Gịnị ka TTV, BOW, WARP, na TIR pụtara na Wafers?

Mgbe anyị na-enyocha wafer silicon semiconductor ma ọ bụ ihe ndị e ji ihe ndị ọzọ mee, anyị na-ahụkarị ihe ngosi teknụzụ dịka: TTV, BOW, WARP, na ikekwe TIR, STIR, LTV, na ndị ọzọ. Kedụ paramita ndị a na-anọchite anya?

TTV — Mgbanwe Oke Ọkpụrụkpụ Ya
ỤTA — ỤTA
WARP — Warp
TIR — Mkpokọta Ọgụgụ Egosiri
STIR — Mkpokọta Ọgụgụ Ebe E Gosiri
LTV — Mgbanwe nke ọkpụrụkpụ mpaghara

1. Mgbanwe Oke Ọkpụrụkpụ — TTV

Ọdịiche dị n'etiti oke ọkpụrụkpụ na nke kacha nta nke wafer ma e jiri ya tụnyere ebe ntụaka mgbe a na-ejikọta wafer ahụ na nso ya. A na-egosipụta ya n'ọtụtụ ebe na micrometers (μm), nke a na-egosipụtakarị dị ka: ≤15 μm.

2. Ụta — Ụta

Nkewa dị n'etiti opekempe na oke anya site na etiti ebe a na-akpọ wafer ruo na ebe a na-akpọ wafer mgbe wafer dị n'ọnọdụ enweghị ihe mgbochi. Nke a gụnyere ma ihe mkpuchi dị nkọ (ụta na-adịghị mma) na ihe mkpuchi dị nkọ (ụta dị mma). A na-egosipụtakarị ya na micrometers (μm), nke a na-anọchite anya ya dị ka: ≤40 μm.

3. Warp — Warp

Nkewa dị n'etiti anya kacha nta na nke kachasị site na elu wafer ruo na mbara ntụaka (ọkachasị elu azụ nke wafer) mgbe wafer ahụ nọ n'ọnọdụ enweghị ihe mgbochi. Nke a gụnyere ma concave (negative warp) na convex (positive warp). A na-egosipụta ya n'ọtụtụ ebe na micrometers (μm), nke a na-anọchite anya ya dị ka: ≤30 μm.

4. Ngụkọta Akwụkwọ Egosiri — TIR

Mgbe a kpọchiri wafer ahụ ma nwee njikọ chiri anya, site na iji usoro ntụaka nke na-ebelata mkpokọta nke ihe niile dị n'ime mpaghara mma ma ọ bụ mpaghara mpaghara akọwapụtara na elu wafer ahụ, TIR bụ ọdịiche dị n'etiti anya kachasị na nke kacha nta site na elu wafer ahụ gaa na nke a.

Dabere na ahụmịhe miri emi na nkọwapụta ihe semiconductor dịka TTV, BOW, WARP, na TIR, XKH na-enye ọrụ nhazi wafer ahaziri ahazi nke dabara na ụkpụrụ ụlọ ọrụ siri ike. Anyị na-enye ma na-akwado ọtụtụ ihe dị elu dị ka sapphire, silicon carbide (SiC), silicon wafers, SOI, na quartz, na-ahụ na ọ dị larịị, ọkpụrụkpụ na ịdị mma elu maka ngwa dị elu na optoelectronics, ngwaọrụ ike, na MEMS. Tụkwasị anyị obi na anyị ga-enye ngwọta ihe a pụrụ ịdabere na ya na igwe nhazi ziri ezi nke na-emezu ihe ị chọrọ maka imewe kacha sie ike.