8inch 200mm Silicon Carbide SiC Wafers 4H-N ụdị mmepụta ọkwa 500um ọkpụrụkpụ

Nkọwa dị mkpirikpi:

Ụlọ ọrụ Shanghai Xinkehui Tech. Co., Ltd na-enye nhọrọ kacha mma na ọnụahịa maka silicon carbide wafers dị elu yana ihe na-emepụta ihe ruru 8inch dayameta nwere ụdị N- na ọkara mkpuchi. Companieslọ ọrụ ngwaọrụ obere na nnukwu semiconductor na ụlọ nyocha n'ụwa niile na-eji ma dabere na wafers carbide silicone anyị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

200mm 8inch SiC nkọwapụta mkpụrụ

Nha: 8inch;

Dayameta: 200mm± 0.2;

Ọkpụrụkpụ: 500um± 25;

Nhazi ihu: 4 n'ebe [11-20] ± 0.5 °;

Nhazi ọkwa ọkwa: [1-100]±1°;

Ọkpụkpụ omimi: 1 ± 0.25mm;

Igwe okwu: <1cm2;

Efere Hex: Ọnweghị nke ekwenyere;

Nguzogide: 0.015 ~ 0.028Ω;

EPD: <8000cm2;

TED: <6000cm2

BPD: <2000cm2

TSD: <1000cm2

SF: mpaghara <1%

TTV≤15um;

Warp≤40um;

Ụta≤25um;

Mpaghara Poly: ≤5%;

Ikpochapu: <5 na Ogologo Nchikota< 1 Dayameta Wafer;

Chips/Indents: Enweghị ikike D>0.5mm Obosara na Omimi;

Mgbawa: Ọ dịghị;

Unyi: Ọ dịghị

Akụkụ wafer: Chamfer;

Imecha elu: Polish akụkụ abụọ, Si Face CMP;

Mbukota: Multi-wafer Cassette Ma ọ bụ Otu Wafer akpa;

Ihe isi ike ugbu a na nkwadebe nke 200mm 4H-SiC crystals mainl

1) Nkwadebe nke kristal mkpụrụ 200mm 4H-SiC dị elu;

2) Nnukwu size okpomọkụ ubi na-abụghị uniformity na nucleation usoro akara;

3) The njem arụmọrụ na evolushọn nke gaseous components na bigize kristal eto usoro;

4) Crystal cracking na ntụpọ proliferation mere site nnukwu size thermal nrụgide na-abawanye.

Iji merie ihe ịma aka ndị a ma nweta ezigbo mma 200mm SiC waferssolutions ka atụpụtara:

N'ihe gbasara nkwadebe mkpụrụ kristal mkpụrụ 200mm, ebe a na-asọba ebe okpomọkụ kwesịrị ekwesị, na mgbakọ na-agbasawanye ka a mụrụ ma hazie ya iji weghara àgwà kristal na ịgbasa nha; Malite na 150mm SiC se:d kristal, mee mkpụrụ kristal iteration iji jiri nwayọọ nwayọọ gbasaa SiC crystasize ruo mgbe ọ ruru 200mm; Site n'ọtụtụ kristal na-eto eto na nhazi, jiri nwayọọ nwayọọ na-ebuli ogo kristal dị na mpaghara na-agbasawanye kristal, ma melite ogo kristal mkpụrụ 200mm.

N'ihe gbasara 200mm kristal na-eduzi na nkwadebe mkpụrụ, nyocha emeela ka ọnọdụ okpomọkụ dị na mbara ala na-asọpụta maka nnukwu kristal kristal, na-eduzi uto kristal SiC 200mm na-eduzi, yana njikwa doping uniformity. Mgbe nhazi na nhazi nke kristal siri ike, enwetara 8-inchelectricaly conductive 4H-SiC ingot nwere dayameta ọkọlọtọ. Mgbe ịcha, egweri, polishing, nhazi iji nweta SiC 200mm wafers na a ọkpụrụkpụ nke 525um ma ọ bụ karịa.