Wafers SiC nke dị sentimita asatọ nke 200mm nke Silicon Carbide, ụdị 4H-N, ọkwa mmepụta, ọkpụrụkpụ 500um

Nkọwa Dị Mkpirikpi:

Shanghai Xinkehui Tech. Co., Ltd na-enye nhọrọ na ọnụahịa kacha mma maka wafers silicon carbide dị elu na ihe ndị dị n'ime ya ruo dayameta 8 inch nwere ụdị N- na semi-insulating. Ụlọ ọrụ obere na nnukwu ụlọ nyocha na ụlọ nyocha semiconductor na-eji ma na-adabere na wafers silicon carbide silicone anyị.

Zitere anyị ozi-e

atụmatụ

Nkọwapụta Substrate SiC nke 200mm 8inch

Nha: sentimita asatọ;

Dayameta: 200mm±0.2;

Ọkpụrụkpụ: 500um±25;

Nhazi Elu: 4 gaa [11-20]±0.5°;

Nhazi ọkwa:[1-100]±1°；

Omimi ọkwa: 1±0.25mm

Paịpụ obere: <1cm2;

Efere Hex: Ọ dịghị nke e kwere;

Nguzogide: 0.015~0.028Ω;

EPD: <8000cm2;

TED: <6000cm2

BPD: <2000cm2

TSD: <1000cm2

SF: mpaghara <1%

TV≤15um；

Mkpụcha ≤40um

Ngwa ngwa ≤25um

Mpaghara Poly: ≤5%;

Ọkpụkpọ: <5 na Ogologo Nchikota< 1 Dayameta Wafer;

Iberibe/Mkpọchi: Ọ dịghị onye na-ekwe ka D>0.5mm Obosara na Omimi;

Mgbawa: Ọ dịghị;

Unyi: Ọ dịghị

Ọnụ Wafer: Chamfer;

Mmecha elu: Ojii abụọ n'akụkụ, Ojii ihu Si;

Nkwakọba: Kaseti ọtụtụ wafer ma ọ bụ otu wafer;

Nsogbu ndị dị ugbu a n'ịkwadebe kristal 200mm 4H-SiC bụ isi

1) Nkwadebe nke kristal mkpụrụ 200mm 4H-SiC dị elu;

2) Nnukwu nha okpomọkụ ubi na-abụghị otu na njikwa usoro nucleation;

3) Nrụpụta njem na mgbanwe nke ihe ndị na-emepụta gas na-eme ka usoro uto kristal buru ibu;

4) Mkpọwa kristal na mmụba nke ntụpọ sitere na nnukwu nrụgide okpomọkụ na-abawanye.

Iji merie ihe ịma aka ndị a ma nweta ngwọta wafers SiC 200mm dị elu, a na-atụ aro:

Maka nkwadebe kristal mkpụrụ 200mm, a mụrụ ma hazie ubi okpomọkụ kwesịrị ekwesị, na mgbakọ na-agbasawanye iji tụlee ịdị mma kristal na nha na-agbasawanye; Malite na kristal 150mm SiC se:d, mee mmegharị kristal mkpụrụ iji gbasaa crystasize SiC nwayọ nwayọ ruo mgbe ọ ruru 200mm; Site na uto kristal na usoro dị iche iche, jiri nwayọ mee ka ịdị mma kristal ahụ dịkwuo mma na mpaghara na-agbasawanye kristal ahụ, ma melite ịdị mma nke kristal mkpụrụ 200mm.

Maka nkwadebe kristal na ihe ndị dị n'ime ya nke 200mm, nnyocha emeela ka nhazi okpomọkụ na mmiri dị mma maka uto kristal buru ibu, mee ka uto kristal SiC nke 200mm na-eduzi, ma chịkwaa otu doping. Mgbe emechara nhazi na nhazi kristal ahụ nke ọma, enwetara ingot 4H-SiC nke 8-inch na-eduzi eletriki nke nwere dayameta ọkọlọtọ. Mgbe e bechara, gwerie, kpụchaa, ma hazie iji nweta wafers SiC 200mm nwere ọkpụrụkpụ nke 525um ma ọ bụ ihe dị ka ya.