Ngwa anya-ọkwa Silicon Carbide Waveguide AR Glass: Nkwadebe nke ihe mgbochi ọkara dị ọcha dị elu

N'akụkụ azụ nke mgbanwe AI, iko AR na-eji nwayọọ nwayọọ na-abanye n'uche ọha. Dị ka ihe atụ nke na-agwakọta nke ọma na ụwa n'ezie, enyo AR dị iche na ngwaọrụ VR site n'ikwe ka ndị ọrụ ghọta ma onyonyo a tụrụ anya n'usoro dijitalụ yana ìhè gburugburu gburugburu n'otu oge. Iji nweta ọrụ abụọ a — na-ebupụta onyonyo microdisplay n'ime anya ka ị na-echekwa nnyefe ọkụ mpụga — enyo enyo silicon carbide (SiC) nke dabere na AR na-eji ihe owuwu waveguide (lightguide). Nhazi a na-eme ka ntule dị n'ime ya nwee ike ibunye onyonyo, dị ka nnyefe eriri anya, dị ka e gosiri na schematic eserese.

Dị ka ọ na-adịkarị, otu mkpụrụ osisi 6-inch dị ọcha dị ọcha nwere ike ịmịpụta enyo abụọ, ebe mkpụrụ nke anụ ọhịa 8 na-anabata 3-4 ụzọ abụọ. Nkwenye nke ihe SiC na-enye uru atọ dị egwu:

1. Ndekọ ntugharị pụrụiche (2.7): Na-enyere> 80° ngalaba nlele zuru oke (FOV) na otu oyi akwa oghere, na-ewepụ arịa egwurugwu na-emekarị n'ụdị AR.
2. Integrated tri-color (RGB) waveguide: Dochie nchịkọta ebili mmiri nke ọtụtụ oyi akwa, na-ebelata nha na ịdị arọ ngwaọrụ.
3. Nrụpụta ọkụ kachasị elu (490 W/m·K): Na-ebelata mkpokọta okpomọkụ na-ebute mbibi anya.

Uru ndị a akwalitela ahịa ahịa siri ike maka iko AR dabere na SiC. SiC-ọcha anya a na-eji eme ihe na-enwekarị kristal nke ọkara mkpuchi (HPSI) dị oke ọcha, nke ihe nkwado siri ike chọrọ na-enye aka na ọnụ ahịa dị elu ugbu a. N'ihi ya, mmepe nke HPSI SiC substrates bụ ihe dị mkpa.

1. Synthesis nke Semi-Insulating SiC ntụ ntụ
Mmepụta nke ụlọ ọrụ mmepụta ihe na-ejikarị arụ ọrụ na-agbasa onwe ya (SHS), usoro na-achọ njikwa nke ọma:

• Akụrụngwa: 99.999% carbon / silicon powders dị ọcha nwere nha nha nke 10-100 μm.
• Ịdị ọcha na-adịghị ahụkebe: Ihe eserese eserese na-eme ka ọ dị ọcha dị elu iji belata mgbasa adịghị ọcha ọla.
• Njikwa ikuku: 6N-dị ọcha argon (ya na ndị na-eme ka ọ dị ọcha) na-egbochi ntinye nitrogen; trace HCl/H₂ gas nwere ike iwebata ka ọ gbanwee ogige boron wee belata nitrogen, ọ bụ ezie na itinye uche H₂ chọrọ njikarịcha iji gbochie corrosion graphite.
• Ụkpụrụ akụrụngwa: Igwe ọkụ synthesis ga-enwetarịrị <10⁻⁻ Pa base vacuum, yana ụkpụrụ nyocha siri ike.

2. Ihe ịma aka Growth Crystal
Uto HPSI SiC na-ekekọrịta ụdị ịdị ọcha chọrọ:

• Nri nri: 6N+-ọcha SiC ntụ ntụ nwere B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O n'okpuru oke oke, yana obere alkali ọla (Na/K).
• Sistemụ gas: 6N argon/hydrogen ngwakọta na-eme ka mgbochi ike.
• Akụrụngwa: Nfuli molecular na-eme ka oghere ultrahigh (<10⁻⁶ Pa); tupu ọgwụgwọ crucible na nitrogen ihicha dị oké mkpa.

Ihe ọhụrụ na-ahazi mkpụrụ osisi
E jiri ya tụnyere silicon, SiC na-eto ogologo ogologo oge na nrụgide dị n'ime ya (na-akpata mgbawa / nchichi ihu) chọrọ nhazi dị elu:

• Iberibe Laser: Na-abawanye mkpụrụ sitere na wafer 30 (350 μm, waya waya) ruo> 50 wafers kwa 20-mm boule, na-enwe ike 200-μm thinning. Oge nhazi na-agbada site na 10-15 ụbọchị (waya saw) ruo <20 min/wafer maka kristal 8-inch.

3. Mmekọrịta ụlọ ọrụ

Ndị otu Meta's Orion asụla ụzọ nkuchi SiC anya nkuchi waveguide, na-akpali itinye ego R&D. Mmekọrịta ndị isi gụnyere:

• TankeBlue & MUDI Micro: Mmepe njikọ nke AR diffractive waveguide lenses.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Nkwekọrịta dị mkpa maka njikọta nke eriri ọkọnọ AI/AR.

Atụmatụ ahịa na-eme atụmatụ nkeji AR dabere na 500,000 SiC kwa afọ site na 2027, na-eri mkpụrụ 250,000 6-inch (ma ọ bụ 125,000 8-inch). Ọnọdụ a na-emesi ike ọrụ mgbanwe SiC na AR optics ọgbọ na-abịa.

XKH bụ ọkachamara n'ịnye mkpụrụ osisi SiC dị elu nke 4H-semi-insulating (4H-SEMI) nke nwere dayameta ahaziri nke ọma sitere na 2-inch ruo 8-inch, ahaziri iji mezuo ihe achọrọ ngwa ngwa na RF, ngwa elektrọnik, na AR / VR optics. Ike anyị na-agụnye ọkọnọ olu a pụrụ ịdabere na ya, nhazi nkenke (ọkpụrụkpụ, nghazi, imecha elu), yana nhazi ụlọ zuru oke site na uto kristal ruo nchacha. E wezụga 4H-SEMI, anyị na-enyekwa ụdị 4H-N-ụdị, 4H/6H-P-ụdị, na 3C-SiC substrates, na-akwado iche iche semiconductor na optoelectronic innovations.