Achịcha SOI (Silicon-On-Insulator)na-anọchite anya ihe semiconductor pụrụ iche nke nwere akwa silicon dị gịrịgịrị nke e guzobere n'elu oyi akwa oxide na-egbochi ihe. Ọdịdị sandwich pụrụ iche a na-enye nkwalite arụmọrụ dị mkpa maka ngwaọrụ semiconductor.
Nhazi ihe owuwu:
Ibe Ngwaọrụ (Silikọn Elu):
Ọkpụrụkpụ ya sitere na ọtụtụ nanomita ruo na micromita, nke na-eje ozi dị ka oyi akwa na-arụ ọrụ maka imepụta transistor.
Akwa Oxide E liri n'ala (Igbe):
Ihe mkpuchi silicon dioxide (0.05-15μm dị n'obosara) nke na-ekewapụ oyi akwa ngwaọrụ ahụ site na ihe ndị dị n'okpuru ala.
Ala Ntọala:
Silikọn buru ibu (100-500μm dị ọkpụrụkpụ) na-enye nkwado igwe.
Dịka teknụzụ usoro nkwadebe si dị, enwere ike kewaa ụzọ usoro bụ isi nke SOI silicon wafers dị ka: SIMOX (teknụzụ mwepụ oxygen injection), BESOI (teknụzụ njikọta), na Smart Cut (teknụzụ mwepụ ọgụgụ isi).
SIMOX (teknụzụ nkewapụ oxygen) bụ usoro nke gụnyere ịgbanye ion oxygen dị elu n'ime wafer silicon iji mepụta oyi akwa silicon dioxide, nke a na-etinye n'ime okpomọkụ dị elu iji dozie ntụpọ lattice. Isi ya bụ ntinye oxygen ion ozugbo iji mepụta oxygen oyi akwa kpuchiri ekpuchi.
BESOI (Nkà na ụzụ njikọta ihe dị mkpa) gụnyere ijikọ wafer silicon abụọ wee mee ka otu n'ime ha dị nro site na igwe e ji eme ihe na ịkpụcha kemịkalụ iji mepụta usoro SOI. Isi ihe dị na njikọ na ịchacha.
Smart Cut (teknụzụ Intelligent Exfoliation) na-emepụta oyi akwa mwepụ site na ịgba hydrogen ion. Mgbe ejikọtara ya, a na-eme ọgwụgwọ okpomọkụ iji wepụ wafer silicon n'akụkụ oyi akwa hydrogen ion, na-emepụta oyi akwa silicon dị gịrịgịrị. Isi ya bụ iwepụ hydrogen injection.
Ugbu a, e nwere teknụzụ ọzọ a maara dị ka SIMBOND (teknụzụ njikọ oxygen), nke Xinao mepụtara. N'ezie, ọ bụ ụzọ nke na-ejikọta mwepụ nkesa oxygen na teknụzụ njikọ. N'ụzọ teknụzụ a, a na-eji oxygen a gbanyere agbaze dị ka ihe mgbochi dị gịrịgịrị, oyi akwa oxygen a kpuchiri ekpuchi bụkwa oyi akwa oxidation okpomọkụ. Ya mere, ọ na-emeziwanye paramita dịka otu silicon dị n'elu na ịdị mma nke oyi akwa oxygen a kpuchiri ekpuchi.
Wafers silicon SOI nke e ji ụzọ teknụzụ dị iche iche mepụta nwere paramita arụmọrụ dị iche iche ma dabara adaba maka ọnọdụ ngwa dị iche iche.
Ihe ndị a bụ nchịkọta tebụl nke uru arụmọrụ dị mkpa nke wafers silicon SOI, yana atụmatụ teknụzụ ha na ọnọdụ ngwa n'ezie. Ma e jiri ya tụnyere silicon nkịtị, SOI nwere uru dị ukwuu na nguzozi nke ọsọ na oriri ike. (PS: Arụmọrụ nke FD-SOI 22nm dị nso na nke FinFET, ọnụ ahịa ya ebelatakwara site na 30%.)
| Uru Arụmọrụ | Ụkpụrụ Nkà na ụzụ | Ngosipụta Pụrụ Iche | Ihe Ndị A Na-ahụkarị Maka Ngwa |
| Ike Parasitic Dị Ala | Ihe mkpuchi (IGBO) na-egbochi njikọ chaja n'etiti ngwaọrụ na ihe mkpuchi | Ọsọ mgbanwe mụbara site na 15%-30%, oriri ike belatara site na 20%-50% | 5G RF, Ngwakọta nkwukọrịta ugboro ugboro dị elu |
| Mbelata mmiri na-agbapụta | Oyi akwa mkpuchi na-egbochi ụzọ mmiri na-agbapụta | Ike mmiri na-ebelata site na >90%, ndụ batrị agbatịkwuru | Ngwaọrụ IoT, Ngwaọrụ Elektrọnik a na-eyi |
| Ike Radiation Kachasị Elu | Oyi akwa mkpuchi na-egbochi mkpokọta ụgwọ nke radieshon kpatara | Nnagide radieshọn mụbara ugboro 3-5, belata nsogbu otu ihe omume | Ụgbọelu, Ngwa ụlọ ọrụ nuklia |
| Njikwa Mmetụta Ọwa Dị Mkpirikpi | Oyi akwa silicon dị gịrịgịrị na-ebelata nnyonye anya ubi eletrik n'etiti drain na isi iyi | Nkwụsi ike voltaji dị mma, mkpụda ala dị n'okpuru ebe a na-eme nke ọma | Ibe mgbagha node dị elu (<14nm) |
| Njikwa Okpomọkụ Ka Mma | Ihe mkpuchi mkpuchi na-ebelata njikọ ikuku okpomọkụ | Mkpokọta okpomọkụ dị obere karịa pasent 30, okpomọkụ ọrụ dị ala karịa 15-25°C | 3D ICs, ngwa eletrọniki ụgbọala |
| Nhazi Ugboro Elu | Mbelata ikike parasitic na mmụba nke mmegharị ụgbọelu | Nkwụsịtụ dị ala karịa 20%, na-akwado nhazi mgbaàmà > 30GHz | Nkwukọrịta mmWave, ibe nkwukọrịta satịlaịtị |
| Mgbanwe Nhazi Karịrị Elu | Achọghị doping nke ọma, ọ na-akwado ịkpa ókè azụ | Usoro usoro pere mpe nke 13%-20%, njupụta njikọta dị elu nke 40% | ICs agwakọtara agbakọta, sensọ |
| Mgbochi mkpọchi | Njikọ PN parasitic na-egbochi oyi akwa ahụ | Oke njedebe ọkụ eletrik amụbaala ruo >100mA | Ngwaọrụ ike voltaji dị elu |
Na mkpokọta, uru kachasị nke SOI bụ: ọ na-agba ọsọ ọsọ ma na-arụ ọrụ nke ọma karịa.
N'ihi njirimara arụmọrụ ndị a nke SOI, o nwere ọtụtụ ngwa n'ọhịa ndị chọrọ arụmọrụ ugboro ugboro dị mma na arụmọrụ oriri ike.
Dịka egosiri n'okpuru, dabere na oke nke ubi ngwa kwekọrọ na SOI, a pụrụ ịhụ na RF na ngwaọrụ ike bụ ihe mejupụtara ọtụtụ ahịa SOI.
| Ubi Ngwa | Ahịa òkè |
| RF-SOI (Ugboro redio) | Pasentị iri anọ na ise |
| Ike SOI | Pasentị iri atọ |
| FD-SOI (Emebichaala nke ọma) | 15% |
| SOI anya | 8% |
| SOI sensọ | 2% |
Site na mmụba nke ahịa dịka nkwukọrịta ekwentị na ịkwọ ụgbọala n'onwe ya, a na-atụkwa anya na SOI silicon wafers ga-anọgide na-eto eto ụfọdụ.
XKH, dịka onye na-emepụta ihe ọhụrụ na teknụzụ wafer Silicon-On-Insulator (SOI), na-enye ngwọta SOI zuru oke site na R&D ruo mmepụta olu site na iji usoro mmepụta kachasị elu n'ụlọ ọrụ. Nchịkọta ọrụ anyị zuru oke gụnyere wafer SOI 200mm/300mm nke na-ekpuchi ụdị RF-SOI, Power-SOI na FD-SOI, yana njikwa mma siri ike na-ahụ na arụmọrụ pụrụ iche (nha nhata ọkpụrụkpụ n'ime ±1.5%). Anyị na-enye ngwọta ahaziri ahazi yana ọkpụrụkpụ oyi akwa oxide (BOX) nke sitere na 50nm ruo 1.5μm na nkọwapụta iguzogide dị iche iche iji mezuo ihe achọrọ. Site na iji afọ 15 nke ahụmịhe teknụzụ na usoro ọkọnọ zuru ụwa ọnụ siri ike, anyị na-enye ihe ndị dị elu SOI dị elu nye ndị na-emepụta semiconductor kachasị elu n'ụwa niile, na-eme ka mmepụta chip kachasị elu na nkwukọrịta 5G, ngwa eletrọnịkị ụgbọ ala, na ngwa ọgụgụ isi artificial.
XKH's SOI wafers:
Oge ozi: Eprel-24-2025