Igwe Ịcha Diamond nke Multi-Waya maka SiC Sapphire Ihe Ndị Na-adịghị Agbanwe Agbanwe
Okwu Mmalite nke Igwe Ịcha Diamond nke Ọtụtụ Waya
Igwe eji akwa diamond nke nwere waya dị iche iche bụ usoro ịkpụcha ihe ọgbara ọhụrụ nke e mere maka ịhazi ihe siri ike na nke na-agbawa agbawa. Site n'iji ọtụtụ waya ndị yiri diamond kpuchie, igwe ahụ nwere ike ịkpụ ọtụtụ wafer n'otu oge n'otu okirikiri, na-enweta ma mmepụta dị elu ma nke ziri ezi. Teknụzụ a aghọọla ngwa ọrụ dị mkpa na ụlọ ọrụ dịka semiconductor, fotovoltaics anyanwụ, LEDs, na seramiiki dị elu, karịsịa maka ihe dịka SiC, sapphire, GaN, quartz, na alumina.
Ma e jiri ya tụnyere ịkpụ waya nkịtị, nhazi waya dị iche iche na-enye ọtụtụ iberibe ruo ọtụtụ narị otu otu, na-ebelata oge okirikiri nke ukwuu ma na-eme ka ọ dị larịị nke ọma (Ra < 0.5 μm) na nkenke nha (± 0.02 mm). Nhazi modular ya na-ejikọta nrụgide waya akpaka, sistemụ njikwa ọrụ, na nlekota ịntanetị, na-ahụ na mmepụta ya na-adịte aka, kwụsie ike, na nke akpaghị aka zuru oke.
Nka na ụzụ nke igwe igwe eji akwa Diamond nke ọtụtụ waya
| ihe | Nkọwapụta | ihe | Nkọwapụta |
|---|---|---|---|
| Oke nha ọrụ (Square) | 220 × 200 × 350 mm | Moto draịva | 17.8 kW × 2 |
| Oke nha ọrụ (Gburugburu) | Φ205 × 350 mm | Moto mbanye waya | 11.86 kW × 2 |
| Oghere spindle | Φ250 ±10 × 370 × 2 axis (mm) | Moto ebuli tebụl ọrụ | 2.42 kW × 1 |
| Isi axis | 650 mm | Moto mgbagharị | 0.8 kW × 1 |
| Ọsọ ọsọ waya | 1500 m/min | Moto nhazi | 0.45 kW × 2 |
| Dayameta waya | Φ0.12–0.25 mm | Moto nrụgide | 4.15 kW × 2 |
| Ọsọ mbuli elu | 225 mm/min | Moto slurry | 7.5 kW × 1 |
| Ntugharị tebụl kachasị elu | ±12° | Ike tankị mmiri | 300 L |
| Akụkụ mgbagharị | ±3° | Mmiri oyi | 200 L/min |
| Ugboro mgbagharị | ~Ugboro iri atọ/nkeji | Izi ezi nke okpomọkụ | ±2°C |
| Ọnụego nri | 0.01–9.99 mm/min | Ịnye ọkụ | 335+210 (mm²) |
| Ọnụego nri waya | 0.01–300 mm/min | Ikuku a na-eme ka ọ dị mkpa | 0.4–0.6 MPa |
| Nha igwe | 3550 × 2200 × 3000 mm | Ibu | 13,500 n'arọ |
Usoro ọrụ nke igwe ịkpụcha Diamond dị iche iche
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Mkpụcha ọtụtụ waya
Ọtụtụ waya dayamọnd na-agagharị n'ọsọ e jikọtara ọnụ ruo 1500 m/min. Pulleys ndị a na-eduzi nke ọma na njikwa nrụgide mechiri emechi (15–130 N) na-eme ka waya ndị ahụ kwụsie ike, na-ebelata ohere nke ntụgharị ma ọ bụ mgbawa. -
Nri na Ọnọdụ Ziri Ezi
Ọnọdụ servo na-arụ ọrụ na-enweta izi ezi nke ±0.005 mm. Nhazi laser ma ọ bụ nke enyere aka ịhụ ụzọ na-eme ka nsonaazụ maka ọdịdị dị mgbagwoju anya dịkwuo mma. -
Iwepụ ihe mkpofu na oyi
Ihe mkpuchi mmiri nke nwere nrụgide dị elu na-ewepụ ibe ya ma na-eme ka ebe ọrụ jụọ oyi mgbe niile, na-egbochi mmebi okpomọkụ. Nzacha nke nwere ọtụtụ ogbo na-eme ka mmiri oyi dịgide ogologo oge ma na-ebelata oge ọrụ. -
Ikpo Okwu Njikwa Amamihe
Ndị ọkwọ ụgbọala servo na-aza ngwa ngwa (<1 ms) na-agbanwe ọsọ nri, nrụgide, na waya nke ọma. Njikwa nri na mgbanwe paramita otu pịa na-eme ka mmepụta oke dị mfe.
Isi Uru nke igwe ịkpụcha Diamond dị iche iche
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Mmepụta Dị Elu
Nwere ike ịkpụ wafer 50–200 kwa ọsọ, yana mfu kerf <100 μm, na-eme ka ojiji ihe dịkwuo mma ruo 40%. Mmepụta ya bụ 5–10 × nke sistemụ waya nkịtị. -
Njikwa Nkọcha
Nkwụsi ike nke nrụgide waya n'ime ±0.5 N na-eme ka nsonaazụ na-aga n'ihu na ihe dị iche iche na-emebi emebi. Nlekota oge n'oge na-adịghị anya na interface HMI 10" na-akwado nchekwa nri na ọrụ dịpụrụ adịpụ. -
Nrụpụta Na-agbanwe Agbanwe, nke Modular
Dakọtara na dayameta waya site na 0.12–0.45 mm maka usoro ịkpụ dị iche iche. Njikwa robot nhọrọ na-enye ohere maka ahịrị mmepụta akpaaka zuru oke. -
Ntụkwasị obi nke ọkwa ụlọ ọrụ mmepụta ihe
Fọl ndị a kpụrụ akpụ/a kpụrụ akpụ na-ebelata mgbanwe (<0.01 mm). Pulley ndị nduzi nwere mkpuchi seramiiki ma ọ bụ carbide na-enye ọrụ karịrị awa 8000.
Ngwa Ubi nke igwe igwe eji akwa ákwà nke ọtụtụ waya
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Semiconductors: Ịcha SiC maka modulu ike EV, ihe ndị na-eme ka GaN dị na ngwaọrụ 5G.
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Igwe fotovoltaics: Ịcha akwa wafer silicon dị elu nke nwere nha nhata ±10 μm.
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LED na Optics: Ihe ndị e ji sapphire mee maka ihe ndị na-ahụ anya nke ọma na nke ziri ezi nke nwere ihe na-erughị μ20 μm nke na-agbaji n'ọnụ.
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Seramiki dị elu: Nhazi nke alumina, AlN, na ihe ndị yiri ya maka ihe ndị metụtara ikuku na njikwa okpomọkụ.
Ajụjụ Ndị A Na-ajụkarị - Igwe Ịcha Diamond nke Ọtụtụ Waya
Q1: Kedu uru dị na igwe e ji akwa ọtụtụ waya ma e jiri ya tụnyere igwe e ji waya otu?
A: Sistemụ waya dị iche iche nwere ike ịkpụ ọtụtụ wafers n'otu oge, na-eme ka arụmọrụ dịkwuo elu site na 5–10×. Ojiji ihe onwunwe dịkwa elu ma ọ bụrụ na mfu kerf dị n'okpuru 100 μm, nke na-eme ka ọ dị mma maka mmepụta oke.
Q2: Kedu ụdị ihe enwere ike ịhazi?
A: Emebere igwe a maka ihe siri ike ma gbawaa agbawa, gụnyere silicon carbide (SiC), sapphire, gallium nitride (GaN), quartz, alumina (Al₂O₃), na aluminum nitride (AlN).
Q3: Kedu ihe ziri ezi na ịdị mma elu ga-ekwe omume?
A: Nchacha elu nwere ike iru Ra <0.5 μm, yana izi ezi nha nke ±0.02 mm. Enwere ike ijikwa nchicha akụkụ ruo <20 μm, na-emezu ụkpụrụ ụlọ ọrụ semiconductor na optoelectronic.
Q4: Usoro ịkpụcha ọ na-akpata mgbawa ma ọ bụ mmebi?
A: Site na njikwa nrụgide dị elu na njikwa nrụgide mechiri emechi, a na-ebelata ohere nke obere mgbawa na mmebi nrụgide, na-eme ka o kwe omume ịnọgide na-enwe ezigbo wafer.
