Microjet laser technology akụrụngwa wafer ịcha SiC ihe nhazi

Nkọwa dị mkpirikpi:

Akụrụngwa teknụzụ Laser Microjet bụ ụdị usoro eji arụ ọrụ ziri ezi nke na-ejikọta laser ike dị elu na ụgbọ elu mmiri mmiri micron. Site na ijikọ eriri laser na jet mmiri mmiri na-agba ọsọ (mmiri deionized ma ọ bụ mmiri mmiri pụrụ iche), a pụrụ imezu ihe nhazi ihe eji eme ihe na njedebe dị elu na obere okpomọkụ. Teknụzụ a dabara adaba maka ịkpụ, mkpọpu na microstructure nhazi nke ihe siri ike na nke siri ike (dịka SiC, sapphire, iko), a na-ejikwa ya na semiconductor, ihe ngosi fotoelectric, ngwaọrụ ahụike na mpaghara ndị ọzọ.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ụkpụrụ ọrụ:

1. Laser njikọ: pulsed laser (UV / green / infrared) na-elekwasị anya n'ime mmiri mmiri jet na-etolite ike ike nnyefe ọwa.

2. Ntuzi mmiri: jet dị elu (ọnụọgụ 50-200m / s) na-eme ka ebe nhazi ahụ dị jụụ ma wepụ ihe mkpofu iji zere ikpo ọkụ na mmetọ.

3. Mwepụ ihe: Ike laser na-akpata mmetụta cavitation na mmiri mmiri iji nweta nhazi oyi nke ihe (mpaghara emetụta okpomọkụ <1μm).

4. Njikwa na-agbanwe agbanwe: nhazi oge nke laser parameters (ike, ugboro) na nrụgide jet iji gboo mkpa nke ihe dị iche iche na nhazi.

Igodo akara:

1. Ike Laser: 10-500W (nwere ike idozi)

2. Dayameta Jet: 50-300μm

3.Machining ziri ezi: ± 0.5μm (ịcha), omimi ka obosara ruru 10: 1 (ịkụ mmiri)

Uru nka:

(1) Ihe fọrọ nke nta ka ọ bụrụ efu okpomọkụ mmebi
- Mmiri mmiri mmiri jụrụ oyi na-achịkwa mpaghara okpomọkụ emetụtara (HAZ) ruo ** <1μm**, na-ezere micro-cracks kpatara nhazi laser omenala (HAZ na-abụkarị> 10μm).

(2) Mwepụta nke ọma dị oke elu
- Ịcha / igwu ihe ziri ezi ruo ** ± 0.5μm **, ihu roughness Ra <0.2μm, belata mkpa maka polishing na-esote.

- Na-akwado nhazi usoro nhazi 3D dị mgbagwoju anya (dịka oghere conical, oghere nwere ụdị).

(3) ndakọrịta ihe sara mbara
- Ihe siri ike na mgbawa: SiC, sapphire, iko, ceramics (ụzọ ọdịnala dị mfe imebi).

- Ihe na-emetụ ọkụ: polymers, anụ ahụ dị ndụ (enweghị ihe ize ndụ nke denaturation thermal).

(4) Nchekwa gburugburu ebe obibi na arụmọrụ
- Enweghị mmetọ uzuzu, enwere ike ịmegharị mmiri mmiri ma kpochaa ya.

- 30% -50% abawanye na nhazi ọsọ (vs. machining).

(5) njikwa ọgụgụ isi
- Ntinye ihu igwe jikọtara ọnụ na njikarịcha paramita AI, ọkpụrụkpụ ihe na-agbanwe agbanwe na ntụpọ.

Nkọwapụta nka na ụzụ:

Olu Countertop	300300150	400400200
Linear axis XY	Moto Linear. Moto Linear	Moto Linear. Moto Linear
Linear axis Z	150	200
Ndokwa ziri ezi μm	+/-5	+/-5
Ndokwa ugboro ugboro μm	+/-2	+/-2
Ngwa ngwa G	1	0.29
Njikwa ọnụọgụgụ	3 axis / 3+1 axis / 3+2 axis	3 axis / 3+1 axis / 3+2 axis
Ụdị njikwa ọnụọgụgụ	DPSS Nd:YAG	DPSS Nd:YAG
Ogologo ogologo nm	532/1064	532/1064
Enyere ike W	50/100/200	50/100/200
Ụgbọ mmiri	40-100	40-100
Ogwe nrụgide nozzle	50-100	50-600
Akụkụ (ngwaọrụ igwe) (obosara * ogologo * elu) mm	144519442260	170015002120
Nha (kabinet njikwa) (W * L * H)	70025001600	70025001600
Arọ (ngwaọrụ) T	2.5	3
Arọ (kabinet njikwa) KG	800	800
Ike nhazi	Ịdị njọ nke elu Ra≤1.6um Ọsọ imeghe ≥1.25mm/s Mbelata okirikiri ≥6mm/s Linear ọnwụ ọsọ ≥50mm/s	Ihu igwe dị n'elu Ra≤1.2um Ọsọ imeghe ≥1.25mm/s Mbelata okirikiri ≥6mm/s Linear ọnwụ ọsọ ≥50mm/s
	N'ihi na gallium nitride crystal, ultra-wide band gap semiconductor ihe (diamond/Gallium oxide), aerospace pụrụ iche ihe, LTCC carbon seramiiki mkpụrụ, photovoltaic, scintillator crystal na ihe ndị ọzọ nhazi. Mara: Ike nhazi dịgasị iche dabere na njirimara ihe

Usoro nhazi:

Ọrụ XKH:

XKH na-enye nkwado zuru oke nke ọrụ okirikiri ndụ zuru oke maka akụrụngwa teknụzụ laser microjet, site na mmalite usoro mmepe na nhọpụta akụrụngwa, na njikọta usoro ahaziri n'etiti etiti oge (gụnyere matching pụrụ iche nke isi iyi laser, sistemu jet na modul akpaaka), na-arụ ọrụ na ọzụzụ mmezi na njikarịcha usoro na-aga n'ihu, usoro ahụ dum nwere nkwado otu ọkachamara ọkachamara; Dabere na afọ 20 nke ahụmịhe nrụzi nke ọma, anyị nwere ike ịnye azịza otu nkwụsị gụnyere nkwenye akụrụngwa, mmeghe mmepụta oke na nzaghachi ngwa ngwa ahịa (awa 24 nke nkwado teknụzụ + ihe nchekwa ihe nchekwa) maka ụlọ ọrụ dị iche iche dị ka semiconductor na ahụike, ma kwe nkwa ọnwa 12 ogologo akwụkwọ ikike na mmezi ndụ yana ọrụ nkwalite. Gbaa mbọ hụ na akụrụngwa ndị ahịa na-ejigide arụmọrụ na nkwụsi ike nke ụlọ ọrụ na-eduga mgbe niile.