6inch SiC Epitaxyy wafer N/P ụdị nabata ahaziri

Ụdị 6inch SiC Epitaxiy wafer N/P nabata onyonyo egosipụtara ahaziri

Nkọwa dị mkpirikpi:

ihe na-enye 4, 6, 8 inch silicon carbide epitaxial wafer na epitaxial foundry service, mmepụta (600V ~ 3300V) ike ngwaọrụ gụnyere SBD, JBS, PiN, MOSFET, JFET, BJT, GTO, IGBT na na.

Anyị nwere ike ịnye 4-inch na 6-inch SiC epitaxial wafers maka nrụpụta nke ngwaọrụ ike gụnyere SBD JBS PiN MOSFET JFET BJT GTO & IGBT site na 600V ruo 3300V.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Usoro nkwadebe nke silicon carbide epitaxial wafer bụ usoro iji teknụzụ Vapor Deposition (CVD).Ndị a bụ ụkpụrụ teknụzụ dị mkpa na usoro nkwadebe:

Ụkpụrụ nka nka:

Mkpokọta vapor kemịkalụ: N'iji gas akụrụngwa na mpaghara gas, n'okpuru ọnọdụ mmeghachi omume akọwapụtara, a na-emebi ya ma tinye ya na mkpụrụ iji mepụta ihe nkiri dị mkpa achọrọ.

Mmeghachi omume nke gas: Site na pyrolysis ma ọ bụ mmeghachi omume na-agbawa agbawa, a na-agbanwe kemịkalụ gas dị iche iche n'ime oge gas na ụlọ mmeghachi omume.

Usoro nhazi usoro:

Ọgwụgwọ mkpụrụ: A na-edobe mkpụrụ ahụ na ihicha elu na pretreatment iji hụ na ịdị mma na kristal nke epitaxial wafer.

Debugging ụlọ mmeghachi omume: gbanwee ọnọdụ okpomọkụ, nrụgide na ọsọ ọsọ nke ụlọ mmeghachi omume na ihe ndị ọzọ iji hụ na nkwụsi ike na njikwa nke ọnọdụ mmeghachi omume.

Ngwunye ihe eji eme ihe: na-ebunye akụrụngwa gas achọrọ n'ime ụlọ mmeghachi omume, na-agwakọta ma na-achịkwa ọnụego na-asọpụta dị ka ọ dị mkpa.

Usoro mmeghachi omume: Site na ikpo ọkụ ụlọ mmeghachi omume, nri gas na-enweta mmeghachi omume kemịkalụ n'ime ụlọ ahụ iji mepụta nkwụnye ego achọrọ, ya bụ ihe nkiri silicon carbide.

Na-ajụ oyi na nbudata: Na njedebe nke mmeghachi omume ahụ, a na-eji nwayọọ nwayọọ belata okpomọkụ ka ọ dị jụụ ma mee ka nkwụnye ego dị na ụlọ mmeghachi omume.

Epitaxial wafer annealing na post-processing: a na-ehichapụ wafer epitaxial a na-echekwa ma mechaa ya ka ọ dịkwuo mma eletrik na ngwa anya.

Usoro na ọnọdụ akọwapụtara nke usoro nkwadebe nke silicon carbide epitaxial wafer nwere ike ịdị iche dabere na akụrụngwa na ihe achọrọ.Ihe dị n'elu bụ naanị usoro usoro n'ozuzu na ụkpụrụ, ọrụ a kapịrị ọnụ kwesịrị ka edozi ya na kachasị dị ka ọnọdụ dị adị.