Sapphire Wafer C-Plane 12 inch SSP/DSP
Ihe osise zuru ezu
Okwu Mmalite nke Safaịra
Sapphire wafer bụ ihe e ji otu kristal mee nke e ji aluminom oxide sịntetik dị ọcha (Al₂O₃) mee. A na-eji ụzọ dị elu dịka Kyropoulos (KY) ma ọ bụ Heat Exchange Method (HEM) akụ nnukwu kristal sapphire, wee hazie ya site na ịkpụ, nhazi, ịchacha, na ịchacha nke ọma. N'ihi ihe pụrụ iche ya dị na anụ ahụ, anya, na kemịkalụ, sapphire wafer na-arụ ọrụ a na-apụghị ịgbanwe agbanwe n'ọhịa nke semiconductor, optoelectronics, na ngwa eletrọnịkị ndị ahịa dị elu.
Ụzọ e si eji Sapphire eme ihe
| Ụzọ | Ụkpụrụ | Uru | Ngwa Ndị Isi |
|---|---|---|---|
| Usoro Verneuil(Ịgwakọta ọkụ) | A na-agbaze ntụ Al₂O₃ dị ọcha n'ọkụ oxyhydrogen, mmiri ntapụ na-eme ka oyi akwa sie ike n'elu mkpụrụ. | Ọnụ ego dị ala, arụmọrụ dị elu, usoro dị mfe | Sapphires dị mma nke ukwuu, ihe ndị e ji anya mee n'oge ochie |
| Usoro Czochralski (CZ) | A na-agbaze Al₂O₃ n'ime ihe mkpuchi, a na-adọpụtakwa kristal mkpụrụ nwayọ nwayọ iji mee ka kristal ahụ too. | Na-emepụta kristal buru ibu nke nwere ezi iguzosi ike n'ezi ihe | Kristal laser, windo anya |
| Usoro Kyropoulos (KY) | Iji nwayọọ nwayọọ mee ka kristal ahụ too nke ọma n'ime ihe mkpuchi ahụ. | Nwere ike itolite kristal buru ibu, obere nrụgide (iri kilogram ma ọ bụ karịa) | Ihe ndị e ji eme ihe na LED, ihuenyo ekwentị, ihe ndị e ji anya mee |
| Usoro HEM(Mgbanwe Okpomọkụ) | Iju oyi na-amalite site n'elu ihe mkpuchi, kristal na-eto n'ala site na mkpụrụ | Na-emepụta nnukwu kristal (ruo ọtụtụ narị kilogram) nke nwere otu àgwà. | Nnukwu windo anya, ụgbọelu, ihe ngosi anya agha |
Nhazi kristal
| Nhazi / Ụgbọelu | Ndekọ Miller | Àgwà | Ngwa Ndị Isi |
|---|---|---|---|
| C-plane | (0001) | N'akụkụ c-axis, elu polar, atọm ndị a haziri n'otu nha | LED, diodes laser, ihe ndị a na-akpọ GaN epitaxial substrates (a na-ejikarị eme ihe) |
| Ụgbọelu A | (11-20) | N'akụkụ c-axis, elu na-abụghị polar, na-ezere mmetụta polarization | Ngwaọrụ GaN epitaxy na-abụghị polar, optoelectronic |
| M-plane | (10-10) | N'otu aka ahụ na c-axis, nke na-abụghị polar, nke nwere nnukwu symmetry | Ngwaọrụ optoelectronic GaN dị elu |
| Ụgbọelu R | (1-102) | N'ịdabere na c-axis, ezigbo ihe ngosi anya | Windo anya, ihe nchọpụta infrared, ihe ndị mejupụtara laser |
Nkọwapụta Wafer Sapphire (Enwere ike ịhazi ya)
| ihe | 1-inch C-plane(0001) 430μm Sapphire Wafers | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 25.4 mm +/- 0.1 mm | |
| Ọkpụrụkpụ | 430 μm +/- 25 μm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 5 μm | |
| ỤTA | < 5 μm | |
| WARP | < 5 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Iberibe iri abụọ na ise n'ime otu ngwugwu kaseti ma ọ bụ ngwugwu otu iberibe. | ||
| ihe | Wafers Sapphire nke dị sentimita 2 (0001) 430μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 50.8 mm +/- 0.1 mm | |
| Ọkpụrụkpụ | 430 μm +/- 25 μm | |
| Nhazi Ala Dị Elu nke Mbụ | Ụgbọelu A(11-20) +/- 0.2° | |
| Ogologo Dị larịị nke Mbụ | 16.0 mm +/- 1.0 mm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 10 μm | |
| ỤTA | < 10 μm | |
| WARP | < 10 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Iberibe iri abụọ na ise n'ime otu ngwugwu kaseti ma ọ bụ ngwugwu otu iberibe. | ||
| ihe | Wafers Sapphire nke dị sentimita 3 (0001) 500μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 76.2 mm +/- 0.1 mm | |
| Ọkpụrụkpụ | 500 μm +/- 25 μm | |
| Nhazi Ala Dị Elu nke Mbụ | Ụgbọelu A(11-20) +/- 0.2° | |
| Ogologo Dị larịị nke Mbụ | 22.0 mm +/- 1.0 mm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 15 μm | |
| ỤTA | < 15 μm | |
| WARP | < 15 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Iberibe iri abụọ na ise n'ime otu ngwugwu kaseti ma ọ bụ ngwugwu otu iberibe. | ||
| ihe | Wafers Sapphire nke dị sentimita 4 (0001) 650μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 100.0 mm +/- 0.1 mm | |
| Ọkpụrụkpụ | 650 μm +/- 25 μm | |
| Nhazi Ala Dị Elu nke Mbụ | Ụgbọelu A(11-20) +/- 0.2° | |
| Ogologo Dị larịị nke Mbụ | 30.0 mm +/- 1.0 mm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 20 μm | |
| ỤTA | < 20 μm | |
| WARP | < 20 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Iberibe iri abụọ na ise n'ime otu ngwugwu kaseti ma ọ bụ ngwugwu otu iberibe. | ||
| ihe | Wafers Sapphire nke dị sentimita isii (0001) 1300μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 150.0 mm +/- 0.2 mm | |
| Ọkpụrụkpụ | 1300 μm +/- 25 μm | |
| Nhazi Ala Dị Elu nke Mbụ | Ụgbọelu A(11-20) +/- 0.2° | |
| Ogologo Dị larịị nke Mbụ | 47.0 mm +/- 1.0 mm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 25 μm | |
| ỤTA | < 25 μm | |
| WARP | < 25 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Iberibe iri abụọ na ise n'ime otu ngwugwu kaseti ma ọ bụ ngwugwu otu iberibe. | ||
| ihe | Wafers Sapphire nke dị sentimita asatọ (0001) 1300μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 200.0 mm +/- 0.2 mm | |
| Ọkpụrụkpụ | 1300 μm +/- 25 μm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 30 μm | |
| ỤTA | < 30 μm | |
| WARP | < 30 μm | |
| Nhicha / Nkwakọ ngwaahịa | Nhicha na nkwakọ ngwaahịa nhicha ụlọ klaasị 100, | |
| Nkwakọ ngwaahịa otu ibe. | ||
| ihe | Wafers Sapphire nke dị sentimita iri na abụọ (0001) 1300μm | |
| Ihe kristal | 99,999%, Ọcha Dị Elu, Monocrystalline Al2O3 | |
| Ọkwa | Prime, Epi-Ready | |
| Nhazi Elu | C-plane(0001) | |
| C-plane gbapụrụ iche na-aga n'akụkụ M-axis 0.2 +/- 0.1° | ||
| Dayameta | 300.0 mm +/- 0.2 mm | |
| Ọkpụrụkpụ | 3000 μm +/- 25 μm | |
| Akpụchaala Akụkụ Otu | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (SSP) | Elu Azụ | Ala dị mma, Ra = 0.8 μm ruo 1.2 μm |
| E ji akụkụ abụọ mee ka ọ dị ọcha | Ihu Elu | Epi-polished, Ra < 0.2 nm (site na AFM) |
| (DSP) | Elu Azụ | Epi-polished, Ra < 0.2 nm (site na AFM) |
| TV | < 30 μm | |
| ỤTA | < 30 μm | |
| WARP | < 30 μm | |
Usoro Mmepụta Wafer Sapphire
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Uto kristal
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Kụọ sapphire boules (100–400 kg) site na iji usoro Kyropoulos (KY) n'ime ọkụ kristal raara onwe ya nye.
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Ịkpọpụta na Ịkpụzi Ingot
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Jiri gbọmgbọm igwe na-egwu mmiri iji hazie bọọlụ ahụ ka ọ bụrụ ingot cylindrical nwere dayameta nke sentimita 2-6 na ogologo ya nke 50-200 mm.
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Mkpọchi Mbụ
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Lelee ingots ahụ maka ntụpọ ma mee nhazi okpomọkụ mbụ iji belata nrụgide dị n'ime.
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Nhazi kristal
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Jiri ngwa nhazi chọpụta kpọmkwem ebe sapphire ingot dị (dịka ọmụmaatụ, C-plane, A-plane, R-plane) si arụ ọrụ.
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Ịcha ọtụtụ waya
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Bee ingot ahụ ka ọ bụrụ wafer dị gịrịgịrị dịka ọkpụrụkpụ ya si dị site na iji ngwa ịkpụ waya dị iche iche.
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Nnyocha Mbụ na Mkpọchi nke Abụọ
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Lelee wafer ndị a na-egbutu (ọkpụrụkpụ, ịdị larịị, ntụpọ elu).
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Mee annealing ọzọ ma ọ bụrụ na ọ dị mkpa iji melite mma kristal ahụ.
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Ịcha Chamfering, Ịkụcha na Ịchacha CMP
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Jiri ngwa pụrụ iche mee chamfering, surface grilling, na chemical mechanical polishing (CMP) iji nweta elu enyo.
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Nhicha
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Jiri mmiri na kemịkal dị ọcha hichaa wafers nke ọma n'ime ụlọ dị ọcha iji wepụ ihe ndị na-emerụ ahụ na ihe ndị na-emerụ ahụ.
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Nnyocha Anya na Ahụ
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Mee nchọpụta nnyefe ma dekọọ data anya.
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Tụọ paramita wafer gụnyere TTV (Mkpokọta ọkpụrụkpụ), ụta, wapụ, izi ezi nke nhazi, na oke iru ala.
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Mkpuchi (Nhọrọ)
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Tinye ihe mkpuchi (dịka ọmụmaatụ, ihe mkpuchi AR, akwa nchekwa) dịka nkọwapụta ndị ahịa si dị.
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Nnyocha na Nkwakọ ngwaahịa ikpeazụ
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Mee nyocha dị mma 100% n'ime ụlọ nhicha.
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Tinye wafers n'ime igbe kaseti n'okpuru ọnọdụ dị ọcha nke Class-100 ma mechie ha tupu ebuga ha.
Ngwa nke Sapphire Wafers
A na-etinye wafer sapphire, nke nwere ike pụrụ iche ha, nnyefe anya pụrụ iche, arụmọrụ okpomọkụ dị mma, na mkpuchi eletriki, n'ọtụtụ ụlọ ọrụ. Ngwa ha anaghị ekpuchi naanị ụlọ ọrụ LED na optoelectronic ọdịnala kamakwa ha na-agbasa n'ime semiconductors, ngwa eletrọnịkị ndị ahịa, na ngalaba ikuku na nchekwa dị elu.
1. Semiconductor na Optoelectronics
Ihe ndị e ji LED mee
Achịcha Sapphire bụ ihe ndị bụ isi na-eme ka uto epitaxial gallium nitride (GaN) too, nke a na-ejikarị eme ihe na LED na-acha anụnụ anụnụ, LED ọcha, na teknụzụ Mini/Micro LED.
Diọdị Laser (LDs)
Dịka ihe ndị e ji eme ihe maka diode laser nke GaN, wafer sapphire na-akwado mmepe nke ngwaọrụ laser dị ike ma dị ogologo ndụ.
Ndị na-ahụ maka foto
N'ime ihe nchọpụta ultraviolet na infrared, a na-ejikarị wafer sapphire eme ihe dị ka windo doro anya na ihe mkpuchi ihe.
2. Ngwaọrụ Semiconductor
RFIC (Sekit agbakwunyere ugboro redio)
N'ihi ihe mkpuchi eletriki ha dị mma, wafer sapphire bụ ihe ndabere zuru oke maka ngwaọrụ microwave dị elu na nke nwere ike dị elu.
Teknụzụ Silicon-on-Sapphire (SoS)
Site n'itinye teknụzụ SoS n'ọrụ, ike parasitic capacitance nwere ike ibelata nke ukwuu, na-eme ka arụmọrụ sekit ka mma. A na-ejikarị nke a eme ihe n'ọtụtụ ebe na nkwukọrịta RF na ngwa eletrọniki aerospace.
3. Ngwa Anya
Windo Anya Infrared
Site na nnukwu nnyefe na oke ogologo 200 nm–5000 nm, a na-eji sapphire eme ihe nke ukwuu na ihe nchọpụta infrared na sistemụ nduzi infrared.
Windo Laser Dị Ike Elu
Ike siri ike na nguzogide okpomọkụ nke sapphire na-eme ka ọ bụrụ ihe dị mma maka windo na anya nchekwa na sistemụ laser dị ike.
4. Eletrọniki Ndị Ahịa
Mkpuchi Lensi Igwefoto
Ike siri ike nke sapphire na-eme ka o kwe omume iguzogide ọkọ maka ekwentị na igwefoto.
Ihe mmetụta mkpịsị aka
A pụrụ iji ákwà wafer sapphire mee ihe dị ka ihe mkpuchi siri ike, nke na-eme ka izi ezi na ntụkwasị obi dịkwuo mma n'ịchọpụta akara mkpisi aka.
Elekere smart na ngosipụta dị elu
Ihuenyo Sapphire na-ejikọta iguzogide ọkọ na nghọta anya dị elu, na-eme ka ha bụrụ ihe a ma ama na ngwaahịa eletrọnịkị dị elu.
5. Ụgbọelu na Nchebe
Domes Infrared Mgbọmmiri
Windo sapphire na-anọgide na-apụta ìhè ma kwụsie ike n'okpuru ọnọdụ okpomọkụ dị elu na ọsọ dị elu.
Sistemụ Anya Ọkụ Eluigwe
A na-eji ha eme ihe na windo anya siri ike na ngwa nlele nke e mere maka gburugburu ebe dị oke njọ.
Ngwaahịa Sapphire Ndị Ọzọ A Na-ahụkarị
Ngwaahịa Ngwa Anya
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Windo Anya Sapphire
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A na-eji ya na lasers, spectrometers, sistemu onyonyo infrared, na windo sensọ.
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Oke nnyefe:UV 150 nm ruo etiti IR 5.5 μm.
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Anya mmiri sapphire
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A na-etinye ya n'ọrụ na sistemụ laser dị elu na ihe ndị na-eme ka ikuku dị elu.
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Enwere ike imepụta ya dị ka lenses convex, concave, ma ọ bụ cylindrical.
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Prism Sapphire
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A na-eji ya eme ihe n'ihe gbasara nha anya na sistemụ onyonyo ziri ezi.
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Nkwakọ ngwaahịa
Banyere XINKEHUI
Shanghai Xinkehui New Material Co., Ltd bụ otu n'ime ụlọ ọrụ mmepụta ihe dị na Shanghai Xinkehui New Material Co., Ltd.onye na-ebunye ngwa anya na semiconductor kachasị ukwuu na China, nke e hiwere na 2002. E mepụtara XKH iji nye ndị nchọpụta agụmakwụkwọ wafers na ihe sayensị ndị ọzọ metụtara semiconductor. Ihe Semiconductor bụ isi ọrụ anyị, ndị otu anyị dabere na teknụzụ, kemgbe e guzobere ya, XKH na-etinye aka nke ukwuu na nyocha na mmepe nke ihe eletrọniki dị elu, ọkachasị n'ọhịa nke wafer / substrate dị iche iche.
Ndị mmekọ
Site na teknụzụ ihe semiconductor dị mma ya, Shanghai Zhimingxin aghọọla onye mmekọ a pụrụ ịtụkwasị obi nke ụlọ ọrụ kachasị elu n'ụwa na ụlọ akwụkwọ agụmakwụkwọ a ma ama. Site n'ịnọgidesi ike na mmepụta ihe ọhụrụ na ịdị mma ya, Zhimingxin etolitela mmekọrịta siri ike na ndị isi ụlọ ọrụ dịka Schott Glass, Corning, na Seoul Semiconductor. Mmekọrịta ndị a emebeghị naanị ka ọkwa teknụzụ nke ngwaahịa anyị ka mma, kamakwa kwalitere mmepe teknụzụ n'ọhịa nke ngwa eletrọniki ike, ngwa optoelectronic, na ngwaọrụ semiconductor.
Na mgbakwunye na mmekorita ya na ụlọ ọrụ ndị a ma ama, Zhimingxin eguzobewokwa mmekọrịta mmekọrịta ogologo oge na mahadum kachasị elu gburugburu ụwa dịka Mahadum Harvard, Mahadum Mahadum London (UCL), na Mahadum Houston. Site na mmekorita ndị a, Zhimingxin anaghị enye naanị nkwado teknụzụ maka ọrụ nyocha sayensị na agụmakwụkwọ, kamakwa ọ na-esonye na mmepe nke ihe ọhụrụ na ihe ọhụrụ teknụzụ, na-eme ka anyị hụ na anyị na-ebute ụzọ mgbe niile na ụlọ ọrụ semiconductor.
Site na mmekorita chiri anya na ụlọ ọrụ na ụlọ akwụkwọ ndị a ma ama n'ụwa niile, Shanghai Zhimingxin na-aga n'ihu na-akwalite ihe ọhụrụ na mmepe teknụzụ, na-enye ngwaahịa na ngwọta dị elu n'ụwa niile iji gboo mkpa na-eto eto nke ahịa ụwa.




