Ingots Lithium Tantalate LiTaO3 nwere Fe/Mg Doping ahaziri ahazi nke 4inch 6inch 8inch maka nchọpụta ụlọ ọrụ mmepụta ihe

Nkọwa Dị Mkpirikpi:

Ingots LiTaO3 (Lithium Tantalate Ingots), dịka ihe ndị bụ isi maka semiconductors nke ọgbọ nke atọ na optoelectronics, na-eji okpomọkụ Curie dị elu ha (607) eme ihe.°C), oke nghọta sara mbara (400–5,200 nm), oke njikọ electromechanical dị mma (Kt² >15%), na obere mfu dielectric (tanδ <2%) iji gbanwee nkwukọrịta 5G, kọmputa quantum, na njikọta photonic. Site na teknụzụ mmepụta dị elu dịka njem vapor anụ ahụ (PVT) na deposition vapor kemịkalụ (CVD), anyị na-enye ingots X/Y/Z, 42°Y-cut, na poled (PPLT) n'ime nkọwapụta 3-8-inch, na-egosipụta njupụta micropipe <0.1 cm⁻² na dislocation njupụta <500 cm⁻². Ọrụ anyị gụnyere doping Fe/Mg, proton exchange waveguide, na njikọta heterogeneous based silicon (POI), na-edozi nzacha anya dị elu, isi mmalite ọkụ quantum, na nchọpụta infrared. Ihe a na-akwalite ọganihu na miniaturization, ọrụ ugboro ugboro dị elu, na nkwụsi ike okpomọkụ, na-eme ka mgbanwe ụlọ na ọganihu teknụzụ dịkwuo ngwa ngwa.

Zitere anyị ozi-e

atụmatụ

Teknụzụ paramita

Nkọwapụta	nkịtị	Nkọwapụta Dị Elu
Ihe Ndị E Ji Eme Ihe	Wafe LiTaO3(LT)/LiNbO3	Wafe LiTaO3(LT)/LiNbO3
Nhazi	X-112°Y,36°Y,42°Y±0.5°	X-112°Y,36°Y,42°Y±0.5°
N'otu aka ahụ	30″	10''
Perpendicular	10′	5'
Ogo elu	40/20	20/10
Nsogbu nke Ebili Mmiri	λ/4@632nm	λ/8@632nm
Ọdịdị Elu	λ/4@632nm	λ/8@632nm
Oghere doro anya	>90%	>90%
Chamfer	<0.2×45°	<0.2×45°
Nnwere Onwe/Ọkpụrụkpụ	±0.1 mm	±0.1 mm
Akụkụ kachasị	dia150 × 50mm	dia150 × 50mm

Ọrụ XKH

1. Ịkpụ Ingot nke Ukwuunke

Nha na Mkpụcha: Ingot nke dị sentimita 3–8 nwere X/Y/Z, 42°Y, na mbepụ akụkụ aka ahaziri ahazi (±0.01° ndidi).

Njikwa Ọgwụ Mgbochi: Fe/Mg na-ejikọ aka ọnụ site na usoro Czochralski (oke njupụta 10¹⁶–10¹⁹ cm⁻³) iji mee ka iguzogide photorefractive na nkwụsi ike okpomọkụ dịkwuo mma.

2. Teknụzụ Usoro Dị Elunke

Njikọta Dị Iche Iche: Wafers mejupụtara LiTaO3 nke dabeere na Silicon (POI) nwere njikwa ọkpụrụkpụ (300–600 nm) na ike okpomọkụ ruo 8.78 W/m·K maka nzacha SAW ugboro ugboro.

Nhazi Waveguide: Usoro mgbanwe proton (PE) na mgbanwe proton (RPE), na-enweta submicron waveguides (Δn > 0.7) maka electro-optic modulators dị elu (bandwidth > 40 GHz).

3. Sistemụ Njikwa Ogo

Nnwale Ọgwụgwụ ruo na Ọgwụgwụ: Raman spectroscopy (nkwenye ụdị polytype), XRD (kristallinity), AFM (ụdị elu), na nnwale nha anya (Δn <5×10⁻⁵).

4. Nkwado Nnyefe Ngwa Ahịa zuru ụwa ọnụ

Ike Mmepụta: Mmepụta kwa ọnwa karịrị ingot 5,000 (inch 8: 70%), na-akwado nnyefe mberede awa 48.

Netwọk Njem: Mkpuchi na Yuropu, Ugwu Amerịka, na Eshia-Pacific site na ibu ikuku/oké osimiri yana nkwakọ ngwaahịa nke okpomọkụ na-achịkwa.

5. Mmepe Njikọ Aka na Teknụzụ

Ụlọ nyocha nyocha na nhazi fotonik: Soro na nyiwe njikọta fotonik (dịka ọmụmaatụ, njikọ oyi akwa SiO2 dị ala).

Nchịkọta

LiTaO3 Ingots na-arụ ọrụ dị ka ihe dị mkpa na-agbanwegharị teknụzụ optoelectronics na teknụzụ quantum. Site na ihe ọhụrụ na uto kristal (dịka ọmụmaatụ, PVT), mbelata ntụpọ, na njikọta dị iche iche (dịka ọmụmaatụ, POI), anyị na-enye ngwọta dị elu, nke dị ọnụ ala maka nkwukọrịta 5G/6G, kọmputa quantum, na IoT ụlọ ọrụ mmepụta ihe. Nkwa XKH maka ịkwalite mbelata ntụpọ ingot na ịbawanye mmepụta 8-inch na-eme ka ndị ahịa nwee ike iduzi usoro ọkọnọ zuru ụwa ọnụ, na-eduga n'oge ọzọ nke usoro semiconductor sara mbara.