6 inch 4H SEMI Ụdị SiC mejupụtara mkpụrụ ọka ọkpụrụkpụ 500μm TTV≤5μm ọkwa MOS
Usoro nka
| Ihe | Nkọwapụta | Ihe | Nkọwapụta |
| Dayameta | 150± 0.2 mm | N'ihu (Si-face) adịghị ike | Ra≤0.2 nm (5μm×5μm) |
| Ụdị poly | 4H | Chip Edge, Scratch, Crack (nlele anya) | Ọ dịghị |
| Nguzogide | ≥1E8 Ω·cm | TTV | ≤5 μm |
| Nyefee oyi akwa Ọkpụrụkpụ | ≥0.4 μm | Warp | ≤35 μm |
| Ihe efu (2mm>D>0.5mm) | ≤5 ea/wafer | Ọkpụrụkpụ | 500± 25 μm |
Atụmatụ igodo
1. Arụmọrụ Ugboro dị elu pụrụiche
Ihe mejupụtara 6-inch nke ọkara mkpuchi SiC na-eji nhazi oyi akwa dielectric graded, na-eme ka mgbanwe dielectric na-agbanwe mgbe niile nke <2% na Ka-band (26.5-40 GHz) yana melite nkwụsi ike nke usoro site na 40%. 15% na-abawanye na arụmọrụ yana 20% ike dị ala na modul T / R na-eji mkpụrụ a.
2. Ọganihu Thermal Management
Nhazi ihe mejupụtara "akwa thermal" pụrụ iche na-enyere ike ikuku ikuku dị 400 W/m·K aka. N'ime modul PA 28 GHz 5G base station, nkwụsịtụ okpomọkụ na-ebili naanị 28 Celsius mgbe awa 24 na-arụ ọrụ na-aga n'ihu-50 Celsius dị ala karịa ngwọta nkịtị.
3. Ogo Wafer dị elu
Site na usoro njem ụgbọ njem anụ ahụ kachasị mma (PVT), anyị na-enweta njupụta dislocation <500/cm² na ngụkọta ịdị arọ dị iche iche (TTV) <3 μm.
4. Nrụpụta-Enyi na Enyi nhazi
Usoro nkpuchi laser anyị emepụtara nke ọma maka mkpụrụ ihe mejupụtara 6-inch nke ọkara mkpuchi mkpuchi SiC na-ebelata njupụta ala ala site n'iwu abụọ dị ukwuu tupu epitaxy.
Ngwa isi
1. 5G Base Station Core components
N'ime usoro antenna Massive MIMO, ngwaọrụ GaN HEMT na 6-inch insulating SiC composite substrates na-enweta ike mmepụta 200W na> arụmọrụ 65%. Nnwale ubi na 3.5 GHz gosipụtara mmụba 30% na radius mkpuchi.
2. Sistemụ Nkwukọrịta Satịlaịtị
Ndị transceivers satịlaịtị dị ala (LEO) na-eji mkpụrụ a gosipụtara 8 dB dị elu EIRP na Q-band (40 GHz) ebe ị na-ebelata ibu site na 40%. Ọdụdọ SpaceX Starlink ejirila ya maka nrụpụta ọtụtụ.
3. Military Radar Systems
Ụdị radar T/R nke a na-adọba ụgbọala na-enweta 6-18 GHz bandwit na ọnụ ọgụgụ mkpọtụ dị ala dị ka 1.2 dB, na-agbatị nchoputa site na 50 km na usoro radar ịdọ aka ná ntị mmalite.
4. Automotive Millimeter-Wave Rada
Chips radar automotive 79 GHz na-eji mkpụrụ a na-eme ka mkpebi angular gaa na 0.5 Celsius, na-emezu ihe achọrọ ịnya ụgbọ ala L4.
Anyị na-enye ngwọta ọrụ ahaziri ahazi maka 6-inch nke ọkara mkpuchi ihe mejupụtara SiC. N'ihe gbasara ịhazi paramita ihe, anyị na-akwado nhazi nke ọma n'ime oke nke 10⁶-10¹⁰ Ω·cm. Karịsịa maka ngwa agha, anyị nwere ike ịnye nhọrọ nguzogide dị oke> 10⁹ Ω·cm. Ọ na-enye nkọwapụta ọkpụrụkpụ atọ nke 200μm, 350μm na 500μm n'otu oge, yana nnabata a na-achịkwa nke ọma n'ime ± 10μm, na-ezute ihe dị iche iche chọrọ site na ngwaọrụ ugboro ugboro na ngwa ike dị elu.
Na usoro nke elu ọgwụgwọ usoro, anyị na-enye abụọ ọkachamara ngwọta: Chemical Mechanical Polishing (CMP) nwere ike nweta atomic-larịị elu flatness na Ra <0.15nm, izute kasị achọ epitaxial ibu chọrọ; The epitaxial njikere n'elu teknụzụ maka mmepụta ngwa ngwa chọrọ nwere ike inye ultra-ezigbo elu na Sq<0.3nm na residual oxide ọkpụrụkpụ <1nm, budata mfe usoro pretreatment na njedebe nke onye ahịa.
XKH na-enye azịza ahaziri ahazi maka 6 inch nke ọkara mkpuchi SiC mejupụtara ihe mejupụtara.
1. Nhazi nke ihe eji eme ihe
Anyị na-enye nlegharị anya n'ụzọ ziri ezi n'ime oke 10⁶-10¹⁰ Ω·cm, yana nhọrọ ultra-high resistivity pụrụ iche> 10⁹ Ω·cm dị maka ngwa agha/aerospace.
2. Nkọwapụta ịdị arọ
Nhọrọ ọkpụrụkpụ atọ ahaziri ahazi:
200μm (kachasị maka ngwaọrụ dị elu)
350μm (ọkọlọtọ nkọwa)
500μm (emebere maka ngwa ike dị elu)
Ọdịiche dị iche iche na-ejigide oke nnabata nke ± 10μm.
3. Teknụzụ Ọgwụgwọ Elu
Kemịkalụ Mechanical Polishing (CMP): Na-eji Ra <0.15nm na-enweta ọkwa dị elu nke atọm, na-ezute mkpa uto epitaxial siri ike maka RF na ngwaọrụ ike.
4. Epi-njikere elu nhazi
Na-ebupụta elu dị nro na Sq<0.3nm siri ike
Na-achịkwa ọkpụrụkpụ oxide nke ala ruo <1nm
· Na-ewepụ ihe ruru 3 tupu nhazi usoro na ụlọ ọrụ ndị ahịa
