6 inch-8 inch LN-on-Si Composite Substrate ọkpụrụkpụ 0.3-50 μm Si/SiC/Sapphire of Materials

6 inch-8 inch LN-on-Si Composite Substrate Ọkpụrụkpụ 0.3-50 μm Si/SiC/Sapphire nke ihe eji egosipụta onyonyo

Nkọwa dị mkpirikpi:

Ihe mejupụtara 6-inch ruo 8-inch LN-on-Si composite bụ ihe arụmarụ dị elu nke na-ejikọta otu-crystal lithium niobate (LN) ihe nkiri dị gịrịgịrị na silicon (Si), nke nwere ọkpụrụkpụ sitere na 0.3 μm ruo 50 μm. Emebere ya maka imepụta ihe semiconductor dị elu na optoelectronic ngwaọrụ. N'iji usoro njikọ dị elu ma ọ bụ usoro uto epitaxial, mkpụrụ a na-ahụ maka ịdị elu kristal dị elu nke ihe nkiri LN dị gịrịgịrị ka ọ na-eme ka nnukwu wafer nha (6-inch ruo 8-inch) nke mkpụrụ silicon iji welie nrụpụta mmepụta na ịdị irè.
E jiri ya tụnyere nnukwu ihe LN, 6-inch ruo 8-inch LN-on-Si composite substrate na-enye ndakọrịta thermal kacha mma yana nkwụsi ike nke igwe, na-eme ka ọ dabara maka nhazi ọkwa ọkwa wafer buru ibu. Na mgbakwunye, enwere ike ịhọrọ ihe ntọala ọzọ dị ka SiC ma ọ bụ sapphire iji mezuo ihe achọrọ ngwa ngwa, gụnyere ngwaọrụ RF dị elu, foto agbakwunyere, na sensọ MEMS.

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Nkọwa ngwaahịa

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Usoro nka

0.3-50μm LN/LT na Insulators
N'elu oyi akwa
Dayameta	6-8 anụ ọhịa
Nhazi	X, Z, Y-42 wdg.
Akụrụngwa	LT, LN
Ọkpụrụkpụ	0.3-50μm
Substrate (ahaziri)
Ihe onwunwe	Si, SiC, Sapphire, Spinel, Quartz

Atụmatụ igodo

A na-ama mkpụrụ ihe mejupụtara 6-inch ruo 8-inch LN-on-Si site na njirimara ihe ya pụrụ iche yana ihe a na-emegharị emegharị, na-enye ohere dị ukwuu na semiconductor na ụlọ ọrụ optoelectronic:

1.Large Wafer ndakọrịta: 6-inch na 8-inch wafer size na-eme ka njikọ na-enweghị ntụpọ na ahịrị mmepụta semiconductor dị ugbu a (dịka, usoro CMOS), na-ebelata ụgwọ ọrụ mmepụta ma na-eme ka mmepụta ihe dị ukwuu.

2.High Crystalline Quality: Optimized epitaxial or bonding techniques na-eme ka njupụta dị ala dị na ihe nkiri LN dị mkpa, na-eme ka ọ dị mma maka ndị na-ahụ maka ndị na-ahụ maka ndị na-ahụ maka ndị na-eme ihe na-arụ ọrụ dị elu, ihe nzacha ọkụ ọkụ (SAW), na ngwaọrụ ndị ọzọ ziri ezi.

3.Adjustable Thickness (0.3-50 μm): Ultrathin LN layers (<1 μm) dabara adaba maka ibe foto agbakwunyere, ebe akwa akwa (10-50 μm) na-akwado ngwaọrụ RF dị elu ma ọ bụ ihe mmetụta piezoelectric.

4.Multiple Substrate Options: Na mgbakwunye na Si, SiC (high thermal conductivity) ma ọ bụ sapphire (ihe mkpuchi dị elu) nwere ike ịhọrọ dị ka ihe ndabere iji gboo mkpa nke ngwa ngwa dị elu, okpomọkụ, ma ọ bụ ike dị elu.

5.Thermal na Mechanical Stability: Mkpụrụ silicon na-enye nkwado ọrụ siri ike, na-ebelata warping ma ọ bụ mgbawa n'oge nhazi na imeziwanye mkpụrụ ngwaọrụ.

Àgwà ndị a na-edobe 6-inch ka 8-inch LN-on-Si composite substrate dị ka ihe a na-ahọrọ maka teknụzụ ọnụ dị ka nkwukọrịta 5G, LiDAR, na quantum optics.

Ngwa isi

A na-anakwere mkpụrụ ihe mejupụtara 6-inch ruo 8-inch LN-on-Si n'ọtụtụ ụlọ ọrụ teknụzụ dị elu n'ihi njirimara eletrọ-optic pụrụiche, piezoelectric na akụrụngwa:

1.Optical Communications na Integrated Photonics: Na-enyere ndị na-eme mgbanwe ọkụ eletrik dị elu, ndị na-efegharị efegharị, na sekit agbakwunyere photonic (PICs), na-agwa bandwidth chọrọ ebe data data na netwọk fiber-optic.

Ngwa 2.5G / 6G RF: Ọnụ ọgụgụ dị elu nke piezoelectric nke LN na-eme ka ọ dị mma maka ikuku ụda elu (SAW) na ihe nzacha acoustic wave (BAW), na-eme ka nhazi mgbaàmà na ọdụ 5G na ngwaọrụ mkpanaka.

3.MEMS na Sensọ: Mmetụta piezoelectric nke LN-on-Si na-eme ka accelerometers dị elu, biosensors, na ultrasonic transducers maka ọgwụ na ụlọ ọrụ mmepụta ihe.

4.Quantum Teknụzụ: Dị ka ihe na-ahụ anya na-adịghị ahụ anya, a na-eji ihe nkiri LN dị mkpa na isi mmalite ọkụ quantum (dịka ọmụmaatụ, foton pairs) na agbakwunyere quantum chips.

5.Lasers na Ntanetị Ntanetị: Ultrathin LN Layers na-eme ka ọgbọ nke abụọ na-arụ ọrụ nke ọma (SHG) na ngwaọrụ parametric oscillation (OPO) maka nhazi laser na nyocha spectroscopic.

Ngwakọta ihe mejupụtara 6-inch ruo 8-inch nke ahaziri ahazi na-enye ohere ka arụpụtara ngwaọrụ ndị a n'ụdị akwa wafer buru ibu, na-ebelata oke ọnụ ahịa nrụpụta.

Nhazi na Ọrụ

Anyị na-enye nkwado teknụzụ zuru oke na ọrụ nhazi maka 6-inch ruo 8-inch LN-on-Si composite substrate iji gboo R&D dị iche iche na mkpa mmepụta:

1.Custom Fabrication: LN film ọkpụrụkpụ (0.3-50 μm), crystal orientation (X-cut / Y-cut), na mkpụrụ ihe onwunwe (Si / SiC / sapphire) nwere ike ahaziri na-ebuli ngwaọrụ arụmọrụ.

2.Wafer-Level Processing: Nnukwu ọkọnọ nke 6-inch na 8-inch wafers, gụnyere ọrụ azụ azụ dị ka dicing, polishing, na mkpuchi, na-eme ka ihe ndị ahụ dị njikere maka ntinye ngwaọrụ.

3.Technical Consultation and Testing: Ngosipụta ihe eji eme ihe (dịka, XRD, AFM), nyocha arụmọrụ nke electro-optic, na nkwado ịme anwansị ngwaọrụ iji mee ka nkwenye dị ngwa ngwa.

Ebumnuche anyị bụ iguzobe mkpụrụ ihe mejupụtara 6-inch ruo 8-inch LN-on-Si dị ka isi ihe ngwọta maka ngwa optoelectronic na semiconductor, na-enye nkwado ngwụcha na njedebe sitere na R&D iji mepụta oke.

Mmechi

Ihe mejupụtara 6-inch ruo 8-inch LN-on-Si composite, yana nnukwu wafer ya, ogo ihe dị elu, yana ngbanwe, na-ebute ọganihu na nkwukọrịta ngwa anya, 5G RF, na teknụzụ quantum. Ma maka nrụpụta nnukwu olu ma ọ bụ ihe ngwọta ahaziri ahazi, anyị na-ebuga mkpụrụ ndị a pụrụ ịdabere na ya na ọrụ nkwado iji mee ka ihe ọhụrụ dị na teknụzụ nwee ike.