Ngwa Czochralski CZ maka imepụta 2inch-12inch sapphire wafers

Nkọwa dị mkpirikpi:

Ngwa Sapphire Ingot Growth Equipment (Ụzọ Czochralski) bụ usoro mbelata nke emebere maka ịdị ọcha dị elu, obere ntụpọ sapphire otu kristal. Usoro Czochralski (CZ) na-enyere aka njikwa ziri ezi nke mkpụrụ kristal na-adọta ọsọ (0.5-5 mm / h), ntụgharị ntụgharị (5-30 rpm), na gradients okpomọkụ na iridium crucible, na-emepụta kristal axisymmetric ruo sentimita 12 (300 mm) na dayameta. Akụrụngwa a na-akwado njikwa kristal C/A-ụgbọ elu, na-eme ka uto nke ngwa anya, ọkwa eletrọnịkị, na sapphire doped (dịka ọmụmaatụ, Cr³⁺ ruby, Sapphire kpakpando Ti³⁺).

XKH na-enye ngwọta njedebe na njedebe, gụnyere nhazi ngwá ọrụ (2-12-inch wafer mmepụta), nhazi usoro (njupụta njupụta <100/cm²), na ọzụzụ teknụzụ, yana mmepụta kwa ọnwa nke 5,000+ wafers maka ngwa dị ka ihe ntanetị LED, GaN epitaxy, na nkwakọ ngwaahịa semiconductor.

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Atụmatụ

Ụkpụrụ ọrụ

Usoro CZ na-arụ ọrụ site na usoro ndị a:
1. Ihe na-agbaze Raw Materials: A na-agbaze Al₂O₃ dị elu (dị ọcha> 99.999%) na iridium crucible na 2050-2100 ° C.
2. Mkpụrụ Okwu Mmalite: A na-agbada kristal mkpụrụ n'ime agbaze, na-esote ngwa ngwa ịdọrọ n'olu (dayameta <1 mm) iji kpochapụ dislocations.
3. Nhazi ubu na uto buru ibu: A na-ebelata ọsọ ịdọrọ na 0.2-1 mm / h, jiri nwayọọ nwayọọ gbasaa dayameta kristal na nha nke ebumnuche (dịka, 4-12 sentimita).
4. Annealing na Cooling: A na-eme ka kristal dị jụụ na 0.1-0.5 ° C / min iji belata nrụgide okpomọkụ na-akpata mgbawa.
5. Ụdị kristal dakọtara:
Ọkwa eletrọnịkị: ihe ndị mejupụtara semiconductor (TTV <5 μm)
Ọkwa ngwa anya: UV laser windo (nfefe>90%@200 nm)
Ụdị Doped: Ruby (Cr³⁺ 0.01-0.5 wt.%), tubing sapphire na-acha anụnụ anụnụ

Ngwa Sistemụ Isi

1. Sistemụ agbaze
Iridium Crucible: Na-eguzogide 2300°C, na-eguzogide corrosion, dakọtara na nnukwu agbaze (100-400 n'arọ).
Ọkụ na-ekpo ọkụ induction: njikwa okpomọkụ kwụụrụ onwe ya n'ọtụtụ mpaghara (± 0.5°C), gradients kachasị mma.

2. Ịdọrọ na ntụgharị Sistemu
Servo Motor zuru oke: Mkpebi 0.01 mm / h, ntụgharị ntụgharị <0.01 mm.
Akara Igwe Ọdụdọ Magnetik: Mgbasa ozi na-abụghị kọntaktị maka uto na-aga n'ihu (> awa 72).

3. Thermal Control System
PID Mechie-Loop Control: Ndozi ike n'ezie (50-200 kW) iji mee ka mpaghara okpomọkụ kwụsie ike.
Nchedo gas inert: ngwakọta Ar / N₂ (99.999% ịdị ọcha) iji gbochie oxidation.

4. Automation na nlekota oru
Nleba anya dayameta CCD: nzaghachi n'ezie (nkenke ± 0.01 mm).
Infrared Thermography: Na-enyocha morphology interface siri ike.

Ntụle usoro CZ vs. KY

Parameter	Usoro CZ	Usoro KY
Max. kristal Size	12 sentimita (300mm)	400 mm (mkpụrụ osisi pear)
Density adịghị mma	<100/cm²	<50/cm²
Ọnụego uto	0,5-5 mm / h	0.1-2 mm / h
Oriri ike	50-80 kWh / n'arọ	80-120 kWh / n'arọ
Ngwa	Igwe ọkụ LED, GaN epitaxy	Window ngwa anya, nnukwu ingots
Ọnụ ego	Ọ dị oke oke (ego akụrụngwa dị elu)	Usoro dị elu (usoro mgbagwoju anya)

Ngwa igodo

Ụlọ ọrụ Semiconductor 1
GaN Epitaxial Substrates: 2-8-inch wafers (TTV <10 μm) maka Micro-LEDs na diodes laser.
SOI Wafers: Ịdị nro dị n'elu <0.2 nm maka ibe agbakwunyere 3D.

2. Optoelectronics
UV Laser Windows: na-eguzogide njupụta ike 200 W/cm² maka ngwa anya lithography.
Ngwa infrared: ọnụọgụ absorption <10⁻³ cm⁻¹ maka onyonyo ọkụ.

3. Eletrọnịkị ndị ahịa
Igwefoto Smartphone mkpuchi: Mohs hardness 9, 10 × nguzogide nguzogide.
Ngosipụta Smartwatch: Ọkpụrụkpụ 0.3-0.5 mm, nnyefe>92%.

4. Nchekwa na Aerospace
Windows Reactor Nuklia: Nkwekọrịta radieshon ruru 10¹⁶ n/cm².
Ego Laser ike dị elu: nrụrụ ọkụ <λ/20@1064 nm.

Ọrụ XKH

1. Nhazi akụrụngwa
Nhazi Chamber Scalable: Φ200-400 mm nhazi maka mmepụta wafer 2-12-inch.
Mgbanwe Doping: Na-akwado obere ụwa (Er/Yb) na mgbanwe-metal (Ti/Cr) doping maka akụrụngwa optoelectronic ahaziri.

2. Nkwado ngwụcha ruo ngwụcha
Nkwalite usoro: Ezi ntụziaka akwadoro (50+) maka LED, ngwaọrụ RF, na ngwa radieshon siri ike.
Netwọk ọrụ zuru ụwa ọnụ: 24/7 nchọpụta ime ime na mmezi saịtị yana akwụkwọ ikike ọnwa 24.

3. Nhazi nke ala
Nrụpụta Wafer: Iberibe, egweri, na polishing maka 2–12-inch wafers (C/A-ụgbọelu).
Ngwaahịa ndị agbakwunyere ọnụ ahịa:
Ngwa ngwa anya: Window UV/IR (okpukpu 0.5-50 mm).
Ngwa ọla-ọla: Cr³⁺ ruby (GIA-gbaara), Sapphire kpakpando Ti³⁺.

4. Nka nka
Asambodo: EMI na-akwado wafers.
Ikikere: Ikike isi na usoro CZ ọhụrụ.

Mmechi

Ngwa usoro CZ na-enye ndakọrịta nnukwu akụkụ, ọnụego ntụpọ dị ala, yana nkwụsi ike usoro dị elu, na-eme ka ọ bụrụ akara ụlọ ọrụ maka LED, semiconductor, na ngwa nchekwa. XKH na-enye nkwado zuru oke site na ntinye ngwá ọrụ na nhazi post-uto, na-enyere ndị ahịa aka imezu ọnụ ahịa dị oke ọnụ ahịa, mmepụta kristal sapphire dị elu.