Enwere ike iji ihe e ji ede ihe n'ụdị PSS 2inch 4inch 6inch ICP dry etching maka ibe LED

Enwere ike iji ihe e ji achọ ihe n'ụdị sapphire nke PSS 2inch 4inch 6inch ICP dry etching maka ibe LED Foto a na-egosi

Nkọwa Dị Mkpirikpi:

Ihe e ji aka dee sapphire (PSS) bụ ihe e ji aka dee nke e ji usoro lithography na etching mepụta obere na nano. A na-ejikarị ya eme ihe n'ịmepụta LED (ọkụ na-ewepụta diode) iji melite arụmọrụ mwepụta ìhè site na nhazi nhazi elu, si otú a na-eme ka ìhè na arụmọrụ nke LED dịkwuo mma.

Zitere anyị ozi-e

atụmatụ

Isi njirimara

1. Njirimara ihe: Ihe e ji mee ihe n'elu ya bụ otu kristal sapphire (Al₂O₃), nke nwere ike siri ike, oke okpomọkụ na nkwụsi ike kemịkalụ.

2. Nhazi elu: A na-emepụta elu ahụ site na fotolithography na ịkụnye ya n'ime ihe owuwu micro-nano oge niile, dị ka cones, pyramid ma ọ bụ usoro hexagonal.

3. Arụmọrụ anya: Site na nhazi nhazi elu, a na-ebelata ngosipụta ìhè zuru oke na interface ahụ, a na-emekwa ka arụmọrụ mwepụta ìhè ka mma.

4. Arụmọrụ okpomọkụ: Sapphire substrate nwere ezigbo njikwa okpomọkụ, nke dabara adaba maka ngwa LED dị ike.

5. Nkọwapụta nha: Nha ndị a na-ahụkarị bụ sentimita abụọ (50.8mm), sentimita anọ (100mm) na sentimita isii (150mm).

Isi ebe ngwa

1. Mmepụta LED:
Mmeziwanye arụmọrụ mwepụta ọkụ: PSS na-ebelata mfu ọkụ site na nhazi ụkpụrụ, na-eme ka ìhè LED na arụmọrụ na-enwu nke ọma.

Mmeziwanye ogo uto epitaxial: Nhazi a haziri ahazi na-enye ntọala uto ka mma maka oyi akwa epitaxial GaN ma na-eme ka arụmọrụ LED ka mma.

2. Diode laser (LD):
Lasers dị ike: Ọkwa okpomọkụ dị elu na nkwụsi ike nke PSS dabara adaba maka diodes laser dị ike, na-eme ka arụmọrụ okpomọkụ na ntụkwasị obi ka mma.

Ọkụ dị ala: Mee ka uto epitaxial dịkwuo mma, belata ọwa mmiri nke diode laser, ma melite arụmọrụ.

3. Ihe nchọpụta foto:
Mmetụta Dị Elu: Mgbasa ọkụ dị elu na obere njupụta ntụpọ nke PSS na-eme ka mmetụta na ọsọ nzaghachi nke fotodetector dịkwuo mma.

Nzaghachi spectral sara mbara: dabara adaba maka nchọpụta fotoelectric na ultraviolet ruo n'ókè a na-ahụ anya.

4. Ngwaọrụ eletrọniki ike:
Ike iguzogide voltaji dị elu: Mkpuchi elu na nkwụsi ike okpomọkụ nke Sapphire dị mma maka ngwaọrụ ike voltaji dị elu.

Mwepụ okpomọkụ nke ọma: Ọkwa okpomọkụ dị elu na-eme ka arụmọrụ mwepụ okpomọkụ nke ngwaọrụ ike dịkwuo mma ma na-agbatị ndụ ọrụ.

5. Ngwaọrụ Rf:
Arụmọrụ ugboro ugboro dị elu: Mfu dielectric dị ala na nkwụsi ike okpomọkụ dị elu nke PSS dabara adaba maka ngwaọrụ RF ugboro ugboro dị elu.

Mkpọtụ dị ala: Nha dị larịị na obere ntụpọ na-ebelata mkpọtụ ngwaọrụ ma melite mma akara.

6. Ihe mmetụta biosensọ:
Nchọpụta mmetụta dị elu: Mbufe ọkụ dị elu na nkwụsi ike kemịkalụ nke PSS dabara adaba maka biosensors nwere mmetụta dị elu.

Ndakọrịta Bio: Ndakọrịta bio nke sapphire na-eme ka ọ dị mma maka ngwa ahụike na nchọpụta bio.
Ihe e ji sapphire mee nke e ji ihe dị n'ụdị ya mee (PSS) nke nwere ihe GaN epitaxial:

Ihe e ji aka mee nke e ji aka mee nke e ji aka mee (PSS) bụ ihe e ji aka mee nke ọma maka uto epitaxial nke GaN (gallium nitride). Ihe e ji aka mee nke sapphire dị nso na GaN, nke nwere ike ibelata enweghị njikọ na ntụpọ na uto epitaxial. Ọdịdị micro-nano nke elu PSS abụghị naanị na ọ na-eme ka arụmọrụ mwepụta ìhè ka mma, kamakwa ọ na-eme ka ịdị mma kristal nke oyi akwa epitaxial nke GaN ka mma, si otú a na-eme ka arụmọrụ na ntụkwasị obi nke LED ka mma.

Teknụzụ paramita

ihe	Ihe e ji aka dee sapphire (2~6inch)
Dayameta	50.8 ± 0.1 mm	100.0 ± 0.2 mm	150.0 ± 0.3 mm
Ọkpụrụkpụ	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Nhazi Elu	C-plane (0001) dị n'akụkụ na-aga n'akụkụ M-axis (10-10) 0.2 ± 0.1°
	C-plane (0001) gbapụrụ iche na-aga n'akụkụ A (11-20) 0 ± 0.1°
Nhazi Ala Dị Elu nke Mbụ	A-Ụgbọelu (11-20) ± 1.0°
Ogologo Dị larịị nke Mbụ	16.0 ± 1.0 mm	30.0 ± 1.0 mm	47.5 ± 2.0 mm
R-Plane	Elekere itoolu
Mmecha Elu Ihu	E ji ụkpụrụ mee ihe
Mmecha Elu Azụ	SSP: Ala dị mma, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm
Akara Laser	Azụ akụkụ
TV	≤8μm	≤10μm	≤20μm
ỤTA	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Mwepu nke Ọnụọgụ	≤2 mm
Nkọwapụta Ụkpụrụ	Ọdịdị Ọdịdị	Dome, Kọn, Pyramid
	Ogologo Ụkpụrụ	1.6~1.8μm
	Dayameta Ụkpụrụ	2.75~2.85μm
	Oghere Ụkpụrụ	0.1~0.3μm

XKH bụ ọkachamara n'inye ihe ndị e ji aka rụọ nke e ji sapphire eme nke a haziri nke ọma (PSS) site na nkwado teknụzụ na ọrụ mgbe erechara ihe iji nyere ndị ahịa aka inweta ihe ọhụrụ dị irè n'ọhịa LED, ihe ngosi na optoelectronics.

1. Ọnye PSS dị elu: Ihe ndị e ji aka mee dị ka sapphire n'ụdị dị iche iche (2 ", 4", 6") iji mezuo mkpa nke ngwaọrụ LED, ihe ngosi na optoelectronic.

2. Nhazi ahaziri ahazi: Hazie nhazi micro-nano elu (dịka cone, pyramid ma ọ bụ hexagonal array) dịka mkpa ndị ahịa si dị iji mee ka arụmọrụ mwepụta ìhè ka mma.

3. Nkwado teknụzụ: Nye nhazi ngwa PSS, nhazi usoro na ndụmọdụ teknụzụ iji nyere ndị ahịa aka imeziwanye arụmọrụ ngwaahịa.

4. Nkwado uto epitaxial: E nyere PSS nke ejikọtara ya na ihe GaN epitaxial iji hụ na akwa epitaxial dị elu na-eto.

5. Nnwale na asambodo: Nye akụkọ nyocha mma PSS iji hụ na ngwaahịa ndị ahụ ruru ụkpụrụ ụlọ ọrụ.