Isi ihe dị mkpa maka nkwadebe nke Silicon Carbide Single Crystal dị elu

Ụzọ bụ isi maka nkwadebe silicon otu kristal gụnyere: Ụgbọ njem anụ ahụ (PVT), Uto Ngwọta Ngwọta Na-elu-Seeded (TSSG), na Mkpokọta Vapor Chemical (HT-CVD). N'ime ndị a, a na-anabata usoro PVT n'ọtụtụ ebe na mmepụta mmepụta ihe n'ihi ngwá ọrụ ya dị mfe, mfe nchịkwa, na obere ngwá ọrụ na ụgwọ ọrụ.

Isi nka nka maka uto PVT nke kristal Silicon Carbide

Mgbe ị na-eto kristal silicon carbide na-eji usoro Vapor Transport (PVT), akụkụ teknụzụ ndị a ga-atụlerịrị:

1. Ịdị ọcha nke ihe eserese na Ụlọ Uto: Ọdịnaya adịghị ọcha na graphite components ga-adị n'okpuru 5 × 10⁻⁶, ebe adịghị ọcha dị na mkpuchi mkpuchi ga-adị n'okpuru 10 × 10⁻⁶. Ekwesịrị idobe ihe ndị dị ka B na Al n'okpuru 0.1 × 10⁻⁻.
2. Nhọrọ nke mkpụrụ osisi Crystal Polarity ziri ezi: Nnyocha nyocha na-egosi na ihu C (0001) dabara adaba maka kristal 4H-SiC na-eto eto, ebe a na-eji ihu Si (0001) na-eto eto kristal 6H-SiC.
3. Ojiji nke kristal Mkpụrụ Off-Axis: kristal mkpụrụ na-apụ apụ nwere ike gbanwee nha anya nke uto kristal, na-ebelata ntụpọ na kristal.
4. Usoro kristal dị mma nke ọma.
5. Idokwa nkwụsi ike nke ihu ihu kristal Growth n'oge usoro uto.

Teknụzụ isi maka uto Silicon Carbide Crystal

1. Teknụzụ Doping maka Silicon Carbide ntụ ntụ
   Ime ntụ ntụ silicon carbide na oke Ce kwesịrị ekwesị nwere ike ime ka uto nke otu kristal 4H-SiC kwụsie ike. Nsonaazụ bara uru na-egosi na Ce doping nwere ike:

• Mụbaa mmụba nke kristal silicon carbide.
• Jikwaa nghazi nke uto kristal, na-eme ka ọ bụrụ otu na mgbe niile.
• Na-egbochi nhazi adịghị ọcha, na-ebelata ntụpọ na ịkwado mmepụta nke otu kristal na kristal dị elu.
• Na-egbochi corrosion azụ nke kristal ma melite otu kristal mkpụrụ.

• Teknụzụ njikwa gradient nke Axial na Radial
  Okpomọkụ axial gradient na-emetụta ụdị uto kristal na arụmọrụ. Mmụgharị okpomọkụ dị ntakịrị karịa oke nwere ike iduga nguzobe polycrystalline ma belata ọnụego uto. Axial na radial okpomọkụ gradients kwesịrị ekwesị na-eme ka uto kristal SiC dị ngwa ngwa ma na-ejigide ogo kristal kwụsiri ike.
• Teknụzụ njikwa Basal Plane Dislocation (BPD).
  Nrụrụ BPD na-ebilite mgbe nrụgide shiee na kristal karịrị oke nrụgide shiee nke SiC, na-arụ ọrụ sistemu slip. Ebe ọ bụ na BPD na-adabere na ntụzịaka uto kristal, ha na-etolite n'oge uto kristal na jụrụ oyi.
• Teknụzụ mmezi nhazi nke akụkụ vepor
  Ịbawanye ogo carbon-to-silicon na gburugburu uto bụ ihe dị irè iji mee ka uto otu-kristal kwụsie ike. Oke carbon-to-silicon dị elu na-ebelata nchịkọta nzọụkwụ buru ibu, na-echekwa ozi uto elu kristal, ma na-egbochi nhazi polytype.
• Nkà na ụzụ njikwa nrụgide dị ala
  Nchegbu n'oge uto kristal nwere ike ime ka ụgbọ elu kristal na-ehulata, na-eduga n'ịdị mma kristal na-adịghị mma ma ọ bụ ọbụna ịgbawa. Nchegbu dị elu na-abawanye nkwụsị ụgbọ elu basal, nke nwere ike imetụta àgwà oyi akwa epitaxial na arụmọrụ ngwaọrụ.

Onyonyo nyocha SiC wafer 6 inch

Ụzọ iji belata nrụgide na kristal:

• Gbanwee nkesa ebe okpomọkụ yana usoro usoro iji mee ka uto nha anya dị nso nke otu kristal SiC.
• Welie ihe owuwu crucible iji kwe ka uto kristal n'efu na obere mmachi.
• Gbanwee usoro nhazi kristal mkpụrụ iji belata ndakọrịta mgbasawanye okpomọkụ n'etiti kristal mkpụrụ na ihe njide graphite. Ụzọ a na-emekarị bụ ịhapụ oghere 2 mm n'etiti kristal mkpụrụ na ihe njide graphite.
• Melite usoro mgbakasị ahụ site n'itinye ọkụ ọkụ n'ime ọnọdụ, ịhazigharị okpomọkụ na oge iji hapụ nrụgide dị n'ime kpamkpam.

Ọdịnihu na-agbanwe na teknụzụ uto Silicon Carbide Crystal

N'ile anya n'ihu, teknụzụ nkwadebe kristal SiC dị elu ga-etolite n'ụzọ ndị a:

1. Uto buru ibu
   Dayameta nke silicon carbide otu kristal esiwo na milimita ole na ole ruo 6-inch, 8-inch, na ọbụna nha 12-inch buru ibu. Igwe kristal SiC buru ibu na-eme ka nrụpụta nrụpụta, belata ọnụ ahịa, ma gboo ihe achọrọ nke ngwaọrụ ike dị elu.
2. Uto dị oke mma
   Otu kristal SiC dị elu dị oke mkpa maka ngwaọrụ arụ ọrụ dị elu. Ọ bụ ezie na enweela ọganihu dị ukwuu, ntụpọ dị ka micropipes, nkwụsịtụ, na adịghị ọcha ka dị, na-emetụta arụmọrụ ngwaọrụ na ntụkwasị obi.
3. Mbelata ọnụ ahịa
   Ọnụ ego dị elu nke nkwadebe kristal SiC na-egbochi ngwa ya na mpaghara ụfọdụ. Imelite usoro uto, imeziwanye nrụpụta mmepụta, na ibelata ọnụ ahịa akụrụngwa nwere ike inye aka belata mmefu mmepụta.
4. Uto ọgụgụ isi
   Site n'ọganihu na AI na nnukwu data, teknụzụ uto kristal SiC ga-enweta azịza nwere ọgụgụ isi. Nleba anya na njikwa oge na-eji ihe mmetụta na sistemụ akpaaka ga-eme ka nkwụsi ike na njikwa usoro dịkwuo elu. Na mgbakwunye, nnukwu nyocha data nwere ike ịkwalite oke uto, melite ogo kristal na nrụpụta nrụpụta.

Teknụzụ nkwadebe kristal silicon carbide dị elu bụ isi ihe na-elekwasị anya na nyocha ihe semiconductor. Ka teknụzụ na-aga n'ihu, usoro mmepe kristal SiC ga-aga n'ihu na-aga n'ihu, na-enye ntọala siri ike maka ngwa na oke okpomọkụ, ugboro ugboro, na oke ike.