Kedu ihe TTV, BOW, WARP, na TIR pụtara na Wafers?

Mgbe anyị na-enyocha semiconductor silicon wafers ma ọ bụ ihe ndị e ji ihe ndị ọzọ mee, anyị na-ezutekarị ihe ngosi nka dị ka: TTV, BOW, WARP, na ikekwe TIR, STIR, LTV, na ndị ọzọ. Kedu paramita ndị a na-anọchi anya?

TTV — Mkpokọta ịdị arọ dị iche iche
ỤTA - Ụta
WARP - Warp
TIR - Ngụkọta ọnụ ọgụgụ egosipụtara
STIR - Ngụkọta saịtị egosipụtara Ọgụgụ
LTV - Mgbanwe ịdị arọ mpaghara

1. Mkpokọta ịdị arọ dị iche iche - TTV

Ọdịiche dị n'etiti oke na kacha nta nke wafer n'ihe gbasara ụgbọ elu ntụaka mgbe a na-ejikọta wafer na na nso nso. A na-egosipụtakarị ya na micrometers (μm), na-anọchi anya ya dị ka: ≤15 μm.

2. Ụta - ỤTA

Ngbanwe dị n'etiti opekempe na nke kachasị anya site na etiti etiti nke wafer elu na ụgbọ elu ntụaka mgbe wafer nọ na ọnọdụ efu (enweghị ike). Nke a na-agụnye ma concave (ụta ọjọọ) na convex (ụta ziri ezi). A na-egosipụtakarị ya na micrometers (μm), na-anọchi anya ya dị ka: ≤40 μm.

3. Warp - WARP

Ngbanwe dị n'etiti kacha nta na nke kachasị anya site na elu wafer gaa na ụgbọ elu ntụaka (na-emekarị n'azụ azụ nke wafer) mgbe wafer dị na ọnọdụ efu (enweghị ike). Nke a na-agụnye ma concave (negative warp) na convex (positive warp) ikpe. A na-egosipụtakarị ya na micrometers (μm), na-anọchi anya ya dị ka: ≤30 μm.

4. Ngụkọta ọnụ ọgụgụ egosipụtara - TIR

Mgbe a na-amachi wafer na nso nso, na-eji ụgbọ elu ntụaka nke na-ebelata nchikota nkwụsị nke isi ihe niile dị n'ime ebe dị mma ma ọ bụ mpaghara mpaghara akọwapụtara na elu wafer, TIR bụ ọdịiche dị n'etiti oke na kacha nta site na elu wafer na ụgbọ elu a.

Tọrọ ntọala na nka miri emi na nkọwapụta ihe semiconductor dị ka TTV, BOW, WARP na TIR, XKH na-enye ọrụ nhazi wafer nke ọma nke ahaziri na ụkpụrụ ụlọ ọrụ siri ike. Anyị na-enye ma na-akwado ọtụtụ ihe dị elu dị elu gụnyere sapphire, silicon carbide (SiC), silicon wafers, SOI, na quartz, na-eme ka ịdị larịị pụrụ iche, nha nha anya, na ịdị mma elu maka ngwa dị elu na optoelectronics, ngwaọrụ ike, na MEMS. Tụkwasa anyị obi ka anyị wepụta ihe ngwọta ihe a pụrụ ịdabere na ya na nhazi nke ọma nke na-egbo mkpa imewe gị kacha achọ.