8inch SiC Production ọkwa wafer 4H-N SiC mkpụrụ
Tebụl na-esonụ na-egosi nkọwapụta nke 8inch SiC wafers:
| 8inch N-ụdị SiC DSP Species | |||||
| Nọmba | Ihe | Nkeji | Mmepụta | Nyocha | Dummy |
| 1:paramita | |||||
| 1.1 | polytype | -- | 4H | 4H | 4H |
| 1.2 | n'elu nghazi | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Igwe ọkụ eletrik | |||||
| 2.1 | dopant | -- | n-ụdị Nitrogen | n-ụdị Nitrogen | n-ụdị Nitrogen |
| 2.2 | resistivity | ohm · cm | 0.015-0.025 | 0.01-0.03 | NA |
| 3: Mechanical paramita | |||||
| 3.1 | dayameta | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | ọkpụrụkpụ | μm | 500± 25 | 500± 25 | 500± 25 |
| 3.3 | Ntuzi aka notch | ° | [1-100]±5 | [1-100]±5 | [1-100]±5 |
| 3.4 | Omimi Ọkwa | mm | 1-1.5 | 1-1.5 | 1-1.5 |
| 3.5 | LTV | μm | ≤5 (10mm*10mm) | ≤5 (10mm*10mm) | ≤10 (10mm*10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Ụta | μm | -25-25 | -45-45 | -65-65 |
| 3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | ≤0.2 | ≤0.2 | ≤0.2 |
| 4:Ihe owuwu | |||||
| 4.1 | njupụta micropipe | ihe / cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | ígwè ọdịnaya | atom / cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ihe / cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ihe / cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ihe / cm2 | ≤7000 | ≤10000 | NA |
| 5.Front àgwà | |||||
| 5.1 | n'ihu | -- | Si | Si | Si |
| 5.2 | elu imecha | -- | Si-ihu CMP | Si-ihu CMP | Si-ihu CMP |
| 5.3 | urughuru | ea/wafer | ≤100 (nha≥0.3μm) | NA | NA |
| 5.4 | ọkọ | ea/wafer | ≤5, ngụkọta ogologo≤200mm | NA | NA |
| 5.5 | Ọnụ ibe / indents / mgbawa / ntụpọ / mmetọ | -- | Ọ dịghị | Ọ dịghị | NA |
| 5.6 | Mpaghara polytype | -- | Ọ dịghị | Mpaghara ≤10% | Mpaghara ≤30% |
| 5.7 | akara n'ihu | -- | Ọ dịghị | Ọ dịghị | Ọ dịghị |
| 6:Ala azụ | |||||
| 6.1 | azụ imecha | -- | C-ihu MP | C-ihu MP | C-ihu MP |
| 6.2 | ọkọ | mm | NA | NA | NA |
| 6.3 | Akụkụ ntụpọ azụ ibe / indents | -- | Ọ dịghị | Ọ dịghị | NA |
| 6.4 | Azụ isi ike | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Akara azụ | -- | Ọkwa | Ọkwa | Ọkwa |
| 7: onu | |||||
| 7.1 | onu | -- | Chamfer | Chamfer | Chamfer |
| 8: ngwugwu | |||||
| 8.1 | nkwakọ ngwaahịa | -- | Epi-njikere na agụụ nkwakọ ngwaahịa | Epi-njikere na agụụ nkwakọ ngwaahịa | Epi-njikere na agụụ nkwakọ ngwaahịa |
| 8.2 | nkwakọ ngwaahịa | -- | Multi-wafer ngwugwu cassette | Multi-wafer ngwugwu cassette | Multi-wafer ngwugwu cassette |
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