Nchịkọta:Anyị emepụtala ntuziaka wave lithium tantalate nke dabere na insulator nke 1550 nm, nke nwere mfu nke 0.28 dB/cm, yana ihe dị mma nke resonator mgbanaka nke nde 1.1. A mụọla itinye χ(3) na-abụghị linearity na photonics na-abụghị linear. Uru nke lithium niobate na insulator (LNoI), nke na-egosipụta ihe onwunwe χ(2) na χ(3) dị mma yana njide anya siri ike n'ihi nhazi "insulator-on", emeela ka e nwee ọganihu dị ukwuu na teknụzụ waveguide maka modulators ultrafast na integrated nonlinear photonics [1-3]. Na mgbakwunye na LN, a chọpụtakwala lithium tantalate (LT) dị ka ihe na-abụghị linear photonic. Ma e jiri ya tụnyere LN, LT nwere oke mmebi anya dị elu na windo nghọta anya sara mbara [4, 5], ọ bụ ezie na paramita anya ya, dị ka index refractive na nonlinear coefficients, yiri nke LN [6, 7]. Ya mere, LToI pụtara ìhè dị ka ihe ọzọ siri ike maka ngwa fotonik ike dị elu nke na-abụghị nke linear. Ọzọkwa, LToI na-aghọ ihe bụ isi maka ngwaọrụ nzacha ebili mmiri elu (SAW), nke dabara na teknụzụ mkpanaka na ikuku dị elu. N'ọnọdụ a, wafers LToI nwere ike ịghọ ihe a na-ahụkarị maka ngwa photonic. Agbanyeghị, ruo taa, naanị ngwaọrụ photonic ole na ole dabere na LToI ka akọpụtala, dị ka resonators microdisk [8] na mgbanwe usoro electro-optic [9]. N'akwụkwọ a, anyị na-egosi ntuziaka wave LToI dị ala na ojiji ya na resonator mgbanaka. Na mgbakwunye, anyị na-enye njirimara χ(3) na-abụghị nke linear nke ntuziaka wave LToI.
Isi Ihe Ndị Dị Mkpa:
• Na-enye wafer LToI nke dị sentimita 4 ruo sentimita 6, wafer lithium tantalate dị gịrịgịrị, nke nwere ọkpụrụkpụ oyi akwa dị n'elu site na 100 nm ruo 1500 nm, site na iji teknụzụ obodo na usoro ndị tozuru okè.
• SINOI: Wafer silicon nitride dị gịrịgịrị nke na-efu oke obere.
• SICOI: Ihe mkpuchi silicon carbide nke nwere ihe mkpuchi dị ọcha nke nwere ihe mkpuchi dị nro maka sekit silicon carbide photonic agbakwunyere.
• LTOI: Onye na-asọ mpi siri ike na wafer lithium niobate, nke nwere ihe mkpuchi lithium tantalate dị gịrịgịrị.
• LNOI: LNOI nke dị sentimita asatọ n'obosara na-akwado mmepụta nke ngwaahịa lithium niobate dị gịrịgịrị nke buru ibu.
Mmepụta na Insulator Waveguides:N'ọmụmụ ihe a, anyị jiri wafers LToI nke dị sentimita anọ. Akwa LT dị n'elu bụ ihe mkpuchi LT Y-cut nke a na-agbanwe agbanwe nke 42° maka ngwaọrụ SAW, nke ejikọtara ozugbo na ihe mkpuchi Si nwere oyi akwa thermal oxide dị sentimita 3 µm, na-eji usoro ịkpụcha smart. Foto 1(a) na-egosi echiche elu nke wafer LToI, yana ọkpụrụkpụ oyi akwa LT dị n'elu nke 200 nm. Anyị nyochachara oke elu nke oyi akwa LT dị n'elu site na iji atomik ike microscopy (AFM).
Foto nke 1.(a) Echiche elu nke wafer LToI, (b) Foto AFM nke elu nke oyi akwa LT elu, (c) Foto PFM nke elu nke oyi akwa LT elu, (d) Akụkụ nhazi nke ntuziaka waveguide LToI, (e) Agbakọọla profaịlụ ụdị TE dị mkpa, na (f) Foto SEM nke isi waveguide LToI tupu etinye SiO2 overlayer. Dịka egosiri na Foto 1 (b), oke ike elu ahụ erughị 1 nm, a hụghịkwa ahịrị ọkọ. Na mgbakwunye, anyị lere anya na ọnọdụ polarization nke oyi akwa LT elu site na iji piezoelectric response force microscopy (PFM), dịka egosiri na Foto 1 (c). Anyị kwadoro na a na-edobe polarization otu otu ọbụlagodi mgbe usoro njikọ ahụ gasịrị.
Site na iji ihe mkpuchi LToI a, anyị mepụtara ntuziaka waveguide dị ka ndị a. Nke mbụ, e tinyere akwa mkpuchi metal maka ịcha akọrọ nke LT ọzọ. Mgbe ahụ, e mere lithography electron beam (EB) iji kọwaa ụkpụrụ isi waveguide n'elu oyi akwa mkpuchi metal ahụ. Mgbe nke ahụ gasịrị, anyị bufere ụkpụrụ EB resist na oyi akwa mkpuchi metal site na ịcha akọrọ. Mgbe nke ahụ gasịrị, e ji usoro plasma etching electron cyclotron resonance (ECR) mepụta isi waveguide LToI. N'ikpeazụ, ewepụrụ oyi akwa mkpuchi metal ahụ site na usoro mmiri mmiri, e wee tinye SiO2 overlayer site na iji plasma-eme ka ikuku chemical deposition dịkwuo mma. Foto 1 (d) na-egosi akụkụ schematic nke ntuziaka waveguide LToI. Elu isi, ogologo efere, na obosara isi bụ 200 nm, 100 nm, na 1000 nm, n'otu n'otu. Rịba ama na obosara isi ahụ na-agbasa ruo 3 µm na nsọtụ waveguide maka njikọ eriri anya.
Foto nke 1 (e) na-egosi nkesa ike anya agbakọrọ nke ụdị transverse eletriki (TE) bụ isi na 1550 nm. Foto nke 1 (f) na-egosi onyonyo nke igwe elektrọn nyocha (SEM) nke isi LToI waveguide tupu etinye SiO2 overlayer.
Njirimara Nduzi Wave:Anyị buru ụzọ nyochaa njirimara mfu ahịrị site na itinye ọkụ TE-polarized site na isi iyi mfu 1550 nm nke a na-eme ka ọ dị elu n'ime LToI waveguide nke ogologo dị iche iche. Enwetara mfu mgbasa site na mkpọda nke mmekọrịta dị n'etiti ogologo waveguide na nnyefe na waveguide ọ bụla. Mfu mgbasa a tụrụ bụ 0.32, 0.28, na 0.26 dB/cm na 1530, 1550, na 1570 nm, n'otu n'otu, dịka egosiri na Foto 2 (a). Ndị na-eduzi waveguide LToI emepụtara gosipụtara arụmọrụ mfu dị ala yiri nke ndị na-eduzi waveguide LNoI nke oge a [10].
Mgbe nke ahụ gasịrị, anyị tụlere χ(3) na-abụghị ahịrị site na mgbanwe ebili mmiri nke usoro ngwakọta ebili mmiri anọ mepụtara. Anyị na-etinye ọkụ mgbapụta ebili mmiri na-aga n'ihu na 1550.0 nm na ọkụ mgbaàmà na 1550.6 nm n'ime ntuziaka ebili mmiri ogologo 12 mm. Dịka egosiri na Foto 2 (b), ike mgbaàmà ebili mmiri ìhè nke phase-conjugate (idler) mụbara ka ike ntinye na-abawanye. Ntinye dị na Foto 2 (b) na-egosi ụdị mmepụta nkịtị nke ngwakọta ebili mmiri anọ. Site na mmekọrịta dị n'etiti ike ntinye na arụmọrụ ntụgharị, anyị mere atụmatụ na paramita na-abụghị ahịrị (γ) dị ihe dị ka 11 W^-1m.
Foto nke 3.(a) Foto mikroskopu nke resonator mgbanaka e mepụtara. (b) spectra nnyefe nke resonator mgbanaka nwere paramita oghere dị iche iche. (c) spectra nnyefe nke resonator mgbanaka a tụrụ na nke Lorentzian nke nwere oghere nke 1000 nm.
Mgbe nke ahụ gasịrị, anyị mepụtara resonator mgbanaka LToI ma nyochaa njirimara ya. Foto nke 3 (a) na-egosi onyonyo microscope anya nke resonator mgbanaka e mepụtara. Resonator mgbanaka ahụ nwere nhazi "ọsọ ọsọ", nke nwere mpaghara gbagọrọ agbagọ nwere radius nke 100 µm na mpaghara kwụ ọtọ nke 100 µm n'ogologo. Obosara oghere dị n'etiti mgbanaka ahụ na isi waveguide bọs dị iche na mmụba nke 200 nm, ọkachasị na 800, 1000, na 1200 nm. Foto nke 3 (b) na-egosi spectra nnyefe maka oghere ọ bụla, na-egosi na oke mkpochapu na-agbanwe na nha oghere. Site na spectra ndị a, anyị kpebiri na oghere 1000 nm na-enye ọnọdụ njikọ dị oke mkpa, ebe ọ na-egosipụta oke mkpochapu kachasị elu nke -26 dB.
Site na iji resonator jikọtara nke ọma, anyị mere atụmatụ ihe dị mma (Q factor) site na itinye usoro nnyefe linear na Lorentzian curve, wee nweta ihe Q factor dị n'ime nke nde 1.1, dịka egosiri na Foto 3 (c). Dịka anyị maara, nke a bụ ngosipụta mbụ nke resonator mgbanaka LToI nke nwere waveguide. Nke a pụtara ìhè bụ na uru Q factor anyị nwetara dị elu karịa nke resonators microdisk LToI nke eriri fiber-coupled [9].
Mmechi:Anyị mepụtara ntuziaka waveguide LToI nke nwere mfu nke 0.28 dB/cm na 1550 nm na ihe ntụgharị Q nke ring resonator nke nde 1.1. Arụmọrụ enwetara yiri nke ndị nduzi waveguide LNoI nke ọgbara ọhụrụ nke na-efu obere oge. Na mgbakwunye, anyị nyochachara χ(3) nke ntuziaka waveguide LToI emepụtara maka ngwa ndị na-abụghị ahịrị na chip.
Oge ozi: Nọvemba-20-2024